AU484835B2 - A method for producing integrated circuits of high packing density ina single crystalline substrate - Google Patents

A method for producing integrated circuits of high packing density ina single crystalline substrate

Info

Publication number
AU484835B2
AU484835B2 AU61638/73A AU6163873A AU484835B2 AU 484835 B2 AU484835 B2 AU 484835B2 AU 61638/73 A AU61638/73 A AU 61638/73A AU 6163873 A AU6163873 A AU 6163873A AU 484835 B2 AU484835 B2 AU 484835B2
Authority
AU
Australia
Prior art keywords
integrated circuits
packing density
single crystalline
crystalline substrate
high packing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU61638/73A
Other versions
AU6163873A (en
Inventor
Lars Gunnar Bjorklund And Eva Katzner Fritz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefonaktiebolaget LM Ericsson AB
Original Assignee
Telefonaktiebolaget LM Ericsson AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE14522/72A external-priority patent/SE361232B/xx
Application filed by Telefonaktiebolaget LM Ericsson AB filed Critical Telefonaktiebolaget LM Ericsson AB
Application granted granted Critical
Publication of AU6163873A publication Critical patent/AU6163873A/en
Publication of AU484835B2 publication Critical patent/AU484835B2/en
Expired legal-status Critical Current

Links

AU61638/73A 1972-11-09 1973-10-22 A method for producing integrated circuits of high packing density ina single crystalline substrate Expired AU484835B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE14522/72A SE361232B (en) 1972-11-09 1972-11-09
SESE14522-72 1972-11-09

Publications (2)

Publication Number Publication Date
AU6163873A AU6163873A (en) 1975-04-24
AU484835B2 true AU484835B2 (en) 1975-04-24

Family

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