BR8104762A - Processo e dispositivo para a producao de condensadores em camadas - Google Patents

Processo e dispositivo para a producao de condensadores em camadas

Info

Publication number
BR8104762A
BR8104762A BR8104762A BR8104762A BR8104762A BR 8104762 A BR8104762 A BR 8104762A BR 8104762 A BR8104762 A BR 8104762A BR 8104762 A BR8104762 A BR 8104762A BR 8104762 A BR8104762 A BR 8104762A
Authority
BR
Brazil
Prior art keywords
production
layer condensers
condensers
layer
Prior art date
Application number
BR8104762A
Other languages
English (en)
Inventor
R Behn
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of BR8104762A publication Critical patent/BR8104762A/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Physical Vapour Deposition (AREA)
  • Specific Conveyance Elements (AREA)
BR8104762A 1980-07-24 1981-07-23 Processo e dispositivo para a producao de condensadores em camadas BR8104762A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803028123 DE3028123A1 (de) 1980-07-24 1980-07-24 Verfahren und vorrichtung zur herstellung von schichtkondensatoren

Publications (1)

Publication Number Publication Date
BR8104762A true BR8104762A (pt) 1982-04-13

Family

ID=6108036

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8104762A BR8104762A (pt) 1980-07-24 1981-07-23 Processo e dispositivo para a producao de condensadores em camadas

Country Status (6)

Country Link
US (1) US4378382A (pt)
EP (1) EP0045058B1 (pt)
JP (1) JPS5762525A (pt)
BR (1) BR8104762A (pt)
DE (2) DE3028123A1 (pt)
ES (1) ES504216A0 (pt)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58217673A (ja) * 1982-06-11 1983-12-17 Anelva Corp 膜厚制御方法
US5097800A (en) * 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
EP0147696B1 (en) * 1983-12-19 1991-07-10 SPECTRUM CONTROL, INC. (a Pennsylvania corporation) Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US5125138A (en) * 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same
US5032461A (en) * 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US4842893A (en) * 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5018048A (en) * 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US4676993A (en) * 1984-11-29 1987-06-30 General Electric Company Method and apparatus for selectively fine-tuning a coupled-dual resonator crystal and crystal manufactured thereby
US4833430A (en) * 1984-11-29 1989-05-23 General Electric Company Coupled-dual resonator crystal
US4627379A (en) * 1984-11-29 1986-12-09 General Electric Company Shutter apparatus for fine-tuning a coupled-dual resonator crystal
US4757759A (en) * 1986-03-05 1988-07-19 Tam Ceramics, Inc. Multilayer ceramic bar printing and assembling apparatus
US4954371A (en) * 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
EP0339844A3 (en) * 1988-04-29 1991-01-16 SPECTRUM CONTROL, INC. (a Delaware corporation) Multi layer structure and process for making same
US5576925A (en) * 1994-12-27 1996-11-19 General Electric Company Flexible multilayer thin film capacitors
US5774326A (en) * 1995-08-25 1998-06-30 General Electric Company Multilayer capacitors using amorphous hydrogenated carbon
US5736448A (en) * 1995-12-04 1998-04-07 General Electric Company Fabrication method for thin film capacitors
DE10129507C2 (de) * 2001-06-19 2003-07-17 Fraunhofer Ges Forschung Einrichtung zur plasmaaktivierten Bedampfung großer Flächen
US7007528B2 (en) * 2004-04-01 2006-03-07 Newfrey Llc Re-keyable lock cylinder
US8265771B2 (en) * 2008-10-31 2012-09-11 Medtronic, Inc. Interference mitigation for implantable device recharging
DE102010042839B4 (de) * 2010-10-22 2016-07-21 Von Ardenne Gmbh Durchlauf-Vakuumbeschichtungsanlage zum Beschichten von Substraten

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113379A (en) * 1976-03-19 1977-09-22 Hitachi Ltd Vacuum evaporation
US4207836A (en) * 1977-07-01 1980-06-17 Hitachi, Ltd. Vacuum vapor-deposition apparatus
DE2847620C2 (de) * 1978-11-02 1984-10-18 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Herstellung von elektrischen Bauelementen, insbesondere Schichtkondensatoren
DE2900772C2 (de) * 1979-01-10 1984-08-30 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Erzeugung von Schichten auf einer bandförmigen Trägerfolie

Also Published As

Publication number Publication date
JPS6326531B2 (pt) 1988-05-30
US4378382A (en) 1983-03-29
DE3028123A1 (de) 1982-02-25
EP0045058A3 (en) 1985-04-17
EP0045058A2 (de) 1982-02-03
EP0045058B1 (de) 1987-10-28
JPS5762525A (en) 1982-04-15
DE3176502D1 (en) 1987-12-03
ES8206081A1 (es) 1982-06-16
ES504216A0 (es) 1982-06-16

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