CA2216296A1 - Imaging method for manufacture of microdevices - Google Patents

Imaging method for manufacture of microdevices

Info

Publication number
CA2216296A1
CA2216296A1 CA002216296A CA2216296A CA2216296A1 CA 2216296 A1 CA2216296 A1 CA 2216296A1 CA 002216296 A CA002216296 A CA 002216296A CA 2216296 A CA2216296 A CA 2216296A CA 2216296 A1 CA2216296 A1 CA 2216296A1
Authority
CA
Canada
Prior art keywords
imaging method
microdevices
manufacture
directions
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002216296A
Other languages
French (fr)
Other versions
CA2216296C (en
Inventor
Akiyoshi Suzuki
Miyoko Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3028631A external-priority patent/JP2633091B2/en
Priority claimed from JP3128446A external-priority patent/JP2890892B2/en
Application filed by Individual filed Critical Individual
Priority claimed from CA002061499A external-priority patent/CA2061499C/en
Publication of CA2216296A1 publication Critical patent/CA2216296A1/en
Application granted granted Critical
Publication of CA2216296C publication Critical patent/CA2216296C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions, is disclosed which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the first and second directions, respectively; and illuminating the pattern with light from the light source.
CA002216296A 1991-02-22 1992-02-19 Imaging method for manufacture of microdevices Expired - Lifetime CA2216296C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP3028631A JP2633091B2 (en) 1991-02-22 1991-02-22 Image projection method, circuit manufacturing method, and projection exposure apparatus
JP028631/1991 1991-02-22
JP128446/1991 1991-04-30
JP3128446A JP2890892B2 (en) 1991-04-30 1991-04-30 Exposure apparatus and element manufacturing method using the same
CA002061499A CA2061499C (en) 1991-02-22 1992-02-19 Imaging method for manufacture of microdevices

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA002061499A Division CA2061499C (en) 1991-02-22 1992-02-19 Imaging method for manufacture of microdevices

Publications (2)

Publication Number Publication Date
CA2216296A1 true CA2216296A1 (en) 1992-08-23
CA2216296C CA2216296C (en) 2003-04-15

Family

ID=27169025

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002216296A Expired - Lifetime CA2216296C (en) 1991-02-22 1992-02-19 Imaging method for manufacture of microdevices

Country Status (1)

Country Link
CA (1) CA2216296C (en)

Also Published As

Publication number Publication date
CA2216296C (en) 2003-04-15

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Legal Events

Date Code Title Description
EEER Examination request
MKEX Expiry