AU5464899A - Micromachined acoustic ejectors and applications to micro thrusters, active heatsinks and fluid pumps - Google Patents

Micromachined acoustic ejectors and applications to micro thrusters, active heatsinks and fluid pumps

Info

Publication number
AU5464899A
AU5464899A AU54648/99A AU5464899A AU5464899A AU 5464899 A AU5464899 A AU 5464899A AU 54648/99 A AU54648/99 A AU 54648/99A AU 5464899 A AU5464899 A AU 5464899A AU 5464899 A AU5464899 A AU 5464899A
Authority
AU
Australia
Prior art keywords
applications
fluid pumps
heatsinks
micro thrusters
active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU54648/99A
Inventor
Babak Amirparviz
Luis P. Bernal
Khalil Najafi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Michigan
Original Assignee
University of Michigan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Michigan filed Critical University of Michigan
Publication of AU5464899A publication Critical patent/AU5464899A/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F7/00—Pumps displacing fluids by using inertia thereof, e.g. by generating vibrations therein
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
AU54648/99A 1998-08-05 1999-08-04 Micromachined acoustic ejectors and applications to micro thrusters, active heatsinks and fluid pumps Abandoned AU5464899A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9539398P 1998-08-05 1998-08-05
US60095393 1998-08-05
PCT/US1999/017652 WO2000007735A2 (en) 1998-08-05 1999-08-04 Micromachined acoustic ejectors and applications

Publications (1)

Publication Number Publication Date
AU5464899A true AU5464899A (en) 2000-02-28

Family

ID=22251777

Family Applications (1)

Application Number Title Priority Date Filing Date
AU54648/99A Abandoned AU5464899A (en) 1998-08-05 1999-08-04 Micromachined acoustic ejectors and applications to micro thrusters, active heatsinks and fluid pumps

Country Status (2)

Country Link
AU (1) AU5464899A (en)
WO (1) WO2000007735A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002100771A2 (en) * 2001-06-08 2002-12-19 The Regents Of The University Of Michigan Low-temperature patterned wafer bonding with photosensitive benzocylobutene (bcb) and 3d microelectromechanical systems fabrication
ITTO20020859A1 (en) 2002-10-04 2004-04-05 Varian Spa VIBRATING PUMPING STAGE FOR VACUUM PUMPS AND VIBRATING PUMP VACUUM PUMPS.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474251A (en) * 1980-12-12 1984-10-02 Hydronautics, Incorporated Enhancing liquid jet erosion
IT1141984B (en) * 1981-02-26 1986-10-08 Ernesto Marelli ULTRASONIC EQUIPMENT FOR PARTICULARLY TREATMENT OF LIQUIDS
US4753579A (en) * 1986-01-22 1988-06-28 Piezo Electric Products, Inc. Ultrasonic resonant device
US4858717A (en) * 1988-03-23 1989-08-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Acoustic convective system
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
US5710395A (en) * 1995-03-28 1998-01-20 Wilke; Paul Helmholtz resonator loudspeaker
US5758823A (en) * 1995-06-12 1998-06-02 Georgia Tech Research Corporation Synthetic jet actuator and applications thereof

Also Published As

Publication number Publication date
WO2000007735A3 (en) 2000-06-02
WO2000007735A2 (en) 2000-02-17

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AU5464899A (en) Micromachined acoustic ejectors and applications to micro thrusters, active heatsinks and fluid pumps

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase