CA2048498A1 - Corps fritte colore et conducteur thermique, a base de nitrure d'aluminium, et methode d'obtention de ce produit - Google Patents

Corps fritte colore et conducteur thermique, a base de nitrure d'aluminium, et methode d'obtention de ce produit

Info

Publication number
CA2048498A1
CA2048498A1 CA2048498A CA2048498A CA2048498A1 CA 2048498 A1 CA2048498 A1 CA 2048498A1 CA 2048498 A CA2048498 A CA 2048498A CA 2048498 A CA2048498 A CA 2048498A CA 2048498 A1 CA2048498 A1 CA 2048498A1
Authority
CA
Canada
Prior art keywords
sintered body
weight
parts
preparing
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2048498A
Other languages
English (en)
Other versions
CA2048498C (fr
Inventor
Kouhei Shimoda
Takao Maeda
Kouichi Sogabe
Masaya Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Kouhei Shimoda
Takao Maeda
Kouichi Sogabe
Masaya Miyake
Sumitomo Electric Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16582526&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CA2048498(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Kouhei Shimoda, Takao Maeda, Kouichi Sogabe, Masaya Miyake, Sumitomo Electric Industries, Ltd. filed Critical Kouhei Shimoda
Publication of CA2048498A1 publication Critical patent/CA2048498A1/fr
Application granted granted Critical
Publication of CA2048498C publication Critical patent/CA2048498C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
CA002048498A 1990-08-07 1991-08-06 Corps fritte colore et conducteur thermique, a base de nitrure d'aluminium, et methode d'obtention de ce produit Expired - Fee Related CA2048498C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2-210022 1990-08-07
JP2210022A JP2943275B2 (ja) 1990-08-07 1990-08-07 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
CA2048498A1 true CA2048498A1 (fr) 1992-02-08
CA2048498C CA2048498C (fr) 1995-12-05

Family

ID=16582526

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002048498A Expired - Fee Related CA2048498C (fr) 1990-08-07 1991-08-06 Corps fritte colore et conducteur thermique, a base de nitrure d'aluminium, et methode d'obtention de ce produit

Country Status (8)

Country Link
US (1) US5147832A (fr)
EP (1) EP0470501B1 (fr)
JP (1) JP2943275B2 (fr)
KR (1) KR940001660B1 (fr)
CA (1) CA2048498C (fr)
DE (1) DE69118613T2 (fr)
SG (1) SG43219A1 (fr)
TW (1) TW235291B (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
US5273700A (en) * 1990-10-29 1993-12-28 Sumitomo Electric Industries Ltd. Aluminum nitride sintered body and process for producing the same
TW280836B (fr) * 1992-09-21 1996-07-11 Sumitomo Electric Industries
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
US5424261A (en) * 1993-12-22 1995-06-13 The Carborundum Company Low temperature sintering route for aluminum nitride ceramics
US5773377A (en) * 1993-12-22 1998-06-30 Crystalline Materials Corporation Low temperature sintered, resistive aluminum nitride ceramics
JPH07187788A (ja) * 1993-12-27 1995-07-25 Ngk Spark Plug Co Ltd 窒化アルミニウム焼結体及びその製造方法
US5677253A (en) * 1995-03-30 1997-10-14 Kyocera Corporation Wafer holding member
EP0992470B1 (fr) * 1995-08-03 2006-03-08 Ngk Insulators, Ltd. Corps frittés en nitrure d'aluminium et leur utilisation comme substrat dans un dispositif pour la fabrication de semiconducteurs
US5705450A (en) * 1996-12-17 1998-01-06 The Dow Chemical Company A1N sintered body containing a rare earth aluminum oxynitride and method to produce said body
EP1036779B1 (fr) * 1999-03-17 2003-09-17 Asahi Techno Glass Corporation Produit fritté en nitrure d'aluminium et son procédé de fabrication
JP4447750B2 (ja) * 1999-09-30 2010-04-07 日本碍子株式会社 窒化アルミニウム焼結体および半導体製造用部材
US6884972B2 (en) 1999-12-09 2005-04-26 Ibiden Co., Ltd. Ceramic plate for a semiconductor producing/inspecting apparatus
JP4493264B2 (ja) * 2001-11-26 2010-06-30 日本碍子株式会社 窒化アルミニウム質セラミックス、半導体製造用部材および耐蝕性部材
US7553469B2 (en) * 2004-03-29 2009-06-30 Denki Kagaku Kogyo Kabushiki Kaisha Aluminum nitride powder and aluminum nitride sintered compact
US7799269B2 (en) * 2007-09-25 2010-09-21 Osram Sylvania Inc. Method of sintering AIN under a methane-containing nitrogen atmosphere
JP5180034B2 (ja) * 2008-11-21 2013-04-10 日本碍子株式会社 窒化アルミニウム焼結体、その製法及びそれを用いた静電チャック
CN109075128B (zh) * 2016-06-10 2023-02-28 日本电气硝子株式会社 气密封装体的制造方法及气密封装体
KR102108023B1 (ko) * 2018-09-28 2020-05-07 포항공과대학교 산학협력단 이작용성 나노자임 및 이의 용도

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855377A (ja) * 1981-09-28 1983-04-01 株式会社東芝 窒化アルミニウム焼結体の製造方法
US4478785A (en) * 1983-08-01 1984-10-23 General Electric Company Process of pressureless sintering to produce dense, high thermal conductivity aluminum nitride ceramic body
US4877760A (en) * 1985-05-22 1989-10-31 Ngk Spark Plug Co., Ltd. Aluminum nitride sintered body with high thermal conductivity and process for producing same
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
DE3684821D1 (de) * 1985-06-28 1992-05-21 Toshiba Kawasaki Kk Aluminiumnitridsinterkoerper und verfahren zu seiner herstellung.
US4843038A (en) * 1986-11-13 1989-06-27 Narumi China Corporation Black sintered body of aluminum nitride and process for producing the same
JPS63233072A (ja) * 1986-11-14 1988-09-28 旭硝子株式会社 ＣａＯ含有耐火物
US4833108A (en) * 1987-03-28 1989-05-23 Narumi China Corporation Sintered body of aluminum nitride
JPS63310772A (ja) * 1987-06-10 1988-12-19 Shinko Electric Ind Co Ltd 窒化アルミニウム焼結体
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
JPH01242468A (ja) * 1988-03-23 1989-09-27 Japan Steel Works Ltd:The 窒化アルミニウム焼結体の製造方法
KR920003226B1 (ko) * 1988-05-16 1992-04-24 스미도모덴기고오교오 가부시기가이샤 질화알루미늄소결체와 그것을 사용한 회로기판 및 반도체패키지
EP0437449A1 (fr) * 1988-09-02 1991-07-24 THE DOW CHEMICAL COMPANY (a Delaware corporation) Augmentation de la conductivite thermique de nitrure d'aluminium par traitement de predensification
JPH02172868A (ja) * 1988-12-26 1990-07-04 Hitachi Metals Ltd 窒化アルミニウム焼結体並びにそれを用いた電子部品
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Also Published As

Publication number Publication date
EP0470501B1 (fr) 1996-04-10
DE69118613T2 (de) 1996-11-21
CA2048498C (fr) 1995-12-05
EP0470501A3 (en) 1992-09-02
KR920004311A (ko) 1992-03-27
KR940001660B1 (ko) 1994-02-28
US5147832A (en) 1992-09-15
TW235291B (fr) 1994-12-01
SG43219A1 (en) 1997-10-17
JP2943275B2 (ja) 1999-08-30
JPH0492867A (ja) 1992-03-25
EP0470501A2 (fr) 1992-02-12
DE69118613D1 (de) 1996-05-15

Similar Documents

Publication Publication Date Title
CA2048498A1 (fr) Corps fritte colore et conducteur thermique, a base de nitrure d'aluminium, et methode d'obtention de ce produit
US4351787A (en) Process for sintering reaction bonded silicon nitride
IE781320L (en) Cubic boron nitride compact
CA2277346A1 (fr) Corps fritte a nitrure d'aluminium et son mode d'obtention
CA2060239A1 (fr) Composite nitrure d'aluminium/verre
US5603876A (en) Method for producing high density sintered silicon nitride (SI3 N.sub.4
JPS57181356A (en) Sintered aluminum nitride body with high heat conductivity
US4698320A (en) Aluminum nitride sintered body
CA1318691C (fr) Corps en nitrure d'aluminium et procede de fabrication
CA2151300A1 (fr) Procede de fabrication d'un agent de brasage contenant un flux, pour le brasage d'articles en alliage d'aluminium
EP0231130A3 (fr) Corps céramique fritté en nitrure de silicium et son procédé de fabrication
US4539298A (en) Highly heat-conductive ceramic material
EP1314707A3 (fr) Céramiques à base de nitride d'aluminium, membres pour l'utilisation dans une système pour la production des semi-conducteurs, les membres ayant résistances contre la corrosion et les membres conductives
JPS53117386A (en) Sindered body for heat and sink production of the same
KR920004310A (ko) 질화알루미늄분말 및 소결체 및 그 제조법
US4205033A (en) Process for producing compact silicon nitride ceramics
EP0801042A3 (fr) Corps frittés en nitrure de silicium pour outils et procédé de leur fabrication
EP0393524A3 (fr) Procédé pour la production d'un article céramique fritté à base de nitrure d'aluminium
ATE146445T1 (de) Dotiertes zinkoxidpulver, seine herstellung und keramik hieraus hergestellt
EP0372910A3 (fr) Procédé pour la production d'un article céramique fritté à base de nitrure d'aluminium
JPS643075A (en) Sintered material of aluminum nitride and production thereof
JPS5527843A (en) Production of silicon nitride ceramic powder material
JPS6437469A (en) Production of ceramic of silicon nitride
JPS6418977A (en) Production of aluminum nitride powder and aluminum nitride sintered product
EP0292940A3 (fr) Supraconducteur

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed