AU652156B2 - Method and apparatus for packaging semiconductor device - Google Patents
Method and apparatus for packaging semiconductor deviceInfo
- Publication number
- AU652156B2 AU652156B2 AU78464/91A AU7846491A AU652156B2 AU 652156 B2 AU652156 B2 AU 652156B2 AU 78464/91 A AU78464/91 A AU 78464/91A AU 7846491 A AU7846491 A AU 7846491A AU 652156 B2 AU652156 B2 AU 652156B2
- Authority
- AU
- Australia
- Prior art keywords
- semiconductor device
- packaging semiconductor
- packaging
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2-160346 | 1990-06-19 | ||
JP16034990 | 1990-06-19 | ||
JP2-178721 | 1990-07-06 | ||
JP2178721A JPH0465844A (en) | 1990-07-06 | 1990-07-06 | Semiconductor element mounting method |
Publications (2)
Publication Number | Publication Date |
---|---|
AU7846491A AU7846491A (en) | 1992-01-02 |
AU652156B2 true AU652156B2 (en) | 1994-08-18 |
Family
ID=26486884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU78464/91A Ceased AU652156B2 (en) | 1990-06-19 | 1991-06-18 | Method and apparatus for packaging semiconductor device |
Country Status (1)
Country | Link |
---|---|
AU (1) | AU652156B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113327879B (en) * | 2021-05-14 | 2022-08-16 | 长江存储科技有限责任公司 | Chuck adjusting device and method and wafer bonding device and method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4899921A (en) * | 1988-10-28 | 1990-02-13 | The American Optical Corporation | Aligner bonder |
-
1991
- 1991-06-18 AU AU78464/91A patent/AU652156B2/en not_active Ceased
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4899921A (en) * | 1988-10-28 | 1990-02-13 | The American Optical Corporation | Aligner bonder |
Also Published As
Publication number | Publication date |
---|---|
AU7846491A (en) | 1992-01-02 |
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