AU4500279A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- AU4500279A AU4500279A AU45002/79A AU4500279A AU4500279A AU 4500279 A AU4500279 A AU 4500279A AU 45002/79 A AU45002/79 A AU 45002/79A AU 4500279 A AU4500279 A AU 4500279A AU 4500279 A AU4500279 A AU 4500279A
- Authority
- AU
- Australia
- Prior art keywords
- pressure sensor
- semiconductor pressure
- semiconductor
- sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2993678A JPS54123077A (en) | 1978-03-17 | 1978-03-17 | Pressure sensor |
JP2993678 | 1978-03-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
AU4500279A true AU4500279A (en) | 1979-09-20 |
Family
ID=12289864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU45002/79A Abandoned AU4500279A (en) | 1978-03-17 | 1979-03-09 | Semiconductor pressure sensor |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS54123077A (en) |
AU (1) | AU4500279A (en) |
FR (1) | FR2420210A1 (en) |
GB (1) | GB2036425B (en) |
IT (1) | IT1111588B (en) |
WO (1) | WO1979000783A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU607436B2 (en) * | 1987-05-27 | 1991-03-07 | Smc Corporation | Pressure meter |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4407296A (en) * | 1980-09-12 | 1983-10-04 | Medtronic, Inc. | Integral hermetic impantable pressure transducer |
EP0049955A1 (en) * | 1980-10-09 | 1982-04-21 | General Motors Corporation | Dual cavity pressure sensor |
JPS57104835A (en) * | 1980-12-23 | 1982-06-30 | Toyota Motor Corp | Detecting method for pressure in internal combustion engine |
US4432372A (en) * | 1981-08-28 | 1984-02-21 | Medtronic, Inc. | Two-lead power/signal multiplexed transducer |
JPS5915944U (en) * | 1982-07-21 | 1984-01-31 | 株式会社日立製作所 | differential pressure detector |
US4730496A (en) * | 1986-06-23 | 1988-03-15 | Rosemount Inc. | Capacitance pressure sensor |
US4773269A (en) * | 1986-07-28 | 1988-09-27 | Rosemount Inc. | Media isolated differential pressure sensors |
EP0265816B1 (en) * | 1986-10-28 | 1991-08-28 | Sumitomo Electric Industries Limited | Method of measuring semiconductor pressure sensor |
JPS6461637A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPS6461634A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPH0814518B2 (en) * | 1987-12-28 | 1996-02-14 | 松下電器産業株式会社 | Method for manufacturing semiconductor pressure sensor |
JPH03200034A (en) * | 1989-12-28 | 1991-09-02 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JPH03200035A (en) * | 1989-12-28 | 1991-09-02 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JP2771070B2 (en) * | 1992-03-25 | 1998-07-02 | 日立建機株式会社 | Differential pressure sensor |
AU658524B1 (en) * | 1993-08-17 | 1995-04-13 | Yokogawa Electric Corporation | Semiconductor type differential pressure measurement apparatus and method for manufacturing the same |
DE19648048C2 (en) * | 1995-11-21 | 2001-11-29 | Fuji Electric Co Ltd | Detector device for pressure measurement based on measured capacitance values |
US7077008B2 (en) | 2004-07-02 | 2006-07-18 | Honeywell International Inc. | Differential pressure measurement using backside sensing and a single ASIC |
CN101088000B (en) * | 2004-08-23 | 2010-11-10 | 霍尼韦尔国际公司 | Absolute pressure detection system and method |
US7401522B2 (en) * | 2005-05-26 | 2008-07-22 | Rosemount Inc. | Pressure sensor using compressible sensor body |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE336042B (en) * | 1967-05-03 | 1971-06-21 | Mallory & Co Inc P R | |
JPS5135294A (en) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd | |
JPS5190587A (en) * | 1975-02-07 | 1976-08-09 | ||
JPS5255392A (en) * | 1975-10-31 | 1977-05-06 | Hitachi Ltd | Semiconductor pressure sensor |
-
1978
- 1978-03-17 JP JP2993678A patent/JPS54123077A/en active Pending
-
1979
- 1979-03-09 AU AU45002/79A patent/AU4500279A/en not_active Abandoned
- 1979-03-12 GB GB7937207A patent/GB2036425B/en not_active Expired
- 1979-03-12 WO PCT/JP1979/000062 patent/WO1979000783A1/en unknown
- 1979-03-15 FR FR7906606A patent/FR2420210A1/en active Granted
- 1979-03-16 IT IT21081/79A patent/IT1111588B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU607436B2 (en) * | 1987-05-27 | 1991-03-07 | Smc Corporation | Pressure meter |
Also Published As
Publication number | Publication date |
---|---|
GB2036425B (en) | 1983-02-09 |
GB2036425A (en) | 1980-06-25 |
IT1111588B (en) | 1986-01-13 |
WO1979000783A1 (en) | 1979-10-18 |
FR2420210B1 (en) | 1984-07-06 |
JPS54123077A (en) | 1979-09-25 |
IT7921081A0 (en) | 1979-03-16 |
FR2420210A1 (en) | 1979-10-12 |
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