AU5887100A - Multi-modal analysis of micromechanical structures for sensing applications - Google Patents

Multi-modal analysis of micromechanical structures for sensing applications

Info

Publication number
AU5887100A
AU5887100A AU58871/00A AU5887100A AU5887100A AU 5887100 A AU5887100 A AU 5887100A AU 58871/00 A AU58871/00 A AU 58871/00A AU 5887100 A AU5887100 A AU 5887100A AU 5887100 A AU5887100 A AU 5887100A
Authority
AU
Australia
Prior art keywords
sensing applications
modal analysis
micromechanical structures
micromechanical
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU58871/00A
Inventor
Charles L. Britton
Patrick Ian Oden
Stephen F. Smith
Robert J. Warmack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UT Battelle LLC
Original Assignee
UT Battelle LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UT Battelle LLC filed Critical UT Battelle LLC
Publication of AU5887100A publication Critical patent/AU5887100A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
AU58871/00A 1999-06-29 2000-06-23 Multi-modal analysis of micromechanical structures for sensing applications Abandoned AU5887100A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US34260299A 1999-06-29 1999-06-29
US09342602 1999-06-29
PCT/US2000/017379 WO2001001121A1 (en) 1999-06-29 2000-06-23 Multi-modal analysis of micromechanical structures for sensing applications

Publications (1)

Publication Number Publication Date
AU5887100A true AU5887100A (en) 2001-01-31

Family

ID=23342512

Family Applications (1)

Application Number Title Priority Date Filing Date
AU58871/00A Abandoned AU5887100A (en) 1999-06-29 2000-06-23 Multi-modal analysis of micromechanical structures for sensing applications

Country Status (2)

Country Link
AU (1) AU5887100A (en)
WO (1) WO2001001121A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003287182A1 (en) * 2002-10-21 2004-05-13 Alegis Microsystems Nanomotion sensing system and method
EP1452852A1 (en) * 2003-02-28 2004-09-01 ANT Technology Co., Ltd. High resolution biosensor system
US20050052813A1 (en) * 2003-03-25 2005-03-10 Yoshihiro Kobayashi Mass measurement method, circuit for exciting piezoelectric vibration reed for mass measurement, and mass measurement apparatus
US7570125B2 (en) * 2003-04-17 2009-08-04 Akubio Limited Crystal oscillator
GB2473635A (en) * 2009-09-18 2011-03-23 Cambridge Entpr Ltd Detecting concentration of target species
US20110113856A1 (en) * 2009-11-13 2011-05-19 Honeywell International All-differential resonant nanosensor apparatus and method
CN103492872B (en) 2011-04-13 2016-04-06 3M创新有限公司 Use the method for absorbability sensor element
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
JP2014510933A (en) 2011-04-13 2014-05-01 スリーエム イノベイティブ プロパティズ カンパニー Vapor sensor including sensor element and integrated heating mechanism
EP2791667B1 (en) 2011-12-13 2018-03-28 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
US9671350B2 (en) * 2013-09-04 2017-06-06 Applied Invention, Llc Test mass compensation of mass measurement drift in a microcantilever resonator
AT514855B1 (en) * 2013-10-04 2015-08-15 Tech Universität Wien Device for fractionating particles contained in a liquid
ES2866149T3 (en) 2018-05-28 2021-10-19 Consejo Superior Investigacion Method and system for the analysis of analytes by mechanical resonance transduction

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3540265A (en) * 1968-05-21 1970-11-17 Panametrics Dual ultrasonic sensors employing differing modes of ultrasonic transmission
CA1180914A (en) * 1981-08-17 1985-01-15 James M. O'connor Micromechanical chemical sensor
EP0215669A3 (en) * 1985-09-17 1989-08-30 Seiko Instruments Inc. Analytical device and method for analysis of biochemicals, microbes and cells
US4947677A (en) * 1988-10-05 1990-08-14 The United States Of America As Represented By The United States Department Of Energy SAW determination of surface area of thin films
DE4323045C1 (en) * 1993-07-09 1994-12-15 Specs Ges Fuer Oberflaechenana Immunosensor
US5744902A (en) * 1995-05-16 1998-04-28 The United States Of America As Represented By The Secretary Of The Army Chemical and biological sensor based on microresonators
SE520046C2 (en) * 1997-11-24 2003-05-13 Sense Ab Q Method for Measuring Interaction between a Target Molecule and a Receptor Molecule with Piezoelectric Crystal Microwave

Also Published As

Publication number Publication date
WO2001001121A1 (en) 2001-01-04

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase