CA1014519A - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
CA1014519A
CA1014519A CA195,918A CA195918A CA1014519A CA 1014519 A CA1014519 A CA 1014519A CA 195918 A CA195918 A CA 195918A CA 1014519 A CA1014519 A CA 1014519A
Authority
CA
Canada
Prior art keywords
sputtering apparatus
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA195,918A
Inventor
John S. Chapin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Airco Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Airco Inc filed Critical Airco Inc
Priority to CA195,918A priority Critical patent/CA1014519A/en
Application granted granted Critical
Publication of CA1014519A publication Critical patent/CA1014519A/en
Expired legal-status Critical Current

Links

CA195,918A 1974-03-25 1974-03-25 Sputtering apparatus Expired CA1014519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA195,918A CA1014519A (en) 1974-03-25 1974-03-25 Sputtering apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA195,918A CA1014519A (en) 1974-03-25 1974-03-25 Sputtering apparatus

Publications (1)

Publication Number Publication Date
CA1014519A true CA1014519A (en) 1977-07-26

Family

ID=4099566

Family Applications (1)

Application Number Title Priority Date Filing Date
CA195,918A Expired CA1014519A (en) 1974-03-25 1974-03-25 Sputtering apparatus

Country Status (1)

Country Link
CA (1) CA1014519A (en)

Similar Documents

Publication Publication Date Title
CA1004247A (en) Anti-jackknife apparatus
CA1035237A (en) Lung-venting apparatus
CA1015950A (en) Spin-blast apparatus
CA1013665A (en) Evaporation apparatus
AU467292B2 (en) Eye-bush
CA995661A (en) Freezing-warming apparatus
CA1018137A (en) Roll-winding apparatus
AU511961B2 (en) Sputtering apparatus
CA1019665A (en) Pack-forming apparatus
CA1027042A (en) Well apparatus
CA1022196A (en) Workpiece-handling apparatus
CA1029925A (en) Contacting apparatus
CA1014519A (en) Sputtering apparatus
AU493988B2 (en) Pack-forming apparatus
CA1027859A (en) Well apparatus
CA1024103A (en) Shelving apparatus
CA1012096A (en) Shelving apparatus
CA1024101A (en) Shelving apparatus
CA1024102A (en) Shelving apparatus
CA988885A (en) Shelving apparatus
CA973705A (en) Drawing apparatus
CA1001431A (en) Refrigerating apparatus
AU482109B2 (en) Transducing apparatus
AU484040B2 (en) Methods
AU482293B2 (en) 7-methoxycephalosporins