AU597004C - Method for forming a deposited film - Google Patents

Method for forming a deposited film

Info

Publication number
AU597004C
AU597004C AU64270/86A AU6427086A AU597004C AU 597004 C AU597004 C AU 597004C AU 64270/86 A AU64270/86 A AU 64270/86A AU 6427086 A AU6427086 A AU 6427086A AU 597004 C AU597004 C AU 597004C
Authority
AU
Australia
Prior art keywords
forming
deposited film
deposited
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU64270/86A
Other versions
AU6427086A (en
AU597004B2 (en
Inventor
Junichi Hanna
Shunichi Ishihara
Isamu Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60238495A external-priority patent/JPH0645883B2/en
Priority claimed from JP60238902A external-priority patent/JPH0647729B2/en
Application filed by Canon Inc filed Critical Canon Inc
Publication of AU6427086A publication Critical patent/AU6427086A/en
Application granted granted Critical
Publication of AU597004B2 publication Critical patent/AU597004B2/en
Publication of AU597004C publication Critical patent/AU597004C/en
Anticipated expiration legal-status Critical
Expired legal-status Critical Current

Links

AU64270/86A 1985-10-24 1986-10-22 Method for forming a deposited film Expired AU597004C (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP60-238495 1985-10-24
JP60238495A JPH0645883B2 (en) 1985-10-24 1985-10-24 Deposited film formation method
JP60238902A JPH0647729B2 (en) 1985-10-25 1985-10-25 Deposited film formation method
JP60-238902 1985-10-25

Publications (3)

Publication Number Publication Date
AU6427086A AU6427086A (en) 1987-04-30
AU597004B2 AU597004B2 (en) 1990-05-24
AU597004C true AU597004C (en) 1991-03-07

Family

ID=

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