AU2365500A - Rotary electrostatic microactuator - Google Patents

Rotary electrostatic microactuator

Info

Publication number
AU2365500A
AU2365500A AU23655/00A AU2365500A AU2365500A AU 2365500 A AU2365500 A AU 2365500A AU 23655/00 A AU23655/00 A AU 23655/00A AU 2365500 A AU2365500 A AU 2365500A AU 2365500 A AU2365500 A AU 2365500A
Authority
AU
Australia
Prior art keywords
electrostatic microactuator
rotary electrostatic
rotary
microactuator
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU23655/00A
Inventor
John D. Grade
John H Jerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of AU2365500A publication Critical patent/AU2365500A/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • H02N1/006Electrostatic motors of the gap-closing type
    • H02N1/008Laterally driven motors, e.g. of the comb-drive type
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/1055Disposition or mounting of transducers relative to record carriers
    • G11B11/10556Disposition or mounting of transducers relative to record carriers with provision for moving or switching or masking the transducers in or out of their operative position
    • G11B11/10563Access of indexed parts
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors
AU23655/00A 1998-12-15 1999-12-15 Rotary electrostatic microactuator Abandoned AU2365500A (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US11226398P 1998-12-15 1998-12-15
US11226598P 1998-12-15 1998-12-15
US60112265 1998-12-15
US60112263 1998-12-15
US12351299P 1999-03-08 1999-03-08
US60123512 1999-03-08
PCT/US1999/029964 WO2000036740A1 (en) 1998-12-15 1999-12-15 Rotary electrostatic microactuator

Publications (1)

Publication Number Publication Date
AU2365500A true AU2365500A (en) 2000-07-03

Family

ID=27381131

Family Applications (1)

Application Number Title Priority Date Filing Date
AU23655/00A Abandoned AU2365500A (en) 1998-12-15 1999-12-15 Rotary electrostatic microactuator

Country Status (6)

Country Link
EP (1) EP1181765A1 (en)
JP (1) JP2002542747A (en)
CN (1) CN1333943A (en)
AU (1) AU2365500A (en)
CA (2) CA2356905A1 (en)
WO (1) WO2000036740A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856632B1 (en) * 1999-09-20 2005-02-15 Iolon, Inc. Widely tunable laser
US6903486B2 (en) 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
WO2001043268A2 (en) 1999-11-29 2001-06-14 Iolon, Inc. Balanced microdevice and rotary electrostatic microactuator for use therewith
AU4513601A (en) * 1999-11-29 2001-06-18 Iolon, Inc. Tunable laser with microactuator
AU2929601A (en) * 2000-01-05 2001-07-16 Iolon, Inc. Tiltable electrostatic microactuator and method for using same
FR2841995A1 (en) * 2002-07-04 2004-01-09 Memscap Variable optical attenuator (VOA), comprises shutters laid out in thickness of mobile part of an actuator which is displaced rotationally by interaction with matching stationary parts
JP4492252B2 (en) * 2003-09-05 2010-06-30 セイコーエプソン株式会社 Actuator
JP2011180534A (en) * 2010-03-03 2011-09-15 Furukawa Electric Co Ltd:The Mems element, movable mirror, and optical switch device
JP5920706B2 (en) * 2012-02-29 2016-05-18 国立大学法人 香川大学 MEMS optical components
EP2713196A1 (en) * 2012-09-27 2014-04-02 poLight AS Deformable lens having piezoelectric actuators arranged with an interdigitated electrode configuration
JP2016059191A (en) * 2014-09-11 2016-04-21 ソニー株式会社 Electrostatic device
US10516348B2 (en) * 2015-11-05 2019-12-24 Mems Drive Inc. MEMS actuator package architecture
CN110291434B (en) * 2016-09-12 2021-11-05 麦斯卓有限公司 MEMS actuation system and method
CN110165927B (en) * 2018-05-24 2020-04-14 北京纳米能源与***研究所 Friction electric engine and image scanning system
CN109734044B (en) * 2019-01-09 2021-08-24 杭州电子科技大学 Self-driven miniature impact hammer
CN109761185B (en) * 2019-01-25 2020-09-29 山东大学 MEMS driver based on zipper comb teeth and working method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Also Published As

Publication number Publication date
EP1181765A1 (en) 2002-02-27
CA2356905A1 (en) 2000-06-22
WO2000036740A1 (en) 2000-06-22
JP2002542747A (en) 2002-12-10
CN1333943A (en) 2002-01-30
CA2354604A1 (en) 2000-06-22

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase