BRPI0814680A2 - dispositivo óptico mems e respectivo método de fabrico - Google Patents
dispositivo óptico mems e respectivo método de fabricoInfo
- Publication number
- BRPI0814680A2 BRPI0814680A2 BRPI0814680A BRPI0814680A BRPI0814680A2 BR PI0814680 A2 BRPI0814680 A2 BR PI0814680A2 BR PI0814680 A BRPI0814680 A BR PI0814680A BR PI0814680 A BRPI0814680 A BR PI0814680A BR PI0814680 A2 BRPI0814680 A2 BR PI0814680A2
- Authority
- BR
- Brazil
- Prior art keywords
- manufacturing
- optical device
- mems optical
- mems
- optical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95193007P | 2007-07-25 | 2007-07-25 | |
PCT/US2008/070928 WO2009015231A1 (en) | 2007-07-25 | 2008-07-23 | Mems display devices and methods of fabricating the same |
Publications (1)
Publication Number | Publication Date |
---|---|
BRPI0814680A2 true BRPI0814680A2 (pt) | 2016-10-04 |
Family
ID=39764739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0814680A BRPI0814680A2 (pt) | 2007-07-25 | 2008-07-23 | dispositivo óptico mems e respectivo método de fabrico |
Country Status (10)
Country | Link |
---|---|
US (2) | US7903316B2 (pt) |
EP (1) | EP2181355A1 (pt) |
JP (1) | JP2010534865A (pt) |
KR (1) | KR101597348B1 (pt) |
CN (1) | CN101755232A (pt) |
BR (1) | BRPI0814680A2 (pt) |
CA (1) | CA2694044C (pt) |
RU (1) | RU2471210C2 (pt) |
TW (1) | TWI480223B (pt) |
WO (1) | WO2009015231A1 (pt) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100703140B1 (ko) | 1998-04-08 | 2007-04-05 | 이리다임 디스플레이 코포레이션 | 간섭 변조기 및 그 제조 방법 |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
CN101632150B (zh) * | 2007-02-20 | 2011-11-23 | 高通Mems科技公司 | 用于蚀刻微机电***的装备及方法 |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
JP2010534865A (ja) * | 2007-07-25 | 2010-11-11 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | Mems表示装置及び該mems表示装置の製造方法 |
EP2067841A1 (en) * | 2007-12-06 | 2009-06-10 | Agfa HealthCare NV | X-Ray imaging photostimulable phosphor screen or panel. |
US8023191B2 (en) * | 2008-05-07 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | Printable static interferometric images |
US7782522B2 (en) * | 2008-07-17 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Encapsulation methods for interferometric modulator and MEMS devices |
CN101710586B (zh) * | 2009-01-09 | 2011-12-28 | 深超光电(深圳)有限公司 | 提高开口率的储存电容及其制作方法 |
US20110169724A1 (en) * | 2010-01-08 | 2011-07-14 | Qualcomm Mems Technologies, Inc. | Interferometric pixel with patterned mechanical layer |
US8547626B2 (en) * | 2010-03-25 | 2013-10-01 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of shaping the same |
US20120194897A1 (en) * | 2011-01-27 | 2012-08-02 | Qualcomm Mems Technologies, Inc. | Backside patterning to form support posts in an electromechanical device |
US8780104B2 (en) | 2011-03-15 | 2014-07-15 | Qualcomm Mems Technologies, Inc. | System and method of updating drive scheme voltages |
US8988440B2 (en) * | 2011-03-15 | 2015-03-24 | Qualcomm Mems Technologies, Inc. | Inactive dummy pixels |
KR20120106263A (ko) | 2011-03-18 | 2012-09-26 | 삼성디스플레이 주식회사 | 표시 기판, 이를 포함하는 표시 장치 및 이의 제조 방법 |
US8659816B2 (en) * | 2011-04-25 | 2014-02-25 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of making the same |
US9213181B2 (en) * | 2011-05-20 | 2015-12-15 | Pixtronix, Inc. | MEMS anchor and spacer structure |
US20130016037A1 (en) * | 2011-07-11 | 2013-01-17 | Qualcomm Mems Technologies, Inc. | Reducing or eliminating the black mask in an optical stack |
US9065358B2 (en) | 2011-07-11 | 2015-06-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS structure and method of forming same |
US20130057557A1 (en) * | 2011-09-07 | 2013-03-07 | Qualcomm Mems Technologies, Inc. | High area stacked layered metallic structures and related methods |
US9678329B2 (en) | 2011-12-22 | 2017-06-13 | Qualcomm Inc. | Angled facets for display devices |
US9085456B2 (en) | 2012-01-16 | 2015-07-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Support structure for TSV in MEMS structure |
CN108511328B (zh) * | 2018-05-10 | 2020-10-02 | 河南科技大学 | 一种双层钼薄膜及其制备方法、薄膜太阳能电池 |
US20220252866A1 (en) * | 2021-02-05 | 2022-08-11 | Silicon Light Machines Corporation | MEMs Based Spatial Light Modulators With Improved Thermal Control |
CN113377132A (zh) * | 2021-05-07 | 2021-09-10 | 青岛科技大学 | 用于追踪聚光的mems微镜阵列智能玻璃板 |
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KR20080040715A (ko) * | 2005-07-22 | 2008-05-08 | 콸콤 인코포레이티드 | Mems 장치를 위한 지지 구조물 및 그 방법들 |
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WO2007041302A2 (en) * | 2005-09-30 | 2007-04-12 | Qualcomm Mems Technologies, Inc. | Mems device and interconnects for same |
US20070209437A1 (en) * | 2005-10-18 | 2007-09-13 | Seagate Technology Llc | Magnetic MEMS device |
US7547568B2 (en) * | 2006-02-22 | 2009-06-16 | Qualcomm Mems Technologies, Inc. | Electrical conditioning of MEMS device and insulating layer thereof |
JP4489734B2 (ja) * | 2006-07-07 | 2010-06-23 | 株式会社 日立ディスプレイズ | 液晶表示装置 |
US8877074B2 (en) | 2006-12-15 | 2014-11-04 | The Regents Of The University Of California | Methods of manufacturing microdevices in laminates, lead frames, packages, and printed circuit boards |
US7569488B2 (en) | 2007-06-22 | 2009-08-04 | Qualcomm Mems Technologies, Inc. | Methods of making a MEMS device by monitoring a process parameter |
JP2010534865A (ja) * | 2007-07-25 | 2010-11-11 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | Mems表示装置及び該mems表示装置の製造方法 |
-
2008
- 2008-07-23 JP JP2010518361A patent/JP2010534865A/ja active Pending
- 2008-07-23 EP EP08796505A patent/EP2181355A1/en not_active Withdrawn
- 2008-07-23 BR BRPI0814680A patent/BRPI0814680A2/pt not_active Application Discontinuation
- 2008-07-23 CN CN200880100172A patent/CN101755232A/zh active Pending
- 2008-07-23 WO PCT/US2008/070928 patent/WO2009015231A1/en active Application Filing
- 2008-07-23 KR KR1020107003480A patent/KR101597348B1/ko not_active IP Right Cessation
- 2008-07-23 CA CA2694044A patent/CA2694044C/en not_active Expired - Fee Related
- 2008-07-23 RU RU2010101627/28A patent/RU2471210C2/ru not_active IP Right Cessation
- 2008-07-24 US US12/179,337 patent/US7903316B2/en not_active Expired - Fee Related
- 2008-07-25 TW TW097128509A patent/TWI480223B/zh not_active IP Right Cessation
-
2011
- 2011-03-07 US US13/042,100 patent/US20110157010A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
KR20100075431A (ko) | 2010-07-02 |
US7903316B2 (en) | 2011-03-08 |
CA2694044C (en) | 2017-02-28 |
TW200916405A (en) | 2009-04-16 |
RU2010101627A (ru) | 2011-08-27 |
US20090086306A1 (en) | 2009-04-02 |
US20110157010A1 (en) | 2011-06-30 |
RU2471210C2 (ru) | 2012-12-27 |
EP2181355A1 (en) | 2010-05-05 |
JP2010534865A (ja) | 2010-11-11 |
WO2009015231A1 (en) | 2009-01-29 |
CA2694044A1 (en) | 2009-01-29 |
TWI480223B (zh) | 2015-04-11 |
KR101597348B1 (ko) | 2016-03-07 |
CN101755232A (zh) | 2010-06-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B15I | Others concerning applications: loss of priority |
Free format text: OBSERVA-SE QUE A PRIORIDADE REQUERIDA US 60/951,930 DE 25/07/2007 POSSUI DEPOSITANTE DIFERENTE DO INFORMADO NA ENTRADA NA FASE NACIONAL E SUA RESPECTIVA CESSAO FOI APRESENTADA EM 29/09/2010 APOS O PRAZO REGULAR DE 60 DIAS DA ENTRADA NA FASE NACIONAL QUE SE ENCERRAVA EM 13/03/2010, MOTIVO PELO QUAL SERA DADA PERDA DESTA PRIORIDADE, CONFORME AS DISPOSICOES PREVISTAS NA LEI 9.279 DE 14/05/1996 (LPI) ART. 16 7O. |
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B12F | Other appeals [chapter 12.6 patent gazette] | ||
B06A | Patent application procedure suspended [chapter 6.1 patent gazette] | ||
B11B | Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements | ||
B350 | Update of information on the portal [chapter 15.35 patent gazette] |