BE791888A - Dispositif de cryopompage - Google Patents

Dispositif de cryopompage

Info

Publication number
BE791888A
BE791888A BE791888DA BE791888A BE 791888 A BE791888 A BE 791888A BE 791888D A BE791888D A BE 791888DA BE 791888 A BE791888 A BE 791888A
Authority
BE
Belgium
Prior art keywords
cryopumping
cryopumping device
Prior art date
Application number
Other languages
English (en)
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Priority claimed from FR7142384A external-priority patent/FR2161484A5/fr
Publication of BE791888A publication Critical patent/BE791888A/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
BE791888D 1971-11-26 Dispositif de cryopompage BE791888A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7142384A FR2161484A5 (en) 1971-11-26 1971-11-26 Cold-pump assembly - for prodn of ultra-vacuum using liquid helium
FR7224603A FR2192620A6 (fr) 1971-11-26 1972-07-07

Publications (1)

Publication Number Publication Date
BE791888A true BE791888A (fr) 1973-05-24

Family

ID=26216738

Family Applications (1)

Application Number Title Priority Date Filing Date
BE791888D BE791888A (fr) 1971-11-26 Dispositif de cryopompage

Country Status (12)

Country Link
US (1) US3797264A (fr)
JP (1) JPS567066B2 (fr)
BE (1) BE791888A (fr)
CA (1) CA968170A (fr)
CH (1) CH569194A5 (fr)
DE (1) DE2257652A1 (fr)
FR (1) FR2192620A6 (fr)
GB (1) GB1415332A (fr)
IL (1) IL40902A (fr)
IT (1) IT970940B (fr)
LU (1) LU66552A1 (fr)
NL (1) NL7216050A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2321609A1 (fr) * 1975-08-22 1977-03-18 Air Liquide Cryopompe a regeneration
DE3364522D1 (en) * 1982-08-27 1986-08-21 Comptech Inc Cryogenic pump having maximum aperture throttled port
DE3330146A1 (de) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen
US4722191A (en) * 1986-09-17 1988-02-02 Pennwalt Corporation High vacuum pumping system
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
CH686384A5 (de) * 1992-07-21 1996-03-15 Marcel Kohler Kryopumpe.
US7611333B1 (en) * 2002-05-07 2009-11-03 Harrington Steven M Multiple chamber pump and method
US9117563B2 (en) * 2014-01-13 2015-08-25 Cold Quanta, Inc. Ultra-cold-matter system with thermally-isolated nested source cell
CN114893389B (zh) * 2022-06-10 2023-06-30 中国科学院上海高等研究院 一种氦减压降温泵组室温性能的测试***及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371499A (en) * 1966-11-02 1968-03-05 Union Carbide Corp Cryosorption vacuum pumping system
FR1587077A (fr) * 1968-08-01 1970-03-13
FR2048253A5 (fr) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
LU66552A1 (fr) 1973-02-01
JPS567066B2 (fr) 1981-02-16
DE2257652A1 (de) 1973-05-30
GB1415332A (en) 1975-11-26
JPS4860313A (fr) 1973-08-24
CH569194A5 (fr) 1975-11-14
IL40902A (en) 1976-01-30
IL40902A0 (en) 1973-01-30
US3797264A (en) 1974-03-19
FR2192620A6 (fr) 1974-02-08
IT970940B (it) 1974-04-20
CA968170A (en) 1975-05-27
NL7216050A (fr) 1973-05-29

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