CA2184206C - Molded glass plate produced by mold with modified surface - Google Patents

Molded glass plate produced by mold with modified surface Download PDF

Info

Publication number
CA2184206C
CA2184206C CA002184206A CA2184206A CA2184206C CA 2184206 C CA2184206 C CA 2184206C CA 002184206 A CA002184206 A CA 002184206A CA 2184206 A CA2184206 A CA 2184206A CA 2184206 C CA2184206 C CA 2184206C
Authority
CA
Canada
Prior art keywords
mold
metallic mold
carbon
coating
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002184206A
Other languages
French (fr)
Other versions
CA2184206A1 (en
Inventor
Yasuaki Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZAATEC TECHNOLOGY Inc
Original Assignee
ZAATEC TECHNOLOGY Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24073252&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CA2184206(C) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by ZAATEC TECHNOLOGY Inc filed Critical ZAATEC TECHNOLOGY Inc
Publication of CA2184206A1 publication Critical patent/CA2184206A1/en
Application granted granted Critical
Publication of CA2184206C publication Critical patent/CA2184206C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • C03B11/08Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C03B11/086Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B40/00Preventing adhesion between glass and glass or between glass and the means used to shape it, hold it or support it
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0254Physical treatment to alter the texture of the surface, e.g. scratching or polishing
    • C23C16/0263Irradiation with laser or particle beam
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0272Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/73Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/739Magnetic recording media substrates
    • G11B5/73911Inorganic substrates
    • G11B5/73913Composites or coated substrates
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/73Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/739Magnetic recording media substrates
    • G11B5/73911Inorganic substrates
    • G11B5/73921Glass or ceramic substrates
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/14Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/24Carbon, e.g. diamond, graphite, amorphous carbon
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/40Product characteristics
    • C03B2215/44Flat, parallel-faced disc or plate products
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/40Product characteristics
    • C03B2215/45Ring or doughnut disc products or their preforms
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582Record carriers characterised by the selection of the material or by the structure or form
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Magnetic Record Carriers (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Liquid Crystal (AREA)

Abstract

A mold for pressing molded glass plates where the desired flatness of the shaped surface of the metallic mold-made of super-hard material- is achieved by carbon coating. Before the carbon coating is applied, ions are injected into the mold surface. This increases the adhesiveness of the carbon coating resulting in an increased usable life for the mold.

Description

SPECIFICATION
1. TITLE OF THE INVENTION
Molded Glass Plate Produced by Mold with Modified Surface.
2. BACKGROUND OF THE INVENTION
This invention relates to a mold for pressing glass plates for hard disks for computer memory and the molded glass substrates produced by using it.
Up to the present., generally hard disks made of aluminum substrate coated with magnetic materials were used. But because many grinding processes are required to obtain a specified surface roughness on the aluminum substrate, production costs are high.
In consideration of the above, the object of this invention is to provide press molds that are able to abtain a specified surface roughness, and the glass substrates for use in computer memory devices pressed by the press molds, both being produced at low cost.
3. BRIEF DESCRIPTION OF THE INVENTION
According to this invention, the metallic mold coated with graphite or amorphous type carbon to achieve required flatness has nitrogen ions injected onto the surface of the super-hard mold material just before carbon coating, thus the surface layer of the mold is modified.
As a result of this pracess, it becomes possible to increase the adhesiveness of the carbon onto the mold and the life of the mold can be greatly extended.
In this invention, ion injection is performed to at least a depth of 0.5 ~,m into the surface, and thereafter carbon coating is performed at least a 0.1-1 ~m thickness on the ion-injected surface. Also the surface is treated so that the flatness reaches 2/1000-8/1000 mm.

