AU2014208316B2 - High-density mask for three-dimensional substrates and methods for making the same - Google Patents

High-density mask for three-dimensional substrates and methods for making the same Download PDF

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AU2014208316B2
AU2014208316B2 AU2014208316A AU2014208316A AU2014208316B2 AU 2014208316 B2 AU2014208316 B2 AU 2014208316B2 AU 2014208316 A AU2014208316 A AU 2014208316A AU 2014208316 A AU2014208316 A AU 2014208316A AU 2014208316 B2 AU2014208316 B2 AU 2014208316B2
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mandrel
shadow mask
utilized
substrate
masks
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AU2014208316A1 (en
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Praveen Pandojirao-S
James Daniel Riall
Adam Toner
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Johnson and Johnson Vision Care Inc
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Johnson and Johnson Vision Care Inc
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Abstract

A method for fabricating high-density masks for non-planar or three-dimen-sionail substrates utilizes a mandrel having one or more precision forms machined therein. Once the mandrel with one or more forms is fabricated, one or more mask blanks may be constructed thereon. The final masks may be cut from one or more mask blanks. C))

Description

I HIGH-DENSITY MASK FOR THREE-IMENSIONAL SUBSTRATES AND METHODS FOR MAKING THE SAME FIELD OF THE IN VENTION [0001] The present invention relates to masks and devices and methods for fabricating masks, and more particularly to precision masks for complex, three dimensional substrates with extreme tolerances and devices and methods for fabricating these high-density, precision masks. BACKGRO UN ) OF THE INVENTION [0002] As electronic devices continue to be miniaturized, it is becoming increasingly more likely to create wearable or embeddable microelectronic devices for a variety of uses, Such uses may include monitoring aspects of body chemistry, administering controlled dosages of medications or therapeutic agents vi a various mechanisms, including automatically, in response to measurements, or in response to external control signals, and augmenting the performance of organs or tissues. Examples of such devices include glucose infusion pumps, pacemakers, defibrillators. ventricular assist devices and neurostimulators. A new, particularly useful field of application is in ophthalmic wearable lenses and contact lenses. For example, a wearable lens niay incorporate a lens assembly having an electronically adjustable focus to augment or enhance performance of the eye, In another example, either with or without adjustable focus. a wearable contact lens may incorporate electronic sensors to detect concentrations of particular chemicals in the precorneal (tear) film. The use of embedded electronics in a lens assembly introduces a potential requirement for communication with the electronics, for a method of powering and/or re-energizing the electronics, for interconnecting the electronics, for intemal and external sensing and/or monitoring, and for control of the electronics and the overall function of the lens, [0003] The human eye has the ability to discem millions of colors, to adjust easily to shifting light conditions, and transmit signals or information to the brain at a rate exceeding that of a high-speed internet connection. Lenses, such as contact lenses and intraocular lenses. currently are utilized to correct vision defects such as myopia, hyperopia and astigmatism. However, properly designed lenses incorporating additional components may be utilized to enhance vision as well as to correct vision defects. [0004] Conventional contact lenses are polymeric structures with specific shapes to correct various vision problems as briefly set forth above. To achieve enhanced fiunctionality, various circuits and components have to be integrated into these polymeric structures. For example, control circuits, microprocessors, communication devices, power supplies, sensors, actuators, light emitting diodes, and miniature antennas may be integrated into contact lenses via custom-built optoelectronic components to not only correct vision, but to enhance vision as well as provide additional functionality as is explained herein, Electronic and/or powered contract lenses may be designed to provide enhanced vision via zoom-in and zoom-out capabilities or just simply modifying the refractive capabilities of the lenses, Electronic and/or powered contact lenses may be designed to enhance color and resolution, to display textural information, to translate speech into captions in real time, to offer visual cues from a navigation system, to provide image processing and internet access, The lenses may be designed to allow the wearer to see in low ligNht conditions. The properly designed electronics and/or arrangement of electronics on lenses may allow for projecting an image onto the retina, for example, without a variable focus optic lens, provide novelty image displays and even provide wakeup alerts, Alternately, or in addition to any of these functions or similar functions, the contact Ilenses may incorporate components for the noninvasive monitoring of the wearer's biomarkers and health indicators, For example, sensors built into the lenses may allow a diabetic patient to monitor blood sugar levels by analyzing components of the tear film without the need for drawing blood. In addition, an appropriately configured lens may incorporate sensors for monitoring cholesterol, sodium and potassium levels as well as other biological markers, This, coupled with a wireless data transmitter, could allow a physician to have almost immediate access to a patient's blood chemistry without the need for the patient to waste time getting to a laboratory and having blood drawn. In addition, sensors built into the lenses may be utilized to detect light incident on the eye to compensate for ambient light conditions or for use in determining blink patterns.
