BE769932A - Turbo-moleculaire pomp - Google Patents

Turbo-moleculaire pomp

Info

Publication number: BE769932A
Authority: BE; Belgium
Prior art keywords: turbo; molecular pump; molecular; pump
Prior art date: 1970-07-15

Application number

BE769932A

Other languages

English (en)

Original Assignee

Pfeiffer Vakuumtechnik

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1970-07-15

Filing date

1971-07-13

Publication date

1971-11-16

1971-07-13 Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik

1971-11-16 Publication of BE769932A publication Critical patent/BE769932A/fr

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F04D29/544—Blade shapes

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Geometry (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)
Non-Positive Displacement Air Blowers (AREA)

BE769932A 1970-07-15 1971-07-13 Turbo-moleculaire pomp BE769932A (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE2035063A DE2035063C3 (de)	1970-07-15	1970-07-15	Laufrad für eine Turbomolekularpumpe

Publications (1)

Publication Number	Publication Date
BE769932A true BE769932A (fr)	1971-11-16

Family

ID=5776829

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BE769932A BE769932A (fr)	1970-07-15	1971-07-13	Turbo-moleculaire pomp

Country Status (10)

Country	Link
US (1)	US3748055A (fr)
JP (1)	JPS5224683B1 (fr)
BE (1)	BE769932A (fr)
CA (1)	CA950872A (fr)
CH (1)	CH529927A (fr)
DE (1)	DE2035063C3 (fr)
FR (1)	FR2097945A5 (fr)
GB (1)	GB1308263A (fr)
NL (1)	NL157387B (fr)
SE (1)	SE371867B (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2229724B2 (de) *	1972-06-19	1980-06-04	Leybold-Heraeus Gmbh, 5000 Koeln	Turbomolekularpumpe
DE2554995A1 (de) *	1975-12-06	1977-06-16	Pfeiffer Vakuumtechnik	Turbomolekularpumpe
DE3317868A1 (de) *	1983-05-17	1984-11-22	Leybold-Heraeus GmbH, 5000 Köln	Reibungspumpe
DE3507274A1 (de) *	1985-03-01	1986-09-04	Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar	Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
GB2226603B (en) *	1988-02-26	1992-07-29	Nikolai Mikhailovich Novikov	Turbomolecular vacuum pump
IT1238201B (it) *	1989-11-03	1993-07-09	Varian Spa	Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE10052637B4 (de) *	2000-10-24	2021-03-11	Pfeiffer Vacuum Gmbh	16.02.2001 Scheiben für eine Turbomolekularpumpe
DE10203648B4 (de) *	2001-02-10	2016-05-25	Pfeiffer Vacuum Gmbh	Rotor-und Statorscheiben für eine Turbomolekularpumpe
EP1249613B1 (fr) *	2001-03-15	2004-01-28	VARIAN S.p.A.	Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
DE102004012713A1 (de) *	2004-03-16	2005-10-06	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE102008056352A1 (de) *	2008-11-07	2010-05-12	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpenrotor
WO2016037452A1 (fr) *	2014-09-11	2016-03-17	摩尔动力(北京)技术股份有限公司	Mécanisme d'hélice contre-rotative et son dispositif
CN106014498B (zh) *	2014-09-29	2017-12-01	摩尔动力(北京)技术股份有限公司	压胀一体对转叶轮机构
EP3734078B1 (fr) *	2020-03-05	2022-01-12	Pfeiffer Vacuum Technology AG	Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL281280A (fr) *
FR519759A (fr) *	1919-12-24	1921-06-15	Anciens Ets Sautter Harle	Hélice à aile métallique
US1767786A (en) *	1927-05-06	1930-06-24	William Braat	Propeller
US2011672A (en) *	1933-06-07	1935-08-20	Barker Auriol	Screw propeller
US2500071A (en) *	1948-03-12	1950-03-07	Edmund E Hans	Fan
DE1503704C3 (de) *	1966-12-30	1972-03-23	Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar	Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
BE757354A (fr) *	1969-10-27	1971-03-16	Sargent Welch Scientific Co	Pompe turbomoleculaire a stators et rotors perfectionnes

1970
- 1970-07-15 DE DE2035063A patent/DE2035063C3/de not_active Expired
1971
- 1971-06-17 FR FR7121957A patent/FR2097945A5/fr not_active Expired
- 1971-06-23 SE SE7108187A patent/SE371867B/xx unknown
- 1971-06-28 CH CH947471A patent/CH529927A/de not_active IP Right Cessation
- 1971-07-09 NL NL7109533.A patent/NL157387B/xx not_active IP Right Cessation
- 1971-07-12 GB GB3257071A patent/GB1308263A/en not_active Expired
- 1971-07-12 US US00161662A patent/US3748055A/en not_active Expired - Lifetime
- 1971-07-13 JP JP46051503A patent/JPS5224683B1/ja active Pending
- 1971-07-13 CA CA118,A patent/CA950872A/en not_active Expired
- 1971-07-13 BE BE769932A patent/BE769932A/fr unknown

Also Published As

Publication number	Publication date
CA950872A (en)	1974-07-09
DE2035063C3 (de)	1974-05-30
GB1308263A (en)	1973-02-21
DE2035063A1 (de)	1972-01-20
DE2035063B2 (de)	1973-10-31
NL7109533A (fr)	1972-01-18
CH529927A (de)	1972-10-31
SE371867B (fr)	1974-12-02
FR2097945A5 (fr)	1972-03-03
JPS5224683B1 (fr)	1977-07-02
NL157387B (nl)	1978-07-17
US3748055A (en)	1973-07-24

Publication	Publication Date	Title
AT305778B (de)	1973-03-12	Kreiselpumpe
CH520874A (de)	1972-03-31	Membranpumpe
NL168707C (nl)	1982-05-17	Infusiepomp.
BE758029A (fr)	1971-04-26	Pompe peristaltique
CH505294A (de)	1971-03-31	Schlauchpumpe
CH536940A (fr)	1973-05-15	Pompe à vide turbomoléculaire
AT309991B (de)	1973-09-10	Pumpenaggregat
BE769932A (fr)	1971-11-16	Turbo-moleculaire pomp
AT305776B (de)	1973-03-12	Kreiselpumpe
CH543005A (de)	1973-10-15	Schlauchquetschpumpe
AT301353B (de)	1972-09-11	Tauchpumpenaggregat
NO137792C (no)	1978-04-26	Sentrifugalpumpe.
DE7112177U (de)	1971-07-15	Turbomolekular-vakuumpumpe
NO137101C (no)	1977-12-28	Pumpe.
NL144029B (nl)	1974-11-15	Hydraulische pomp of motor.
AT288870B (de)	1971-03-25	Schlauchpumpe
CH499723A (de)	1970-11-30	Kolbenpumpe
CH500378A (de)	1970-12-15	Dosier-Kolbenpumpe
FI52622C (fi)	1977-10-10	Keskipakoispumppu
NL145020B (nl)	1975-02-17	Pomp of motor.
SE388775B (sv)	1976-10-18	Blodpump
NL152634B (nl)	1977-03-15	Hogedrukcompressor of -pomp.
CH496890A (de)	1970-09-30	Hochdruckpumpe
AT301354B (de)	1972-09-11	Tauchpumpenaggregat
AT295330B (de)	1971-12-27	Selbstansaugende Seitenkanalpumpe