CA1181623A - Systeme d'alignement et d'eposition avec positionnement pas a pas - Google Patents
Systeme d'alignement et d'eposition avec positionnement pas a pasInfo
- Publication number
- CA1181623A CA1181623A CA000442689A CA442689A CA1181623A CA 1181623 A CA1181623 A CA 1181623A CA 000442689 A CA000442689 A CA 000442689A CA 442689 A CA442689 A CA 442689A CA 1181623 A CA1181623 A CA 1181623A
- Authority
- CA
- Canada
- Prior art keywords
- alignment
- wafer
- stage
- reticle
- prealignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA000442689A CA1181623A (fr) | 1979-04-03 | 1983-12-06 | Systeme d'alignement et d'eposition avec positionnement pas a pas |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US2672279A | 1979-04-03 | 1979-04-03 | |
US026,722 | 1979-04-03 | ||
US5399579A | 1979-07-02 | 1979-07-02 | |
US053,995 | 1979-07-02 | ||
CA000349215A CA1162776A (fr) | 1979-04-03 | 1980-04-03 | Systeme de positionnement a repetition a lentille de projection |
CA000442689A CA1181623A (fr) | 1979-04-03 | 1983-12-06 | Systeme d'alignement et d'eposition avec positionnement pas a pas |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA000349215A Division CA1162776A (fr) | 1979-04-03 | 1980-04-03 | Systeme de positionnement a repetition a lentille de projection |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1181623A true CA1181623A (fr) | 1985-01-29 |
Family
ID=27426233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA000442689A Expired CA1181623A (fr) | 1979-04-03 | 1983-12-06 | Systeme d'alignement et d'eposition avec positionnement pas a pas |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA1181623A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113132621A (zh) * | 2020-01-10 | 2021-07-16 | 长鑫存储技术有限公司 | 拍摄装置位置校正***及方法 |
-
1983
- 1983-12-06 CA CA000442689A patent/CA1181623A/fr not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113132621A (zh) * | 2020-01-10 | 2021-07-16 | 长鑫存储技术有限公司 | 拍摄装置位置校正***及方法 |
CN113132621B (zh) * | 2020-01-10 | 2022-04-26 | 长鑫存储技术有限公司 | 拍摄装置位置校正***及方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MKEX | Expiry |