AU6088398A - Scanning electron microscope detection system - Google Patents

Scanning electron microscope detection system

Info

Publication number
AU6088398A
AU6088398A AU60883/98A AU6088398A AU6088398A AU 6088398 A AU6088398 A AU 6088398A AU 60883/98 A AU60883/98 A AU 60883/98A AU 6088398 A AU6088398 A AU 6088398A AU 6088398 A AU6088398 A AU 6088398A
Authority
AU
Australia
Prior art keywords
detection system
electron microscope
scanning electron
microscope detection
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU60883/98A
Inventor
Rudolf Autrata
Karel Blazek
Josef Jirak
Jiri Spinka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Preciosa AS
Original Assignee
Preciosa AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Preciosa AS filed Critical Preciosa AS
Publication of AU6088398A publication Critical patent/AU6088398A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/188—Differential pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
AU60883/98A 1997-03-13 1998-03-09 Scanning electron microscope detection system Abandoned AU6088398A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CZ770-97 1997-03-13
CZ97770A CZ284288B6 (en) 1997-03-13 1997-03-13 Detection system of raster electron microscope
PCT/CZ1998/000014 WO1998040906A1 (en) 1997-03-13 1998-03-09 Scanning electron microscope detection system

Publications (1)

Publication Number Publication Date
AU6088398A true AU6088398A (en) 1998-09-29

Family

ID=5462223

Family Applications (1)

Application Number Title Priority Date Filing Date
AU60883/98A Abandoned AU6088398A (en) 1997-03-13 1998-03-09 Scanning electron microscope detection system

Country Status (3)

Country Link
AU (1) AU6088398A (en)
CZ (1) CZ284288B6 (en)
WO (1) WO1998040906A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999046797A1 (en) 1998-03-10 1999-09-16 Erik Essers Scanning electron microscope
JP5005866B2 (en) 1999-11-29 2012-08-22 カール・ツァイス・エヌティーエス・ゲーエムベーハー Detector for scanning electron microscope with variable pressure and scanning electron microscope having the detector
US6775452B2 (en) * 2001-05-18 2004-08-10 Applied Materials, Inc. Phosphor coated waveguide for efficient collection of electron-generated photons
US6768836B2 (en) * 2001-11-02 2004-07-27 Applied Materials, Inc. Phosphor coated waveguide for the efficient collection of electron-generated photons
PL207238B1 (en) * 2003-10-14 2010-11-30 Politechnika Wroclawska System for detection of secondary and backward scattered electrons for use in scanning electron microscope
CZ299864B6 (en) * 2007-10-04 2008-12-17 Ústav prístrojové techniky AV CR, v.v.i. Ionization detector of environmental scanning electron microscope
PL217173B1 (en) * 2008-07-14 2014-06-30 Politechnika Wroclawska System for detection of electrones and scanning electrone microscope
WO2010021012A1 (en) * 2008-08-20 2010-02-25 Advantest Corporation Electron detection device and scanning electron microscope
JP5280174B2 (en) * 2008-12-10 2013-09-04 日本電子株式会社 Electron beam apparatus and method of operating electron beam apparatus
DE102010026169B4 (en) * 2010-07-06 2014-09-04 Carl Zeiss Microscopy Gmbh A particle beam system
CZ307557B6 (en) 2010-10-07 2018-12-05 Tescan Orsay Holding, A.S. A scintillation detection unit for detecting backscattered electrons for electron or ion microscopes
US10068744B2 (en) 2015-12-01 2018-09-04 Carl Zeiss Microscopy Gmbh Charged particle optical apparatus for through-the lens detection of particles
EP3909066A4 (en) * 2019-01-08 2022-11-09 Applied Materials Israel, Ltd. Scanning electron microscope and a method for overlay monitoring

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3500903A1 (en) * 1985-01-12 1986-07-17 Fa. Carl Zeiss, 7920 Heidenheim DETECTOR FOR REVERSE SCREW ELECTRONES
DE3925949A1 (en) * 1989-08-05 1991-02-07 Herbert Dr Specht Scanning electron microscope with synchronous back-scattered detection - consisting of retro-filled module flange mounted to side port of microscope having scintillator and fibre-optics system
US5828064A (en) * 1995-08-11 1998-10-27 Philips Electronics North America Corporation Field emission environmental scanning electron microscope

Also Published As

Publication number Publication date
CZ284288B6 (en) 1998-10-14
CZ77097A3 (en) 1998-09-16
WO1998040906A1 (en) 1998-09-17

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