3 [00(05] The proper combination of devices could yield potentially unlimited functionality; however, there are a number of difficulties associated with the incorporation of extra components on a piece of opticakgrade polymer, In general, it is difficult to manufacture such components directly on the lens for a number of reasons, and it is difficult to mount and interconnect planar devices on a non-planar surface. It is also difficult to manufacture to scale, The components to be placed on or in the lens need to be miniaturized and integrated onto just approximately 1.5 square centimeters of a transparent polymer while protecting the components from the liquid environment on the eye. It is also difficult to make a contact lens comfortable and safe for the wearer with the added thickness of additional components [0006] Given the area and volume constraints of an ophthalmic device such as a contact lens. and the environment in which it is to be utilized, the physical realization of the device must overcome a number of problems, including mounting and interconnecting a number of electronic comrponents on a nion-planar surface, the bulk of which comprises optic plastic. Accordingly, there exists a need to orm three-diensionai shapes and to metalize or otherwise form interconnects and offsets on these three-dimensional shapes with a high degree of precision and repeatability. SUMMARY OF THE INVENTION [0007] The high-density masks for three-dimensional substrates and the methods for making the high-density masks of the present invention overcome the difficulties as briefly set forth above. [0008] The present invention provides a mandrel for forming shadow mask blanks, the mandrel including: a substantially cylindrical structure comprising a first face and a second face, the first and second faces being substantially parallel; one or more attachment mechanisms cooperatively associated with the first face of the substantially cylindrical structure, the one or more attachment mechanisms being configured to secure the mandrel to a machining tool; and one or more forms machined into the second flce of the substantially cylindrical structure, the one or more forms having a non-planar pattern matching a non-planar substrate to be masked.
4 [0009] (This paragraph intentionally left blank). [0010] Masks, which create regions that are blocked and regions that are open to form a predetermined pattern, are useful devices in the processes utilized to form interconnections on non-planar or three-dimensional surfaces or substrates. In a general sense, simple masks which allow for the deposition of a material in predetermined regions of a three-dimensional substrate may result in the opimization of the subsequent material removal processes that are utilized to form the particular features, for example, electrical interconnects on a powered ophthalmic device, This particular application or use of masks is of limited sophistication; namely, to block or expose large regions and this is due mainly because of the quality of the masks. However, in accordance with the devices and methods of the pesent invention, precision masks may be fabricated Which in turn may be utilized to form detailed features on highly complex, three-dimensional substrates such as may be utilized in powered ophthalmic applications. [0011] The method of fabricating a mask or shadow mask in accordance with the present invention comprises a number of steps, The first step comprises manufacturing or creating a mandrel. The mandrel preferably comprises one or more forms or forn wells that are created to represent the desired internal profile and features of the item or element to be masked, The next step in fabricating a mask or shadow mask in accordance with the present invention involves the labrication of Oe or more shadow mask blanks in the one or more forms in the mandrel. Shadow mask blanks become the shadow masks after the desired pattern is cut or machined into the shadow mask blanks. The one or more shadow mask blanks nav be fabricated utilizing any nuniber of suitable techniques such as deposition processes, including electroforming. The next and final step in the process of fabricating a mask or shadow mask in accordance with the present invention involves the