Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Telefonaktiebolaget LM Ericsson AB
Original Assignee
Telefonaktiebolaget LM Ericsson AB
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Filing date
Publication date
Priority claimed from SE14522/72Aexternal-prioritypatent/SE361232B/xx
Application filed by Telefonaktiebolaget LM Ericsson ABfiledCriticalTelefonaktiebolaget LM Ericsson AB
Application grantedgrantedCritical
Publication of AU6163873ApublicationCriticalpatent/AU6163873A/en
Publication of AU484835B2publicationCriticalpatent/AU484835B2/en
AU61638/73A1972-11-091973-10-22A method for producing integrated circuits of high packing density ina single crystalline substrate
ExpiredAU484835B2
(en)