CA2231324C - Induction load balancer for parallel heating of multiple parts - Google Patents

Induction load balancer for parallel heating of multiple parts Download PDF

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Publication number
CA2231324C
CA2231324C CA002231324A CA2231324A CA2231324C CA 2231324 C CA2231324 C CA 2231324C CA 002231324 A CA002231324 A CA 002231324A CA 2231324 A CA2231324 A CA 2231324A CA 2231324 C CA2231324 C CA 2231324C
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CA
Canada
Prior art keywords
link
coil
coils
heating coils
induction
Prior art date
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Expired - Fee Related
Application number
CA002231324A
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French (fr)
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CA2231324A1 (en
Inventor
Charles W. Haldeman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
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Massachusetts Institute of Technology
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Publication date
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Publication of CA2231324A1 publication Critical patent/CA2231324A1/en
Application granted granted Critical
Publication of CA2231324C publication Critical patent/CA2231324C/en
Anticipated expiration legal-status Critical
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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/10Induction heating apparatus, other than furnaces, for specific applications
    • H05B6/101Induction heating apparatus, other than furnaces, for specific applications for local heating of metal pieces
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/06Control, e.g. of temperature, of power
    • H05B6/08Control, e.g. of temperature, of power using compensating or balancing arrangements
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/36Coil arrangements
    • H05B6/44Coil arrangements having more than one coil or coil segment

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Induction Heating (AREA)

Abstract

The load balancer incorporates link coil circuits that inductively couple to induction heating coils, which are connected in parallel across a power source. A capacitor is electrically connected in the link coi l circuit. By varying degree to which the link coil is inductively coupled to the heating coil or by changing the capacitance, either using a variable capacitor or switching among different capacitors, changes in the amount of reactance coupled into the heating coil are effected. Thus the current in the corresponding heating coil can be varied, enabling adjustment of the heating of the workpiece. Accordingly, the resulting system is efficient since only a single coil rather than multiple series coils are used. This aspect can be enhanced when litz cable is used in coil construction. Further, the system is compatible with active control.

