AU482820B2 - A semiconductor integrated circuit isolated through dielectric material anda method for manufacturing thesame - Google Patents

A semiconductor integrated circuit isolated through dielectric material anda method for manufacturing thesame

Info

Publication number
AU482820B2
AU482820B2 AU55362/73A AU5536273A AU482820B2 AU 482820 B2 AU482820 B2 AU 482820B2 AU 55362/73 A AU55362/73 A AU 55362/73A AU 5536273 A AU5536273 A AU 5536273A AU 482820 B2 AU482820 B2 AU 482820B2
Authority
AU
Australia
Prior art keywords
integrated circuit
dielectric material
semiconductor integrated
circuit isolated
anda method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU55362/73A
Other versions
AU5536273A (en
Inventor
Ktyohide Sakai Hiroshi Tsutsumi Yasusuke Sumitomo Kazuo Niwa Eisaku Inaba Hajime Sawatski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP47047382A external-priority patent/JPS5120267B2/ja
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Application granted granted Critical
Publication of AU482820B2 publication Critical patent/AU482820B2/en
Publication of AU5536273A publication Critical patent/AU5536273A/en
Expired legal-status Critical Current

Links

AU55362/73A 1972-05-13 1973-05-07 A semiconductor integrated circuit isolated through dielectric material anda method for manufacturing thesame Expired AU482820B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP47382/72 1972-05-13
JP47047382A JPS5120267B2 (en) 1972-05-13 1972-05-13

Publications (2)

Publication Number Publication Date
AU482820B2 true AU482820B2 (en) 1975-07-03
AU5536273A AU5536273A (en) 1975-07-03

Family

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