BE691802A - - Google Patents

Info

Publication number: BE691802A
Authority: BE; Belgium

Application number

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1966-01-12

Filing date

1966-12-27

Publication date

1967-05-29

1966-12-27 Application filed filed Critical

1967-05-29 Publication of BE691802A publication Critical patent/BE691802A/xx

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/085—Isolated-integrated
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/928—Front and rear surface processing
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/977—Thinning or removal of substrate

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Element Separation (AREA)
Weting (AREA)
Electrodes Of Semiconductors (AREA)
Recrystallisation Techniques (AREA)

BE691802D 1966-01-12 1966-12-27 BE691802A (xx)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US520245A US3357871A (en)	1966-01-12	1966-01-12	Method for fabricating integrated circuits
US522278A US3419956A (en)	1966-01-12	1966-01-21	Technique for obtaining isolated integrated circuits

Publications (1)

Publication Number	Publication Date
BE691802A true BE691802A (xx)	1967-05-29

Family

ID=27060085

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
BE691802D BE691802A (xx)	1966-01-12	1966-12-27
BE692869D BE692869A (xx)	1966-01-12	1967-01-19

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
BE692869D BE692869A (xx)	1966-01-12	1967-01-19

Country Status (8)

Country	Link
US (2)	US3357871A (xx)
BE (2)	BE691802A (xx)
CH (2)	CH451325A (xx)
DE (2)	DE1589918B2 (xx)
FR (2)	FR1509408A (xx)
GB (2)	GB1137577A (xx)
NL (2)	NL154062B (xx)
SE (1)	SE326504B (xx)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5696402A (en) *	1965-09-28	1997-12-09	Li; Chou H.	Integrated circuit device
US3440498A (en) *	1966-03-14	1969-04-22	Nat Semiconductor Corp	Contacts for insulation isolated semiconductor integrated circuitry
US3471922A (en) *	1966-06-02	1969-10-14	Raytheon Co	Monolithic integrated circuitry with dielectric isolated functional regions
US3575740A (en) *	1967-06-08	1971-04-20	Ibm	Method of fabricating planar dielectric isolated integrated circuits
US3460007A (en) *	1967-07-03	1969-08-05	Rca Corp	Semiconductor junction device
US3753803A (en) *	1968-12-06	1973-08-21	Hitachi Ltd	Method of dividing semiconductor layer into a plurality of isolated regions
US3844858A (en) *	1968-12-31	1974-10-29	Texas Instruments Inc	Process for controlling the thickness of a thin layer of semiconductor material and semiconductor substrate
US3755012A (en) *	1971-03-19	1973-08-28	Motorola Inc	Controlled anisotropic etching process for fabricating dielectrically isolated field effect transistor
US3969749A (en) *	1974-04-01	1976-07-13	Texas Instruments Incorporated	Substrate for dielectric isolated integrated circuit with V-etched depth grooves for lapping guide
US3928094A (en) *	1975-01-16	1975-12-23	Fairchild Camera Instr Co	Method of aligning a wafer beneath a mask and system therefor and wafer having a unique alignment pattern
JPS5351970A (en) *	1976-10-21	1978-05-11	Toshiba Corp	Manufacture for semiconductor substrate
US4502913A (en) *	1982-06-30	1985-03-05	International Business Machines Corporation	Total dielectric isolation for integrated circuits
US6927073B2 (en) *	2002-05-16	2005-08-09	Nova Research, Inc.	Methods of fabricating magnetoresistive memory devices

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2967344A (en) *	1958-02-14	1961-01-10	Rca Corp	Semiconductor devices
FR1217793A (fr) *	1958-12-09	1960-05-05		Perfectionnements à la fabrication des éléments semi-conducteurs
NL252131A (xx) *	1959-06-30
US3179543A (en) *	1961-03-30	1965-04-20	Philips Corp	Method of manufacturing plates having funnel-shaped cavities or perforations obtained by etching
GB967002A (en) *	1961-05-05	1964-08-19	Standard Telephones Cables Ltd	Improvements in or relating to semiconductor devices
US3290753A (en) *	1963-08-19	1966-12-13	Bell Telephone Labor Inc	Method of making semiconductor integrated circuit elements

1966
- 1966-01-12 US US520245A patent/US3357871A/en not_active Expired - Lifetime
- 1966-01-16 FR FR8304A patent/FR1509408A/fr not_active Expired
- 1966-01-21 US US522278A patent/US3419956A/en not_active Expired - Lifetime
- 1966-11-29 GB GB53268/66A patent/GB1137577A/en not_active Expired
- 1966-12-21 GB GB54901/66A patent/GB1096484A/en not_active Expired
- 1966-12-27 BE BE691802D patent/BE691802A/xx unknown
1967
- 1967-01-01 CH CH38167A patent/CH451325A/de unknown
- 1967-01-05 FR FR8271A patent/FR1507802A/fr not_active Expired
- 1967-01-06 NL NL676700219A patent/NL154062B/xx not_active IP Right Cessation
- 1967-01-12 DE DE19671589918 patent/DE1589918B2/de not_active Withdrawn
- 1967-01-17 DE DE19671589920 patent/DE1589920B2/de not_active Withdrawn
- 1967-01-19 BE BE692869D patent/BE692869A/xx unknown
- 1967-01-20 SE SE00880/67A patent/SE326504B/xx unknown
- 1967-01-20 NL NL676700993A patent/NL154060B/xx not_active IP Right Cessation
- 1967-01-20 CH CH88067A patent/CH451326A/de unknown

Also Published As

Publication number	Publication date
FR1509408A (fr)	1968-01-12
SE326504B (xx)	1970-07-27
NL154060B (nl)	1977-07-15
NL154062B (nl)	1977-07-15
FR1507802A (fr)	1967-12-29
NL6700219A (xx)	1967-07-13
GB1096484A (en)	1967-12-29
US3419956A (en)	1969-01-07
BE692869A (xx)	1967-07-03
GB1137577A (en)	1968-12-27
DE1589918A1 (de)	1970-06-04
DE1589920A1 (de)	1970-09-17
DE1589918B2 (de)	1971-01-14
CH451325A (de)	1968-05-15
DE1589920B2 (de)	1971-02-18
NL6700993A (xx)	1967-07-24
US3357871A (en)	1967-12-12
CH451326A (de)	1968-05-15

Publication	Publication Date	Title
AU5917865A (xx)	1967-11-23
AU428063B2 (xx)	1972-09-13
AU424443B2 (xx)	1972-05-24
AU414526B2 (xx)	1971-06-30
AU433222B2 (xx)	1973-03-01
AU421822B2 (xx)	1972-02-28
AU417216B2 (xx)	1971-09-21
AU415165B1 (xx)	1971-07-23
AU1111066A (xx)	1968-03-21
AU1144366A (xx)	1968-04-26
AU6703465A (xx)	1968-04-26
AU612166A (xx)	1968-01-04
AU5895065A (xx)	1967-11-09
AU218666A (xx)	1967-08-31
BE284991A (xx)
BE597652A (xx)
AU433620A (xx)	1969-03-27
AU2390066A (xx)	1968-05-16
BE475118A (xx)
AU415780B2 (xx)	1971-08-10
BE662818A (xx)
AU407778B2 (xx)	1970-11-05
AU6852465A (xx)	1968-05-09
AU855865A (xx)	1968-01-25
AU92366A (xx)	1968-07-18