Description

INDUCTION LOAD BALANCER FOR PARALLEL
HEATING OF MULTIPLE PARTS
Backcrround of the Invention Induction heating is ideally suited for material-processing technology and has been used for many years for melting, brazing, heat treating, and crystal growth. In semiconductor processing, the main reason to prefer induction heating is cleanliness. Only the susceptor and wafer are subjected to high temperatures, and the heating coil can be located outside a physical enclosure. Materials at very high temperature, which cannot be contained within a crucible, can be heated directly in an RF float-zone configuration or by levitation melting. The steel industry employs RF induction for annealing cylindrical billets prior to hot working because the process is the most efficient and the least contaminating.
Many frequencies have been used for induction heating from 60 Hertz line-power up to several megahertz. In general, the lower frequencies are used with large ferrous metal work and the higher frequencies with smaller loads of low and high resistivity, which are comparatively more difficult to heat.
In production processes, it is often efficient to process multiple workpieces at the same time using a ' common source of power which has a capacity greater than that required for any single part. Such larger power supplies are lower in cost per watt than small units, and in the cycle time for the operation, multiple parts are produced.
Generally, the heating provided by each parallel coil must be individually controllable, however. Small differences between the workpieces cause them to couple more or less strongly to the magnetic fields generated by these coils. This coupling can be dynamic throughout the heating process. As a result without some form of control, some workpieces would be overheated and ruined while other workpieces are insufficiently heated.
Summarv of the Invention Known techniques for controlling the heating of individual workpieces by inductive heating coils connected in parallel across the single common source of power have a number of drawbacks. One such technique relies on changing the physical relationship between the inductive heating coil and the workpiece to effect the degree of inductive coupling. This is problematic because it requires mechanical movement within the heating zone and consequently does not provide a realistic method for actively controlling inductive heating during the heating operation.
Another technique uses variable transformers connected between the power generation source and the inductive heating coil to control the current in the coil. The series transformers, however, are both expensive and undermine the efficiency of the circuit since the current from the power source must go through three coils rather than the single heating coil.
The present invention enables the use of a single high frequency electric power source to heat multiple workpieces with separate inductive heating coils but ' accomplishes this aim in an efficient and relatively less complex system. To this end, the present invention incorporates link coil circuits that inductively couple to each of the heating coils. A capacitor is electrically connected in the link coil circuit. By varying degree to which the link coil is inductively coupled to the heating coil or by changing the capacitor, either using a variable capacitor or switching among different capacitors, changes in the amount of reactance coupled into the heating coil are effected. Thus, the current in the corresponding heating coil can be varied, enabling adjustment of the heating of the workpiece. Accordingly, the resulting system is efficient since only a single coil rather than multiple series coils are used. This aspect can be enhanced when litz cable is used in coil construction. Further, the system is compatible with active control.
The above and other features of the invention including various novel details of construction and combinations of parts, and other advantages, will now be more particularly described with reference to the accompanying drawings and pointed out in the claims.
It will be understood that the particular method and device embodying the invention are shown by way of illustration and not as a limitation of the invention.
The principles and features of this invention may be employed in various and numerous embodiments without the departing from the scope of the invention.
Brief Description of the Drawing's ' In the accompanying drawings, reference characters refer to the same parts throughout the different views.
The drawings are not necessarily to scale; emphasis has instead been placed upon illustrating the principles of the invention. Of the drawings:
Fig. 1 shows a prior art circuit configuration in which multiple heating coils are connected in parallel ' across a power bus of an electric power supply;
Fig. 2 is a circuit diagram of a first embodiment °
of the present invention utilizing a variable capacitor to adjust the current in the inductive heating coils;
Fig. 3 is a circuit diagram of a second embodiment of the present invention in which the coupled reactance of the link coil is varied by moving the link coil, such as by rotation or translation, relative to the inductive heating coil;
Fig. 4 is a graph illustrating main coil performance.
Fig. 5 is a graph illustrating the performance of a one turn link coil;
Fig. 6 is a graph illustrating the performance of a two turn link coil; and Fig. 7 is a graph illustrating the performance of a four turn link coil.
Detailed Descrit~tion of the Embodiments Fig. 1 illustrates a prior art configuration in which plural heating coils 110a-110c are connected in parallel across the power bus 112-114 of a power supply 116. In the ideal case, the workpieces 118a-118c will reach equal temperatures in the same time period with identical coils. If, however, manufacturing tolerances, for example, cause some parts to couple more strongly than others, overheating of these parts will occur. Physically altering the position of the coils or parts is required to correct this effect.
Fig. 2 illustrates an induction heating load balancer which has been constructed according to the principles of the present invention. Each induction heating unit 208a-208d has a heating coil 210a-210c for generating magnetic fields in a corresponding workpiece 218a-218c. Although three units are explicitly shown in the drawing, those skilled in the art will understand that the number of units may be increased or decreased depending upon the application. Inductive link circuits 220a-220c include a capacitor 224a-224c and link coil 222a-222c that is inductively coupled to the associated heating coil 210a-210c. The link coil circuits 220a-220c provide an equivalent impedance, ( cu M) 2 ( c~ M) 2 Rs2 +Xs2 Rs-J Rsz +Xs2 Xs in series with the associated heating coil 210a-210c.
Here Rs and Xs are the resistance and reactance of the link coil and M is the mutual inductance of the link coil and heating coils . M = k Lx.Ls where k is the coupling coefficient and LH and LS are the inductance of the heating coil 210a-210c and link 222a-222c, respectively. Note that when the capacitive reactance in the link, -j ~ cs, is larger than the inductive reactance, jwLs, the net reactance XS is capacitive and the reactance term above is inductive, adding to LH and reducing the current drawn from the bus 212,214 through that coil. This will be the case when the self resonant frequency of the capacitor and link is higher than the operating frequency.
The value of this coupled inductive reactance can be changed by changing the value of XS. In the first ' embodiment of Fig. 2, the variable capacitances 224a-224c are used to tune XS. Active control is provided ' by a controller 226 that receives information from detectors 228a-228c regarding the temperature of the corresponding workpieces 210a-210c and modulates the variable capacitances 224a-224c a.n order to achieved the desired heating characteristics.
Depending on the size of the capacitances 224a-224c required, switching between fixed values may or may not be the preferred method of adjustment.
Stronger coupling can be achieved with a full or multiple turn coil, rather than a partial link. This will generally yield a larger value of M. Hence a smaller change in capacitance will be required to produce a given inductance change. Variable capacitors are well suited for this situation. Detailed calculations must be carried out in each specific case to determine which tuning method is best.
For lower frequencies 2 kHz to 50 kHz individual switched capacitors are probably preferable. Here, larger capacitance changes will be required to produce the same inductance change.
Preferably, the link is made using low resistance litz cable. This construction ensures that the real part of the impedance Rs is very small. Therefore, the link introduces very little loss of power, refer to Example 2 below.
Fig. 3 is a circuit diagram of the second embodiment of the induction load balancer. Here, k is _7_ changed by, for example, rotating or displacing the link coil 322a-322b relative to the induction heating coils 318a-318b. For most applications, this method is preferred less because active control of this movement s may be difficult to engineer since it must take place near the heating zone.
Example 1 - Mheoretical In this example, the heating coil has six to turns in the form of a pancake and is constructed from a 7500 strand #42 litz cable as described in U.S. Pat.
No. 5,461,215. Using available design aids, C.W.
Haldeman, E.I. Lee, and A.D. Weinbert, °'Litz Coil, A
Convenience Design Package for Low Loss RF Coils," MIT
i5 Technology Licensing Office, Software Distribution Center, Case No. 5964LS, its performance can be computed. Fig. 4 is a plot of the a..c. resistance Ra and quality Q of the coil as a function of frequency.
Its inductance is 2.9 micro henrys, at an operating 2o frequency of 25 kHz. The reactance is 0.454 ohms.
This results in a current draw of 1100 amperes from a 500 volt source.
It is desired to tune this coil by increasing the nominal inductance 1300, i.e., to increase the 25 inductance to 3.77 micro henrys. Three possible links are considered having l turn, 2 turns, and 4 turns.
The results are shown in Figs. 5, 6, and 7, respectively, which are plots of the: a.c. resistance Ra and quality Q as a function of frequency.
3o The capacitance required to tune for a 30%
increase in inductance can be calculated if a coupling _g_ HEATING