Further, according to this invention, glass plates used as glass substrates for computer memory are molded by using the metallic mold on which the surface has been modified by injecting ions before coating with carbon of type graphite or amorphous diamond.
In accordance with one aspect of the present invention, there is provided a nuetallic mold for pressing a molded glass substrate for use in computer memory devices, in which a required flatness is achieved by coating the surface of said metallic mold made of super-hard material with carbon, characterized in that said surface of said metallic mold is ion injected and said. surface layer is modified in advance of carbon coating.
In accordance with another aspect of the present invention, there is provided a molded glass substrate for a computer memory, wherein the substrate is manufactured by heating to a softening temperature a glass material for the glass substrate that has been preshaped in a circular disk, molding the material by using a metallic mold that is heated to a temperature substantially equal to that of said glass material, and then gradually cooling the material to room temperature so as to eliminate the necessity of a grinding step after molding; wherein said mold is a metallic mold, made of super-hard material, for which a required flatness is secured by coating t:he surface of said metallic mold with carbon, and with said metallic mold characterized such that its surface is modified by ion injection in advance of said carbon coating.
4. BRIEF DESCRIPTION OF THE DRAWING
Fig. 1 shows a glass substrate for computer memory molded by using a metallic mold according to this invention.
5. DETAILED DESCRIPTION OF THE INVENTION
The embodiment of this invention is described in detail as follows. Herein, a metallic mold made of super-hard material, having a surface plane of more than 8/1000 mm is modified in forming Gauss distribution on the surface layer by ion injection such as a Nitrogen atomic ion in advance of coating with graphite or amorphous diamond-type carbon.
Namely, an ion-injected layer is shaped to a depth of at least 0.5 ~.m into the surface of a super-hard alloy by ion injection, and then carbon coat is provided in a depth at least 0.1-1 ~m on the ion-injected layer. The last layer of the surface is flattened so as to keep the flatness in the range of 2/1000-8/1000 mm.
By applying the metallic mold according to this invention, it becomes possible to mold a glass substrate 1 for use computer memory devices as shown in the drawings.
In the ion-injection method applying high frequency discharging (105-107 132) makes it possible to inject ions to a depth of at least 0.5 ~m into the surface layer of the metallic mold by keeping ionizing current at 10 mA, ion irradiation at 1.x102 ions/cm2 (100 doses), temperature at 300-500°C, and a duration of 10-40 seconds. The metallic mold is then coated with an amorphous diamond type of carbon to a thickness of at least 0.1-1 ~m on the ionized layer.
For example, when pressing a glass plate of 63 mm ~ (diameter) by applying the metallic mold according to this invention, first the glass plate which is preshaped in a circular disk is heated to the softening temperature of glass material, then the heated glass plate is loaded into the metallic mold heated to the same temperature, and then pressed. After press:rng, the pressed glass plate is gradually cooled, over a period of 15-20 minutes, down to room temperature. Despite repeating 100,000 applications of this operation, peeling off. of the carbon coat from the surface of the metallic mold was never seen. The effectiveness of this invention is reflected in the actual results.
The reason that the life of the metallic mold was considerably extended appears to be that the fatigue of the metallic mold is decreased by keeping the glass temperature and the mold temperature approximately equal, together with the improved peeling off property of the metallic mold owing to the ion radiation.
As described above in detail, in this inventions before application of the c:~arbon coating the shaped surface of the metallic mold is modified in the surface layer thereof by ion-injection, thereby it. becomes possible to greatly increase the adhesiveness of the carbon coat onto the metallic mold and to extend the life of the metallic mold. Further elimination of a polishing step applied to the pressed product results from the high -graded flatness of the molded glass plates.
After producing glass substrates using the mold and process described in this invention, the surface of the glass substrates can be coated with magnetic materials.

Claims (5)

1. A metallic mold for pressing a molded glass substrate for use in computer memory devices, in which a required flatness is achieved by coating the surface of said metallic mold made of super-hard material with carbon, characterized in that said surface of said metallic mold is ion injected and said surface layer is modified in advance of carbon coating.
2. The metallic mold for pressing a molded glass substrate for use in computer memory devices in claim 1, wherein said surface of said mold is ion-injected to a depth of at least 0.5 µm into said surface layer thereof.
3. The metallic mold for pressing a glass plate in claim 1, wherein said carbon coating is of at least a 0.1-1 µm thickness on said ionized layer.
4. A molded glass substrate for a computer memory, wherein the substrate is manufactured by heating to a softening temperature a glass material for the glass substrate that has been preshaped in a circular disk, molding the material by using a metallic mold that is heated to a temperature substantially equal to that of said glass material, and then gradually cooling the material to room temperature so as to eliminate the necessity of a grinding step after molding;
wherein said mold is a metallic mold, made of super-hard material, for which a required flatness is secured by coating the surface of said metallic mold with carbon, and with said metallic mold characterized such that its surface is modified by ion injection in advance of said carbon coating.
5
CA002184206A 1995-08-29 1996-08-27 Molded glass plate produced by mold with modified surface Expired - Fee Related CA2184206C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52058595A 1995-08-29 1995-08-29
US520,585 1995-08-29

