CA1014103A - Production of platinum films - Google Patents

Production of platinum films

Info

Publication number
CA1014103A
CA1014103A CA193,429A CA193429A CA1014103A CA 1014103 A CA1014103 A CA 1014103A CA 193429 A CA193429 A CA 193429A CA 1014103 A CA1014103 A CA 1014103A
Authority
CA
Canada
Prior art keywords
production
platinum films
platinum
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA193,429A
Other versions
CA193429S (en
Inventor
William D. Westwood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nortel Networks Technology Corp
Original Assignee
Bell Northern Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bell Northern Research Ltd filed Critical Bell Northern Research Ltd
Priority to CA193,429A priority Critical patent/CA1014103A/en
Application granted granted Critical
Publication of CA1014103A publication Critical patent/CA1014103A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
CA193,429A 1974-02-25 1974-02-25 Production of platinum films Expired CA1014103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA193,429A CA1014103A (en) 1974-02-25 1974-02-25 Production of platinum films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA193,429A CA1014103A (en) 1974-02-25 1974-02-25 Production of platinum films

Publications (1)

Publication Number Publication Date
CA1014103A true CA1014103A (en) 1977-07-19

Family

ID=4099299

Family Applications (1)

Application Number Title Priority Date Filing Date
CA193,429A Expired CA1014103A (en) 1974-02-25 1974-02-25 Production of platinum films

Country Status (1)

Country Link
CA (1) CA1014103A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4627902A (en) * 1981-03-24 1986-12-09 Rosemount Engineering Company Limited Method of producing a resistance element for a resistance thermometer
US4719442A (en) * 1984-07-31 1988-01-12 Rosemount Inc. Platinum resistance thermometer
US5089293A (en) * 1984-07-31 1992-02-18 Rosemount Inc. Method for forming a platinum resistance thermometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4627902A (en) * 1981-03-24 1986-12-09 Rosemount Engineering Company Limited Method of producing a resistance element for a resistance thermometer
US4719442A (en) * 1984-07-31 1988-01-12 Rosemount Inc. Platinum resistance thermometer
US5089293A (en) * 1984-07-31 1992-02-18 Rosemount Inc. Method for forming a platinum resistance thermometer

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