INDUCTANCE 2 . 8 9 0 . 3 3 0 . 61 E.cH 1 . 1 /.cH
EcH E,cH

RESISTANCE 0.001 ohm 0.0005 ohm 0.0007 ohm O.OOlohm MUTUAL - 0 . 5 6 1 . 0 E.tH 1 . 6 fcH
~,cH

INDUCTANCE

TO HEATING

COIL

COUPLING - 0.6 0.8 0.9 COEFFIC-IENT TO

HEATING

COIL

CAPACITANCE - 60 E,tF 21 /a.F 10 /,t.F

REQUIRED

CAPACITOR

OPERATING

VOLTAGE

LINK VA 550,000 34,000 40,000 63,000 The table illustrates that the tuning can be accomplished by controlling only 6 to 11 percent of the main coil volt-amperes. Because of the greater tendency for error in the lower coupling calculations, the link 3 case is to be preferred. Also in practice, the capacitors are more conveniently sized.
coefficient is assumed for each link coil. The results are tabulated below.
COUPLING LINK COMPARISON AT 25 KHz 30~ INDUCTANCE INCREASE
Example 2 - Experimental An existing induction heating coil wound from 8 ' turns of 21,875 strand number 48 litz cable with a turn -g-spacing of .560 inch or 1.422 centimeters, inside diameter of 4 inches or 10.16 centimeters, average diameter of 6 inches or 15.24 centimeters was connected to a Hewlett-Packard network analyzer and 'measured from 1 kHz to 30kHz. The measured inductance was 8.67 micro henrys at 25 kHz. The coil was then fitted with a link coil of 2 turns of 10,000 strand number 48 litz cable wound around the outside diameter. With the link open circuited the inductance was unchanged at 8.67 micro henrys. With the link shorted the inductance was reduced to 6.4 micro henrys as would be expected with an inductive ' link circuit... A group of foil-paper capacitors totaling 12.5 micro farads was then connected across the link coil. The inductance was then 11.5 micro henrys or an increase of 33 percent_ The change in resistance of the coil was not within the ability of the analyzer to resolve since it indicated a change from 5 milliohms without the capacitive link to -1.5 milliohms with the link and capacitors in place.
This shows that the desired tuning effect can indeed be accomplished without significant power dissipation. When mica capacitors were used, the performance was somewhat improved=-suggesting that the losses in the capacitors are also important and must also be small.
While this invention has been particularly shown and described with references to preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. For example, while separate workpieces are shown, it is clear that the coils could be used to control the heating of different regions of the same workpiece.
~~.n~'~p~~t ~~-~_.' 1