Publications (2)

Publication Number Publication Date
CA2184206A1 CA2184206A1 (en) 1997-03-01
CA2184206C true CA2184206C (en) 2002-10-08

Family

ID=24073252

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002184206A Expired - Fee Related CA2184206C (en) 1995-08-29 1996-08-27 Molded glass plate produced by mold with modified surface

Country Status (13)

Country Link
JP (2) JP3275091B2 (en)
KR (1) KR100385257B1 (en)
CN (1) CN1102470C (en)
AU (1) AU718549B2 (en)
CA (1) CA2184206C (en)
DE (1) DE19634974A1 (en)
FR (1) FR2738236B1 (en)
GB (1) GB2304736B (en)
IL (1) IL119144A0 (en)
MY (1) MY115041A (en)
NL (1) NL1003899C2 (en)
SG (1) SG47172A1 (en)
ZA (1) ZA967329B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999006333A1 (en) * 1997-07-30 1999-02-11 Hoya Corporation Method of producing glass substrate for information recording medium
NL1008105C2 (en) * 1998-01-23 1999-07-26 Axxicon Moulds Eindhoven Bv Injection mold.
JP2002079522A (en) * 2000-06-23 2002-03-19 Hitachi Maxell Ltd Die for molding disk substrate and die for molding resin
JP4702201B2 (en) * 2006-06-28 2011-06-15 東洋製罐株式会社 Resin processing parts

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA968561A (en) * 1970-11-27 1975-06-03 Gerald E. Blair Method for molding glass lenses
DE3533856A1 (en) * 1985-09-23 1987-05-21 Wilhelm Koenig Apparatus for producing hard discs of glass
JPS6483529A (en) * 1987-09-28 1989-03-29 Hoya Corp Production of glass forming mold
DE3800567A1 (en) * 1988-01-12 1989-07-20 Wilhelm Koenig Compression mould for pressing hard glass diskettes
DE3808380A1 (en) * 1988-03-12 1989-09-21 Wilhelm Koenig Process for embossing fixed programs on glass discs and apparatus for carrying out the process
JPH01301864A (en) * 1988-05-31 1989-12-06 Hoya Corp Manufacture of glass forming die
US5026415A (en) * 1988-08-16 1991-06-25 Canon Kabushiki Kaisha Mold with hydrogenated amorphous carbon film for molding an optical element
US5202156A (en) * 1988-08-16 1993-04-13 Canon Kabushiki Kaisha Method of making an optical element mold with a hard carbon film
JPH0624991B2 (en) * 1988-08-24 1994-04-06 松下電器産業株式会社 Mold for press molding of optical glass element
US5380349A (en) * 1988-12-07 1995-01-10 Canon Kabushiki Kaisha Mold having a diamond layer, for molding optical elements
JP2572438B2 (en) * 1989-01-30 1997-01-16 ホーヤ株式会社 Manufacturing method of glass press mold
JP2837700B2 (en) * 1989-08-23 1998-12-16 ティーディーケイ株式会社 Method for forming diamond-like thin film
US5112025A (en) * 1990-02-22 1992-05-12 Tdk Corporation Molds having wear resistant release coatings
US5246198A (en) * 1990-06-01 1993-09-21 Canon Kabushiki Kaisha Diamond crystal coated mold for forming optical elements
GB9019219D0 (en) * 1990-09-01 1990-10-17 Atomic Energy Authority Uk Diamond-like carbon coatings
US5125945A (en) * 1991-04-09 1992-06-30 Corning Incorporated Method and apparatus for parallel alignment of opposing mold surfaces by controlling the thermal expansion of the apparatus
JP3009761B2 (en) * 1991-07-26 2000-02-14 日本タングステン株式会社 Mold material for molding
FR2682125A1 (en) * 1991-10-07 1993-04-09 Nitruvid PROCESSING PROCESS FOR DEPOSITING A CARBON LAYER IN A STEAM PHASE ON THE SURFACE OF A METAL PART AND A PART THUS OBTAINED.
JP3049132B2 (en) * 1991-10-11 2000-06-05 オリンパス光学工業株式会社 Manufacturing method of optical element molding die and optical element molding die
US5347887A (en) * 1993-03-11 1994-09-20 Microsurgical Techniques, Inc. Composite cutting edge
JPH06320636A (en) * 1993-05-12 1994-11-22 Canon Inc Production of mold for molding optical element
JPH0790553A (en) * 1993-09-27 1995-04-04 Shojiro Miyake Sliding member and its production
JPH07109128A (en) * 1993-10-12 1995-04-25 Hoya Corp Mold for molding glass and its production
US5458927A (en) * 1995-03-08 1995-10-17 General Motors Corporation Process for the formation of wear- and scuff-resistant carbon coatings
GB2300424A (en) * 1995-05-01 1996-11-06 Kobe Steel Europ Ltd Diamond growth on ion implanted surfaces

