CA1199715A - Techniques de masquage en deposition a la vapeur chimique - Google Patents

Techniques de masquage en deposition a la vapeur chimique

Info

Publication number
CA1199715A
CA1199715A CA000469857A CA469857A CA1199715A CA 1199715 A CA1199715 A CA 1199715A CA 000469857 A CA000469857 A CA 000469857A CA 469857 A CA469857 A CA 469857A CA 1199715 A CA1199715 A CA 1199715A
Authority
CA
Canada
Prior art keywords
mask
thc
growth
semiconductor
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000469857A
Other languages
English (en)
Inventor
Robert D. Burnham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/231,556 external-priority patent/US4448797A/en
Application filed by Xerox Corp filed Critical Xerox Corp
Priority to CA000469857A priority Critical patent/CA1199715A/fr
Application granted granted Critical
Publication of CA1199715A publication Critical patent/CA1199715A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
CA000469857A 1981-02-04 1984-12-11 Techniques de masquage en deposition a la vapeur chimique Expired CA1199715A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000469857A CA1199715A (fr) 1981-02-04 1984-12-11 Techniques de masquage en deposition a la vapeur chimique

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US231,556 1981-02-04
US06/231,556 US4448797A (en) 1981-02-04 1981-02-04 Masking techniques in chemical vapor deposition
CA000393643A CA1194196A (fr) 1981-02-04 1982-01-06 Techniques de masquage en deposition a la vapeur chimique
CA000469857A CA1199715A (fr) 1981-02-04 1984-12-11 Techniques de masquage en deposition a la vapeur chimique

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CA000393643A Division CA1194196A (fr) 1981-02-04 1982-01-06 Techniques de masquage en deposition a la vapeur chimique

Publications (1)

Publication Number Publication Date
CA1199715A true CA1199715A (fr) 1986-01-21

Family

ID=25669522

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000469857A Expired CA1199715A (fr) 1981-02-04 1984-12-11 Techniques de masquage en deposition a la vapeur chimique

Country Status (1)

Country Link
CA (1) CA1199715A (fr)

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