Claims (8)

CLAIMS,
1. An induction load balancer for induction heating coils (210), comprising:
link coils (222) inductively coupled to the induction heating coils; and capacitances (224) connected across each one of the link coils;
wherein coupled reactance from the link coils in the induction heating coils is variable to control current flow through the induction heating coils (210).
2. An induction load balancer as described in claim 1, wherein the capacitances (224) comprise variable capacitors for changing the coupled reactance into the corresponding one of the heating coils (210).
3. An induction load balancer as described in claims 1 or 2, wherein the capacitances (224) comprise switched capacitors for changing the coupled reactance into the corresponding one of the heating coils (210).
4 An induction load balancer as described in claims 1, 2 or 3, wherein the coupling between the link coils (322) and the corresponding heating coils (310) is variable to affect the coupled reactance into the corresponding one of the heating coils.
5. An induction load balancer as described in claims 1, 2, 3 or 4, further comprising a controller (226) for varying the coupled reactance in response to workpiece (218) temperatures generated by the heating coils.
6. A method for controlling heating of workpieces (218) by an induction heating system including an electrical power supply (216), induction heating coils (210) connected in parallel across the power supply, and link coil circuits (220) inductively coupled to different ones of the induction heating coils, the method comprising:
detecting temperatures of the workpieces; and modulating current flow through the induction heating coils (210) by changing coupled reactance from the link coil circuits (220) into the corresponding induction heating coils (210) in response to the detected temperatures.
7. A method as described in claim 6, wherein the step of modulating the current flow comprises varying capacitances of the link coil circuits to change the coupled reactance.
8. A method as described in either of claims 6 or 7, wherein the step of modulating the current flow comprises varying coupling between the link coils and the corresponding heating coils to change the coupled reactance.
CA002231324A 1995-09-08 1996-08-28 Induction load balancer for parallel heating of multiple parts Expired - Fee Related CA2231324C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/526,036 US5660754A (en) 1995-09-08 1995-09-08 Induction load balancer for parallel heating of multiple parts
US08/526,036 1995-09-08
PCT/US1996/013809 WO1997009867A1 (en) 1995-09-08 1996-08-28 Induction load balancer for parallel heating of multiple parts

Publications (2)

Publication Number Publication Date
CA2231324A1 CA2231324A1 (en) 1997-03-13
CA2231324C true CA2231324C (en) 2006-05-09

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Application Number Title Priority Date Filing Date
CA002231324A Expired - Fee Related CA2231324C (en) 1995-09-08 1996-08-28 Induction load balancer for parallel heating of multiple parts

Country Status (8)

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US (1) US5660754A (en)
EP (1) EP0848895B1 (en)
JP (1) JP2000509542A (en)
AU (1) AU6903096A (en)
CA (1) CA2231324C (en)
DE (1) DE69608288T2 (en)
TW (1) TW499139U (en)
WO (1) WO1997009867A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
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US5983109A (en) 1997-02-03 1999-11-09 Northern Telecom Limited Method and apparatus for using advanced positioning systems in cellular communications networks
US6808075B2 (en) * 2002-04-17 2004-10-26 Cytonome, Inc. Method and apparatus for sorting particles
US7323666B2 (en) 2003-12-08 2008-01-29 Saint-Gobain Performance Plastics Corporation Inductively heatable components
US7632350B2 (en) * 2004-01-23 2009-12-15 Abp Induction, Llc Crystal grower with integrated Litz coil
US8673072B2 (en) * 2004-01-23 2014-03-18 Abp Induction, Llc Crystal grower with integrated litz coil
CN112491159A (en) * 2020-11-17 2021-03-12 哈尔滨工业大学 Circuit for balancing current among three parallel-wound wireless power transmission coil strands and parameter design method thereof

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US3823297A (en) * 1972-10-02 1974-07-09 R Cunningham Load controlled induction heating
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Also Published As

Publication number Publication date
JP2000509542A (en) 2000-07-25
EP0848895A1 (en) 1998-06-24
CA2231324A1 (en) 1997-03-13
DE69608288D1 (en) 2000-06-15
TW499139U (en) 2002-08-11
EP0848895B1 (en) 2000-05-10
WO1997009867A1 (en) 1997-03-13
AU6903096A (en) 1997-03-27
US5660754A (en) 1997-08-26
DE69608288T2 (en) 2000-09-21

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