removal of the plate comprising the one or more shadow ntask blanks from the mandrel and forming the patterns therein to create the specific shadow mask. Forming the patterns may be accomplished utilizing any number of precision machining processes, including laser ablation. [0012] The mandrel fabricated and/or utilized in accordance with the present invention may comprise one or more forms corresponding precisely with the three- 5 dimensional substrates to be masked, and these forms may be configured in a number of ways. For example, the configuration of the one or more forms on the mandrel may be arranged to increase the density of the forms, In other words, the configuration of the forms on the mandrel may be modified to increase the number of designs ona single mandrel. The configuriion of the forums on the mandrel may also be modified to increase the repeatability in the process. In other words, the configuration of the mandrel may be modified to increase the ease of removing the shadow mask blank from the mandrel. It is important to note that numerous other configurations may be utilized to achieve a wide variety of functions, [0013] The precision of the mask is determined primarily by the precision of the form in the mandrel. The form in the mandrel preferably conforms exacdy to the shape of the three-dimensional substrates, Accordingly, the process utilized in the present invention enables the forms to be machined into the mandrel with a very high degree of precision. In addition, the mandrel is preferably designed to increase the efficiency of the overall process as well. [0014] The high-density masks and the process for fabricating high-density masks in accordance with the present invention provide a means for masking detailed, non-planar or thre-dimensional substrates to fomi precision features thereon without the need for additional post processing work, The masks and processes set forth herein provide a cost effective and efficient means for fabricating detailed components. BRIEF DESCRIPTION OF THE DRAWINGS [0015] The foregoing and other features and advantages of the invention will be apparent from the following, more particular description of preferred embodiments of the invention, as illustrated in the accompanying drawings. [0016] Figures I A, 1B and I C are diagrammatic representations of a first exemplary mandrel and with a single shadow nask blank in accordance with the present invention.
6 [0017] Figures 2A, 2B and 2C are diagrammatic representations of a second exemplary mandrel with multiple shadow mask blanks in accordance with the present [0018] Figures 3A, 3B 3C and 311) are diagrammatic representations of an exemplary mandrel assembly with multiple shadow mask blanks in accordance with the present invention, [0019] Figure 4 is a diagrammatic representation of an exemplary three~ dimensional substrate with surfaces upon which interconnections may be configured utilizing a mask in accordance with the present invention, [0(020] Figure 5 is a diagrammatic representation of an exemplary shadow mask positioned on the substrate illustrated in Figure 4 in accordance with the present invention. [0021] Figure 6 is a diagrammatic representation of the substrate illustrated in Figure 4 with interconnections deposited thereon utilizing a shadow mask in accordance with the present invention, [0022] Figure 7 is a diagrammatic representation of a contact lens comprising both optics and electronics, DETAILED DISC RIPTION OF THE PREFERRED EMBODIMENTS [0023] As briefly set fonh herein, masks, which create regions that are blocked and regions that are open to form a predetermined pattern, are useful devices in the processes utilized to form patters, for example, electrical interconnections, on non-planar or three diniensional surfaces or substrates, In many applications, the use of masks is of limited sophistication; namely, to block or expose large regions, and this is due mainly because of the quality of the masks. However, in accordance with the devices and methods of the present invention, precision masks may be fabricated which in turn may be utilized to form features such as interconnect features on highly complex, three-dimensional surfaces such as may be utilized in powered ophthalmic applications.
7 [0024] Tlhe first exemplary step in fabricating or creating a mask or shadow mask in accordance with the present invention Involves the manufacturing of a mandrel. A mandrel has a number of different definitions, including an object utilized to shape machined work, a tool that holds or otherwise secures materials to be machined, or a tool that may be utilized to secure other moving tools. As used hereinr and as is explained in detail subsequently, a mandrel is a base form upon which a shadow mask may be fabricated. More specifically, the mandrel is the component in or on which one or more shadow masks blanks may be formed. [0025] The exemplary mandrel comprises a substantially disc or cylindrical shaped structure with one or more shafts for attachment to a machine lathe or similar device on one planar face thereof; and a flat surface on the opposite planar face thereof It is important to note that other attachment mechanisms other than attachment stanls for a standard machine lathe may be utilized In accordance with the present invention, including attachment mechanisms operable to work with machines comprising vacuum chucks. The exact pattern of the three-dimensional surface or substrate to be masked is duplicated one or more times, via any suitable machining technique for creating intricate and or complex geometries, on. the flat surface of the mandrelt Essentially, once machined, the mandrel will comprise one or more patterns or forms representing the desired internal profile and features of the item to be masked. The patten of the three-dimensional surface to be masked may be machined into the flat surface of the mandrel utilizing any suitable techniques for machining intricate patterns, including the use of a Wthe, which explains the need for one or more shafts for attachment asi s explained in detail herein. [00261 Although the exemplary mandrel comprises a substantially disc or cylindrical shaped structure, it is important to note that it may comprise any suitable shape as long as a form may he machined therein. For example, a non-round structure may be utilized. [00271 The size of the mandrel, the size of an individual shadow mask blank, and the desired number of shadow mask blanks to be fabricated on a single mandrel determines how many forms or form wells are machined into the flat surface of the mandrel, If only one form per mandrel is desired or required, the mandrel preferably comprises a cylindrical 8 shaped structure rather than a disc like structure with a single attachment shaft centered on the opposite face of the mandrel. If; however, multiple forms or form wells are desired or required on a single mandrel, the mandrel preferably requires a disc shaped structure with a single attachment shaft positioned on the opposite face of the mandrel and centered behind each form or form well. For example, if thirteen (13) forms are machined into the mnandrel, then thirteen (13) attachment shafts are required, with, one centered directly behind each form. As set forth above, other attachment mechanisms may be utilized, for example, ones operable to work in conjunction with machines having vacuum chucks. This centering is required if the machining of the forms is to be done utilizing a rotating tool such as a lathe, With a rotating tool, in order Ior the form to be symmetric, the attachment shaft has to coincide with the center of the form. In addition to each frm having its own centered attachment shaft, the mandrel is preferably formed from a lightweight material so that no wobble is introduced when machining a forn away from the center of the mandrel, for example, near its perimeter, and strong enough to wi thstand the stresses, straiws and wear of repeated uses. In one exernp'ary embodiment, the mandrel may be fabricated from a lightweight, high strength-to-weight ratio and relatively inexpensive metallic material such as aluminum. In addition, because aluminum may be easily machined or in an altemate embodiment, chemically dissolved, a complex form may be produced with near exactness. [002-8] In the exemplary embodiment set forth above, the one or more forms may be fahricated utilizing any number of techniques for fabricating precision and/or intricate/detailed features. As set forth above, a lathe or other turning machine such as a tum-mill and a rotary transfer, may be equipped with natural or synthetic diamond tipped tools to fabricate the one or more forms in a process known as diamond point turning. Diamond point turning is a multi-stage process, wherein the initial stages of machining are cared out utilizing a series of Computer numerical control lathes. Each successive lathe in the series is more accurate than the last. In thc final step of the series, a diamond tipped tool is utilized to achieve sub-nanometer level surface finishes and sub-micrometer form accuracies, In an alternate exemplar embodiment, the one or more fms may be fabricated utilizing electro-discharge machining. Eletro- discharge machining is a manufacturing process wherein a predetermined shape is obtained utilizing electrical discharges to remove material, thereby creating the predetermined shape or form.
9 [0029] The next exemplary step in fabricating or creating a mask or shadow mask in accordance with the present invention involves the fabrication of one or more shadow mask blanks in the one or more forms or fbnn wells in the mandrel. Shadow mask blanks become the shadow masks after the desired pattern is cut into the shadow mask blank as is explained in detail subsequently. Since the one or more forms precisely match the three dimensional surface or substrate to be masked, the forms in the mandrel are the molds for the shadow mask blanks. in accordance with one exemplary embodiment of the present invention, a shadow mask blank may be fabricated in each form in the mandrel by an electroplating or electroforming process. Electroforming is a metal forming process wherein thin parts are fabricated utilizing an electroplating process. Electroforming is utilized when the part to be fbricated has extreme tolerances or complexity. Electroplating is a process in which metal ions in a solution are moved by an electric tield to coat or plate a metal skin onto a base form which is then removed from the form after the plating is complete. Because of the nature of the process, high fidelity structures may be produced with this technique. In other words, electrofonning reproduces the form exactly without any shrinkage or distortion. Any number of metallic materials may be utilized to fabricate the shadow mask blank. In an exemplary embodiment, the shadow mask blank is fabricated from nickel with a total thickness of between about fifty (50) microns to about one hundred-fifty (150) microns. It is important to note that the thickness of the shadow mask blank may vary depending on the application and thus the process to form the shadow mask blank may change from electroforming to another suitable process. [0030] The next and final exemplary step in fabricating or creating a mask or shadow mask in accordance with the present invention involves the removal of the plate of the one or more shadow mask blanks from the mandrel and forming the pattens therein to create the shadow mask. 'The plate may be removed from the mandrel in a number of ways, including the chemical removal of the mandrel or physical separation of the two components. In accordance with one exemplary embodiment of chemical removal of the mandrel, the mandrel itself may be dissolved with a chemical that only reacts with the mandrel and not the plate, In the exemplary embodiment, the shadow mask blanks are physically separated from the mandrel manually or via robotic manipulators and placed in a fixture fbr further processing, including creating the shadow masks by foning the desired pattern therein. To facilitate physical separation, the mandrel may be shaken, 10 vibrated, tapped or otherwise agitated to create physical separation. The desired patten corresponds to the particular application, for example, electrical interconnects. The patten may be formed in any suitable manner utilizing any suitable means, including laser machining, laser ablation, plasma etching, and/or chemical etching. In an exemplary embodiment, the pattern is formed in the shadow mask blank by laser micromachining. Accordingly, once the shadow mask blanks are removed from the mandrel, they are placed on a holding fixture that is compatible with the laser machining system, The precision of currently available laser systems makes the micromachining of extremely intricate patterns possible. For example, feature pattern widths of as small as one (1) micron may be achieved. [003 1] Once the one or more shadow masks are complete, they are transferred from the laser micromachining fixture to a fixture or arrangement for mounting or temporarily securing them to the surface or substrate that is to be masked to create a final product. For example, if the final product is to be utilized as the substrate for electrical interconnects on an insert for a powered contact lens, then the shadow mask may be secured to the front optic by a specialized fixture that would allow for the intemonnect material to be deposited onto the substrate through the openings in the shadow mask, Any suitable deposition process may be utilized that is compatible with the substrate, [0032] Referring to Figures IA, 1B and 1C, there is illustrated an exemplary mandrel 100 having a single form or form well 102 machined into one planar face 1(04 thereof (FIg 1A), the exemplary mandrel 100 with a shadow mask blank plate 106 including a single shadow mask blank 108 formed thereon (Figure 1B), and the shadow mask blank plate 106 separated ftom the mandrel 100 (Figure IC). The shadow mask blank 108 may be, as set forth above, removed foi the shadow mask blank plate 106 to form the shadow mask as is described in detail subsequently, The process utilized to fabricate the mask from the mask blank, for example, laser machining, may be utilized to remove the mask blank or mask form the shallow mask blank plate 106. In this exemplary embodiment, the mandrel 100 has a substantially cylindrical shape as only a single form 102 is machined therein. An attachment shaft 110 for securing the rmandrel 100 to a lathe is illustrated in phantom, As set forth above, if another process, for example, electro discharge machining, is utilized to machine the form 102, no attachment shaft is required.
