AU7665194A - Liquid spin coating method and apparatus therefor - Google Patents
Liquid spin coating method and apparatus thereforInfo
- Publication number
- AU7665194A AU7665194A AU76651/94A AU7665194A AU7665194A AU 7665194 A AU7665194 A AU 7665194A AU 76651/94 A AU76651/94 A AU 76651/94A AU 7665194 A AU7665194 A AU 7665194A AU 7665194 A AU7665194 A AU 7665194A
- Authority
- AU
- Australia
- Prior art keywords
- coating method
- spin coating
- apparatus therefor
- liquid spin
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0278—Arrangement or mounting of spray heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/842—Coating a support with a liquid magnetic dispersion
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25220193A JPH0780387A (en) | 1993-09-14 | 1993-09-14 | Spin coating method for liquid and device therefor |
JP5-252201 | 1993-09-14 | ||
PCT/JP1994/001519 WO1995007764A1 (en) | 1993-09-14 | 1994-09-14 | Liquid spin coating method and apparatus therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
AU7665194A true AU7665194A (en) | 1995-04-03 |
Family
ID=17233912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU76651/94A Abandoned AU7665194A (en) | 1993-09-14 | 1994-09-14 | Liquid spin coating method and apparatus therefor |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH0780387A (en) |
AU (1) | AU7665194A (en) |
WO (1) | WO1995007764A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07108616A (en) * | 1993-10-15 | 1995-04-25 | Fuji Electric Co Ltd | Method and apparatus for impregnating power transmitting frictional plate with resin |
US6352747B1 (en) | 1999-03-31 | 2002-03-05 | Ppg Industries Ohio, Inc. | Spin and spray coating process for curved surfaces |
US7448258B2 (en) | 1999-10-29 | 2008-11-11 | Avery Dennison Corporation | High throughput screening for moisture barrier characteristics of materials |
JP2007058200A (en) * | 2005-07-28 | 2007-03-08 | Hoya Corp | Mask blank manufacturing method and exposure mask manufacturing method |
US20110027478A1 (en) * | 2008-03-31 | 2011-02-03 | Showa Denko K.K. | Double-side coating apparatus, method for coating double sides with coating solution, edge rinsing apparatus, and edge rinsing method |
JP6093321B2 (en) | 2014-03-17 | 2017-03-08 | 東京エレクトロン株式会社 | Coating apparatus, coating method, and recording medium |
JP7095394B2 (en) * | 2018-05-15 | 2022-07-05 | 株式会社デンソー | Resin application method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62185322A (en) * | 1986-02-10 | 1987-08-13 | Nec Corp | Applicator for photo-resist |
JPH04114473U (en) * | 1991-03-14 | 1992-10-08 | 日本電気株式会社 | Dispenser of rotary coating equipment |
-
1993
- 1993-09-14 JP JP25220193A patent/JPH0780387A/en active Pending
-
1994
- 1994-09-14 AU AU76651/94A patent/AU7665194A/en not_active Abandoned
- 1994-09-14 WO PCT/JP1994/001519 patent/WO1995007764A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JPH0780387A (en) | 1995-03-28 |
WO1995007764A1 (en) | 1995-03-23 |
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