AU5233400A - Method of fabricating a semiconductor device - Google Patents
Method of fabricating a semiconductor deviceInfo
- Publication number
- AU5233400A AU5233400A AU52334/00A AU5233400A AU5233400A AU 5233400 A AU5233400 A AU 5233400A AU 52334/00 A AU52334/00 A AU 52334/00A AU 5233400 A AU5233400 A AU 5233400A AU 5233400 A AU5233400 A AU 5233400A
- Authority
- AU
- Australia
- Prior art keywords
- fabricating
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/131—Integrated optical circuits characterised by the manufacturing method by using epitaxial growth
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12078—Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2304/00—Special growth methods for semiconductor lasers
- H01S2304/10—CBE
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9913713.5A GB9913713D0 (en) | 1999-06-14 | 1999-06-14 | Method of fabricating a semiconductor device |
GB9913713 | 1999-06-14 | ||
GBGB9918097.8A GB9918097D0 (en) | 1999-06-14 | 1999-08-03 | Method of fabricating a semiconductor device |
GB9918097 | 1999-08-03 | ||
PCT/GB2000/002145 WO2000077548A1 (en) | 1999-06-14 | 2000-06-02 | Method of fabricating a semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
AU5233400A true AU5233400A (en) | 2001-01-02 |
Family
ID=26315661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU52334/00A Abandoned AU5233400A (en) | 1999-06-14 | 2000-06-02 | Method of fabricating a semiconductor device |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1185894A1 (en) |
JP (1) | JP2003502844A (en) |
CN (1) | CN1355892A (en) |
AU (1) | AU5233400A (en) |
CA (1) | CA2374942A1 (en) |
WO (1) | WO2000077548A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100404323B1 (en) * | 2001-01-30 | 2003-11-03 | 한국전자통신연구원 | The Method for Growing Semiconductor Epitaxial Layer to be different from among Growing Parts |
JP4552821B2 (en) * | 2005-09-27 | 2010-09-29 | 日立電線株式会社 | Method for manufacturing spot size conversion waveguide |
US20230002894A1 (en) * | 2021-07-01 | 2023-01-05 | Applied Materials, Inc. | Shadow ring lift to improve wafer edge performance |
CN117805968B (en) * | 2024-02-29 | 2024-05-17 | 江苏南里台科技有限公司 | Method and system for manufacturing photonic chip pattern structure |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4855255A (en) * | 1988-03-23 | 1989-08-08 | Massachusetts Institute Of Technology | Tapered laser or waveguide optoelectronic method |
-
2000
- 2000-06-02 CN CN 00808830 patent/CN1355892A/en active Pending
- 2000-06-02 WO PCT/GB2000/002145 patent/WO2000077548A1/en not_active Application Discontinuation
- 2000-06-02 CA CA002374942A patent/CA2374942A1/en not_active Abandoned
- 2000-06-02 AU AU52334/00A patent/AU5233400A/en not_active Abandoned
- 2000-06-02 JP JP2001503549A patent/JP2003502844A/en not_active Withdrawn
- 2000-06-02 EP EP00937038A patent/EP1185894A1/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
CN1355892A (en) | 2002-06-26 |
EP1185894A1 (en) | 2002-03-13 |
JP2003502844A (en) | 2003-01-21 |
CA2374942A1 (en) | 2000-12-21 |
WO2000077548A1 (en) | 2000-12-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |