CA2079699A1 - Ultraviolet resistant silica glass fiber - Google Patents

Ultraviolet resistant silica glass fiber

Info

Publication number
CA2079699A1
CA2079699A1 CA002079699A CA2079699A CA2079699A1 CA 2079699 A1 CA2079699 A1 CA 2079699A1 CA 002079699 A CA002079699 A CA 002079699A CA 2079699 A CA2079699 A CA 2079699A CA 2079699 A1 CA2079699 A1 CA 2079699A1
Authority
CA
Canada
Prior art keywords
silica glass
glass fiber
ultraviolet resistant
resistant silica
ppm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002079699A
Other languages
French (fr)
Other versions
CA2079699C (en
Inventor
Masatoshi Takita
Hiroyuki Hayami
Koichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Mitsubishi Cable Industries Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Mitsubishi Cable Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP63231123A priority Critical patent/JPH0791084B2/en
Application filed by Shin Etsu Chemical Co Ltd, Mitsubishi Cable Industries Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to CA002079699A priority patent/CA2079699C/en
Publication of CA2079699A1 publication Critical patent/CA2079699A1/en
Application granted granted Critical
Publication of CA2079699C publication Critical patent/CA2079699C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C13/00—Fibre or filament compositions
    • C03C13/04—Fibre optics, e.g. core and clad fibre compositions
    • C03C13/045—Silica-containing oxide glass compositions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C03B2201/03—Impurity concentration specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C03B2201/03—Impurity concentration specified
    • C03B2201/04—Hydroxyl ion (OH)
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/07—Impurity concentration specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/07—Impurity concentration specified
    • C03B2201/075—Hydroxyl ion (OH)
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

A silica glass optical fiber superior in resistance to ultraviolet rays, which fiber comprises a doped silica glass cladding layer formed on a silica glass core, said silica glass core having an OH content of 10-1000 ppm, a fluorine content of 50-5000 ppm, and being substantially free of chlorine.
CA002079699A 1988-09-14 1992-10-02 Ultraviolet resistant silica glass fiber Expired - Fee Related CA2079699C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP63231123A JPH0791084B2 (en) 1988-09-14 1988-09-14 Ultraviolet-resistant synthetic quartz glass and method for producing the same
CA002079699A CA2079699C (en) 1988-09-14 1992-10-02 Ultraviolet resistant silica glass fiber

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63231123A JPH0791084B2 (en) 1988-09-14 1988-09-14 Ultraviolet-resistant synthetic quartz glass and method for producing the same
CA002079699A CA2079699C (en) 1988-09-14 1992-10-02 Ultraviolet resistant silica glass fiber

Publications (2)

Publication Number Publication Date
CA2079699A1 true CA2079699A1 (en) 1994-04-03
CA2079699C CA2079699C (en) 2002-03-05

Family

ID=25675564

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002079699A Expired - Fee Related CA2079699C (en) 1988-09-14 1992-10-02 Ultraviolet resistant silica glass fiber

Country Status (2)

Country Link
JP (1) JPH0791084B2 (en)
CA (1) CA2079699C (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1035078A2 (en) * 1999-03-10 2000-09-13 Nikon Corporation Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member
US7506521B2 (en) * 2004-12-29 2009-03-24 Corning Incorporated High transmission synthetic silica glass and method of making same
US7506522B2 (en) * 2004-12-29 2009-03-24 Corning Incorporated High refractive index homogeneity fused silica glass and method of making same

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653593B2 (en) * 1989-06-09 1994-07-20 信越石英株式会社 Synthetic silica glass optical body and method for producing the same
JPH0627013B2 (en) * 1989-06-14 1994-04-13 信越石英株式会社 Synthetic silica glass optical body for ultraviolet laser and manufacturing method thereof
JPH0627014B2 (en) * 1989-06-19 1994-04-13 信越石英株式会社 Synthetic silica glass optical body for ultraviolet laser and manufacturing method thereof
JPH0624997B2 (en) * 1989-09-11 1994-04-06 信越石英株式会社 Optical components for laser light
JPH0829960B2 (en) * 1990-08-10 1996-03-27 信越石英株式会社 Ultraviolet laser optical components
US5410428A (en) * 1990-10-30 1995-04-25 Shin-Etsu Quartz Products Co. Ltd. Optical member made of high-purity and transparent synthetic silica glass and method for production thereof or blank thereof
JP2588447B2 (en) * 1991-06-29 1997-03-05 信越石英株式会社 Method of manufacturing quartz glass member for excimer laser
US5364433A (en) * 1991-06-29 1994-11-15 Shin-Etsu Quartz Products Company Limited Optical member of synthetic quartz glass for excimer lasers and method for producing same
JPH0611705A (en) * 1992-01-31 1994-01-21 Sony Corp Active element substrate
TW440548B (en) * 1997-05-14 2001-06-16 Nippon Kogaku Kk Synthetic silica glass optical member and method of manufacturing the same
JP3794664B2 (en) * 1998-07-29 2006-07-05 信越化学工業株式会社 Synthetic quartz glass member, manufacturing method thereof, and optical component for excimer laser
EP1067097A4 (en) * 1998-12-25 2004-03-31 Asahi Glass Co Ltd Synthetic quartz glass and method for preparation thereof
CN1317573C (en) * 2004-10-27 2007-05-23 上海大学 Ultraviolet optical fiber with high-transmission ability and producing method thereof, and deposition apparatus containing high-hydroxyl optical fibre prefabricated bar

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1035078A2 (en) * 1999-03-10 2000-09-13 Nikon Corporation Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member
EP1035078A3 (en) * 1999-03-10 2001-10-17 Nikon Corporation Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member
US6649268B1 (en) 1999-03-10 2003-11-18 Nikon Corporation Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member
US7506521B2 (en) * 2004-12-29 2009-03-24 Corning Incorporated High transmission synthetic silica glass and method of making same
US7506522B2 (en) * 2004-12-29 2009-03-24 Corning Incorporated High refractive index homogeneity fused silica glass and method of making same

Also Published As

Publication number Publication date
CA2079699C (en) 2002-03-05
JPH0280343A (en) 1990-03-20
JPH0791084B2 (en) 1995-10-04

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Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed