AU3124193A - Device and method for reflection and dispersion of x-rays - Google Patents

Device and method for reflection and dispersion of x-rays

Info

Publication number
AU3124193A
AU3124193A AU31241/93A AU3124193A AU3124193A AU 3124193 A AU3124193 A AU 3124193A AU 31241/93 A AU31241/93 A AU 31241/93A AU 3124193 A AU3124193 A AU 3124193A AU 3124193 A AU3124193 A AU 3124193A
Authority
AU
Australia
Prior art keywords
rays
reflection
dispersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU31241/93A
Inventor
Mark W. Lund
David Madsen
Qi Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Multilayer Optics and X Ray Technology Inc
Original Assignee
Multilayer Optics and X Ray Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Multilayer Optics and X Ray Technology Inc filed Critical Multilayer Optics and X Ray Technology Inc
Publication of AU3124193A publication Critical patent/AU3124193A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067—Construction details

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AU31241/93A 1991-11-04 1992-10-30 Device and method for reflection and dispersion of x-rays Abandoned AU3124193A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US78756091A 1991-11-04 1991-11-04
US787560 1991-11-04

Publications (1)

Publication Number Publication Date
AU3124193A true AU3124193A (en) 1993-06-07

Family

ID=25141883

Family Applications (1)

Application Number Title Priority Date Filing Date
AU31241/93A Abandoned AU3124193A (en) 1991-11-04 1992-10-30 Device and method for reflection and dispersion of x-rays

Country Status (2)

Country Link
AU (1) AU3124193A (en)
WO (1) WO1993009545A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7261957B2 (en) 2000-03-31 2007-08-28 Carl Zeiss Smt Ag Multilayer system with protecting layer system and production method
JP3629520B2 (en) * 2002-03-05 2005-03-16 理学電機工業株式会社 X-ray spectroscopic element and fluorescent X-ray analyzer using the same
EP1348984A1 (en) * 2002-03-27 2003-10-01 Carl Zeiss Semiconductor Manufacturing Technologies Ag Optical broad band element and process for its production
DE102008040265A1 (en) 2008-07-09 2010-01-14 Carl Zeiss Smt Ag Reflective optical element and method for its production
US9773578B2 (en) 2013-02-15 2017-09-26 Asml Netherlands B.V. Radiation source-collector and method for manufacture

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4727000A (en) * 1983-06-06 1988-02-23 Ovonic Synthetic Materials Co., Inc. X-ray dispersive and reflective structures
EP0137697B1 (en) * 1983-08-31 1987-11-25 Kabushiki Kaisha Toshiba Method of producing an optical information recording medium
US4785470A (en) * 1983-10-31 1988-11-15 Ovonic Synthetic Materials Company, Inc. Reflectivity and resolution X-ray dispersive and reflective structures for carbon, beryllium and boron analysis
US4675889A (en) * 1985-07-08 1987-06-23 Ovonic Synthetic Materials Company, Inc. Multiple wavelength X-ray dispersive devices and method of making the devices
US4992153A (en) * 1989-04-26 1991-02-12 Balzers Aktiengesellschaft Sputter-CVD process for at least partially coating a workpiece

Also Published As

Publication number Publication date
WO1993009545A1 (en) 1993-05-13

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