AU6191394A - Method of depositing optical oxide coatings at enhanced rates - Google Patents

Method of depositing optical oxide coatings at enhanced rates

Info

Publication number
AU6191394A
AU6191394A AU61913/94A AU6191394A AU6191394A AU 6191394 A AU6191394 A AU 6191394A AU 61913/94 A AU61913/94 A AU 61913/94A AU 6191394 A AU6191394 A AU 6191394A AU 6191394 A AU6191394 A AU 6191394A
Authority
AU
Australia
Prior art keywords
oxide coatings
enhanced rates
depositing optical
optical oxide
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU61913/94A
Inventor
Steven J. Nadel
Tamzen L. Van Skike
Leonard G. Wamboldt
Jesse D. Wolfe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linde LLC
Original Assignee
BOC Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Inc filed Critical BOC Group Inc
Publication of AU6191394A publication Critical patent/AU6191394A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Surface Treatment Of Optical Elements (AREA)
AU61913/94A 1989-08-07 1994-05-05 Method of depositing optical oxide coatings at enhanced rates Abandoned AU6191394A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39058989A 1989-08-07 1989-08-07
US390589 1989-08-07

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
AU61819/90A Division AU6181990A (en) 1989-08-07 1990-08-06 Method of depositing optical oxide coatings at enhanced rates

Publications (1)

Publication Number Publication Date
AU6191394A true AU6191394A (en) 1994-07-07

Family

ID=23543084

Family Applications (2)

Application Number Title Priority Date Filing Date
AU61819/90A Abandoned AU6181990A (en) 1989-08-07 1990-08-06 Method of depositing optical oxide coatings at enhanced rates
AU61913/94A Abandoned AU6191394A (en) 1989-08-07 1994-05-05 Method of depositing optical oxide coatings at enhanced rates

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AU61819/90A Abandoned AU6181990A (en) 1989-08-07 1990-08-06 Method of depositing optical oxide coatings at enhanced rates

Country Status (6)

Country Link
EP (1) EP0594568A1 (en)
JP (1) JPH04507266A (en)
KR (1) KR920703870A (en)
AU (2) AU6181990A (en)
CA (1) CA2059525A1 (en)
WO (1) WO1991002103A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2061399B1 (en) * 1993-03-31 1995-06-16 Consejo Superior Investigacion PROCEDURE FOR OBTAINING THIN LAYERS OF OXIDES THROUGH IONIC BOMBARDING AND THE USE OF VOLATILE METAL PRECURSORS
SG46607A1 (en) * 1993-07-28 1998-02-20 Asahi Glass Co Ltd Method of an apparatus for sputtering
WO2001010552A1 (en) 1999-08-05 2001-02-15 Kabushiki Kaisha Toyota Chuo Kenkyusho Photocatalytic material, photocatalytic article and method for their preparation
KR100794755B1 (en) * 2006-07-03 2008-01-15 전남대학교산학협력단 Method for synthesizing epitaxial p-type zinc oxide thin film growth by co-doping of ? group elements and nitrogen
JP6244103B2 (en) 2012-05-04 2017-12-06 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． Method and reactive sputter deposition system for reactive sputter deposition
DE102014104672A1 (en) * 2014-04-02 2015-10-08 Kennametal Inc. Coated cutting tool and method for its manufacture
JP2018076559A (en) * 2016-11-09 2018-05-17 キヤノン株式会社 Sputtering device and film production method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3962062A (en) * 1974-12-09 1976-06-08 Northern Electric Company Limited Sputtered dielectric thin films
EP0035906B2 (en) * 1980-03-10 1989-11-08 Teijin Limited Selectively light-transmitting laminated structure
JPS5940227B2 (en) * 1980-06-24 1984-09-28 富士通株式会社 Reactive sputtering method
JPS57161063A (en) * 1981-03-31 1982-10-04 Nippon Sheet Glass Co Ltd Method and device for sticking metallic oxide film on substrate
NO157212C (en) * 1982-09-21 1988-02-10 Pilkington Brothers Plc PROCEDURE FOR THE PREPARATION OF LOW EMISSION PATIENTS.
US4428811A (en) * 1983-04-04 1984-01-31 Borg-Warner Corporation Rapid rate reactive sputtering of a group IVb metal
US4769291A (en) * 1987-02-02 1988-09-06 The Boc Group, Inc. Transparent coatings by reactive sputtering
US4849081A (en) * 1988-06-22 1989-07-18 The Boc Group, Inc. Formation of oxide films by reactive sputtering

Also Published As

Publication number Publication date
WO1991002103A1 (en) 1991-02-21
JPH04507266A (en) 1992-12-17
AU6181990A (en) 1991-03-11
EP0594568A4 (en) 1993-09-02
EP0594568A1 (en) 1994-05-04
KR920703870A (en) 1992-12-18
CA2059525A1 (en) 1991-02-08

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