Also Published As

Publication number Publication date
GB9618034D0 (en) 1996-10-09
FR2738236B1 (en) 1999-03-12
NL1003899A1 (en) 1997-03-03
GB2304736A (en) 1997-03-26
JP2909724B2 (en) 1999-06-23
CA2184206A1 (en) 1997-03-01
KR100385257B1 (en) 2003-08-09
NL1003899C2 (en) 1998-02-12
JPH09183622A (en) 1997-07-15
ZA967329B (en) 1997-03-04
KR970010687A (en) 1997-03-27
SG47172A1 (en) 1998-03-20
CN1102470C (en) 2003-03-05
FR2738236A1 (en) 1997-03-07
CN1147983A (en) 1997-04-23
AU6432296A (en) 1997-03-06
JPH09194227A (en) 1997-07-29
MY115041A (en) 2003-03-31
IL119144A0 (en) 1996-11-14
GB2304736B (en) 1999-09-22
DE19634974A1 (en) 1997-03-27
AU718549B2 (en) 2000-04-13
JP3275091B2 (en) 2002-04-15

Similar Documents

Publication Publication Date Title
US6787071B2 (en) Method and apparatus for producing data storage media
NZ549587A (en) Device for nitriding by ionic implantation of an aluminium alloy part, and corresponding method
CN1721160A (en) Stamper, imprinting method, and method of manufacturing an information recording medium
CA2184206C (en) Molded glass plate produced by mold with modified surface
US6314763B1 (en) Method of manufacturing a 2-5 inch diameter glass substrate for a magnetic disk
CN1636699A (en) Optical disc mold having diamond-like carbonaceous layer and a molding method using the same
US5902369A (en) Carbon coated metallic mold for making a glass plate
US5770294A (en) Molded glass plates produced by mold with modified surface
JPH01234214A (en) Molding mold and manufacture thereof
JP3901437B2 (en) Insulating stamper for resin molding and manufacturing method thereof
KR100333948B1 (en) Method for ion-nitrating and coating diamond-Like carbon film using micropulse glow discharge
JPH0215170A (en) Surface treatment of stamper
JPS63193937A (en) Annealing of molded resin article
JPS5825041B2 (en) Method for manufacturing diamond-like carbon film
JPH0489212A (en) Mold material for molding optical element
KR20010073195A (en) A surface reforming method of a metal product
JPS63108930A (en) Manufacture of metallic die
US20050139475A1 (en) Insert dies, molds, and methods for fabricating the same
JP2003313046A (en) Method for manufacturing glass optical element
JPH08259241A (en) Method for forming optical device
JP2003170352A (en) Mask for organic molecule vapor deposition and its manufacturing method
JPH01268858A (en) Formation of thin carbon film
CN115287616A (en) Large area of 13 Method for preparing C isotope target
JPH06280012A (en) Production of carbon coating film
JPH06201908A (en) Production of stamper for diffraction grating

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed