BE602573A - Procédé et appareil pour la croissance de cristaux semi-conducteurs - Google Patents
Procédé et appareil pour la croissance de cristaux semi-conducteursInfo
- Publication number
- BE602573A BE602573A BE602573A BE602573A BE602573A BE 602573 A BE602573 A BE 602573A BE 602573 A BE602573 A BE 602573A BE 602573 A BE602573 A BE 602573A BE 602573 A BE602573 A BE 602573A
- Authority
- BE
- Belgium
- Prior art keywords
- semiconductor crystals
- growing semiconductor
- growing
- crystals
- semiconductor
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/106—Seed pulling including sealing means details
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1064—Seed pulling including a fully-sealed or vacuum-maintained crystallization chamber [e.g., ampoule]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US21997A US3154384A (en) | 1960-04-13 | 1960-04-13 | Apparatus for growing compound semiconductor crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
BE602573A true BE602573A (fr) | 1961-10-13 |
Family
ID=21807286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE602573A BE602573A (fr) | 1960-04-13 | 1961-04-13 | Procédé et appareil pour la croissance de cristaux semi-conducteurs |
Country Status (5)
Country | Link |
---|---|
US (1) | US3154384A (fr) |
BE (1) | BE602573A (fr) |
DE (1) | DE1519914B2 (fr) |
GB (1) | GB990163A (fr) |
MY (1) | MY6900306A (fr) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3338678A (en) * | 1961-04-27 | 1967-08-29 | Ibm | Method and apparatus for growing crystals |
BE626374A (fr) * | 1961-12-22 | |||
US3372003A (en) * | 1963-07-19 | 1968-03-05 | Shin Nippon Chisso Hiryo Kabus | Apparatus and method for producing silicon single crystals for semiconductor |
DE1238450B (de) * | 1964-06-04 | 1967-04-13 | Consortium Elektrochem Ind | Verfahren zum Herstellen von spannungsfreien und rissefreien Staeben aus hochreinem Bor aus der Schmelze |
DE1233828B (de) * | 1964-07-03 | 1967-02-09 | Wacker Chemie Gmbh | Verfahren zur Herstellung, Reinigung und/oder Dotierung von ein- oder polykristallinen Halbleiterverbindungen |
DE1220832B (de) * | 1964-09-22 | 1966-07-14 | Siemens Ag | Ziehduese zum Ziehen von Halbleiterkristallen aus einer Schmelze |
BE676042A (fr) * | 1965-02-10 | 1966-06-16 | ||
NL128651C (fr) * | 1966-01-26 | |||
US3933990A (en) * | 1969-08-11 | 1976-01-20 | Hughes Aircraft Company | Synthesization method of ternary chalcogenides |
US3857679A (en) * | 1973-02-05 | 1974-12-31 | Univ Southern California | Crystal grower |
US3933572A (en) * | 1973-12-11 | 1976-01-20 | The United States Of America As Represented By The Secretary Of The Air Force | Method for growing crystals |
DE2420899A1 (de) * | 1974-04-30 | 1975-12-11 | Wacker Chemitronic | Verfahren zur herstellung von einkristallinem galliumarsenid |
DE3432467C1 (de) * | 1984-09-04 | 1986-03-27 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Stab- und Tiegelhalterung |
ATE55424T1 (de) * | 1984-09-04 | 1990-08-15 | Forschungszentrum Juelich Gmbh | Verfahren zur herstellung eines kristallinen koerpers aus der schmelze. |
US4721539A (en) * | 1986-07-15 | 1988-01-26 | The United States Of America As Represented By The United States Department Of Energy | Large single crystal quaternary alloys of IB-IIIA-SE2 and methods of synthesizing the same |
DE19604027C1 (de) * | 1996-01-24 | 1997-10-23 | Forschungsverbund Berlin Ev | Vorrichtung zur dampfdruckkontrollierten Czochralski-Züchtung von A¶I¶¶I¶¶I¶B¶V¶-Kristallen |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2680410A (en) * | 1951-01-02 | 1954-06-08 | Standard Oil Co | Self-lubricated rotating seal for centrifugal pumps |
DE970420C (de) * | 1951-03-10 | 1958-09-18 | Siemens Ag | Elektrisches Halbleitergeraet |
US2809135A (en) * | 1952-07-22 | 1957-10-08 | Sylvania Electric Prod | Method of forming p-n junctions in semiconductor material and apparatus therefor |
FR1152250A (fr) * | 1956-06-07 | 1958-02-13 | Appareil pour le tirage de monocristaux à partir d'une phase liquide | |
US2890139A (en) * | 1956-12-10 | 1959-06-09 | Shockley William | Semi-conductive material purification method and apparatus |
US2862283A (en) * | 1957-05-28 | 1958-12-02 | Russell Mfg Co | Anti-friction fabric |
NL241834A (fr) * | 1958-08-28 | 1900-01-01 |
-
1960
- 1960-04-13 US US21997A patent/US3154384A/en not_active Expired - Lifetime
-
1961
- 1961-04-10 GB GB12904/61A patent/GB990163A/en not_active Expired
- 1961-04-12 DE DE19611519914 patent/DE1519914B2/de active Pending
- 1961-04-13 BE BE602573A patent/BE602573A/fr unknown
-
1969
- 1969-12-31 MY MY1969306A patent/MY6900306A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
MY6900306A (en) | 1969-12-31 |
GB990163A (en) | 1965-04-28 |
US3154384A (en) | 1964-10-27 |
DE1519914B2 (de) | 1971-02-11 |
DE1519914A1 (de) | 1970-02-19 |
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