II In the illustrated exemplary embodiment, the form 102 comprises a number of layers and faces that match the three-dimensional substrate upon which the mask is to be utilized. It is important to note that Figures IA, 1 B and IC are for illustrative purposes and do not necessarily show the level of detail of an actual form. The mandrel 100 preferably comprises aluminum and the shadow mask blank 108 preferably comprises nickel. The shadow mask. blank 108 and the shadow mask itself may be fabricated utilizing any suitable processes, including those described herein, [0033] As set forth above, the mandrel may comprise any number of configurations, including a substantially disc shaped structure for foring muliple shadow mask blanks on a single shadow mask plate. Figures 2A, 2B and 2C illustrate an exemplary disc shaped mandrel 200 having multiple forms or form wells 202 machined into one planar face 204 thereof (Figure 2A), the exemplary disc shaped mandrel 200 with a shadow mask blank plate 206 including multiple shadow mask blanks 208 formed thereon (Figure 2B), and the shadow mask blank plate 206 separated from the mandrel 200 (Figure 2C7) The muhiple shadow mask blanks 208, which as illustrated is a high-density shadow mask blank, may be removed from the shadow mask blank plate 206 to fonn the shadow masks utilizing the same process as is utilized to fabricate the masks from the banks, for example, laser machining. In this exemplary embodiment, the mandrel 200 has a substantially disc shape to accommodate the multiple forms 202 machined therein. The size of the fims 202, the number of forms 202 and the size of the mandrel 200 are all related to or dependent on one another. The multiple forms 202 may be arranged in any suitable configuration. The configuration may be modified for a number of reasons or to accommodate a number of design parameters. For example, the configuration may be modified to increase the density, hn other words, the configuration may be modified to increase the number of designs on a mandrel. The configuration may also be modified to increase repeatability in the process, In other words, the configuration may be modified to increase the ease of removing the shadow mask blank from the mandrel. An attachment shaft 210 for securing the mandrel 200 to a lathe, illustrated in phantom, is centered behind each of the forms 202 on the opposite planar face, As set forth above, if another process, for example, electro-discharge machining, is utilized to machine the multiple forns 202, no attachment shafts are required. In the illustrated exemplary embodiment, the forns 202 each comprise identical patterns of layers and faces that match the three-dimensional 12 substrate in which the masks are to be utilized; however, difIerent forms may be utilized on a single mandreL Once again, the mandrel 200 preferably comprises aluminum and the multiple shadow mask blanks 208 preferably comprise nickel. The shadow mask blanks 208 and the shadow masks themselves may be fabricated utilizing any suitable process, including those described herein. Once again, it is important to note that Figures 2A, 2 and 2C are for illustrative purposes and do not necessarily reflect the level of detail in an actual form, [00341 In accordance with an alternate exemplary embodiment, certain features from both of the above described exemplary embodiments may be combined into a single new design. Figures 3A, 3B, 3(C and 3D illustnte this alternate exemplary mandrel assembly design. Figure 3A illustrates a substantially disc shaped structure 300 comprising a plurality of throughhole openings 302 therein, This substantially disc shaped structure 300 may be fabricated from any number of materials, including aluminum, as described above, The through-hole openings 302 are sized to accept single mandrel structures 304 with a single form or form well 306 therein. The single mandrel structure 304 may be identical to those illustrated, in Figures IA and 1B, Essentially. the combination of the substantially disc shaped structure 300 and the single mandrel structure 304 form a mandrel assembly 308. The single mandrel structure 304 and the substantially disc shaped structure 300 may comprise any suitable means for removably attaching to one another, for example, via threads. By having the elements interconnected in this manner, various forms 306 may be incorporated into a single mandrel assembly 308. In other words, on a single assembly, different forms may be utilized to create different mask blanks, Figure 3C illustrates the mandrel assembly 308 with a shadow mask blank plate 310 and associated shadow mask blanks 312, and Figure 3D illustrates the shadow mask blank plate 310 separated from the mandrel assembly 308. As set forth above, it is important to note that Figures 3A, 3B and 3C are for illustrative purposes and do not necessarily reflect the level of detail in an actual forn. [0035] Although no shafl is illustrated in phantom in the mandrel of Figures 313 and 3C, some attachment means is preferably utilized to fabricate the mandrel. For example, a single shaft for attachment to a lathe or a vacuum chuck may be utilized.
13 [0036] The shadow mask of the present invention may be utilized on any number of substrates, including three-dimensional substrates. Figure 4 illustrates on such exemplary substrate 400. The substrate 400 may, as set forth above, be a component of an ophthalmic device or system, for example, a variable-optic electronic ophthalmic lens. Figure 4 illustrates a number of attributes of the three-dimensional aspect of the substrate 400 by depicting a cross-sectional cut across a portion of the substrate 400. The substrate 400 comprises an outer portion or edge 402, a central portion or central zone 404, and intermediate features 406 and 408, As shown, each of these intermediate features 406 and 408 has its own localized three-dimensional topology. In exemplary embodiments wherein the substrate 400 may be utilized in an ophthalmic lens, the difference in height fiom the edge zone 402 to the central zone 404 may be up to four (4) millimeters, and the intermediate features 406 and 408 may have localized height differences that vary between 0.001 to 0,5 millimeters with the slopes of the sidewalls thereof varying from about two (2) to about ninety (90) degrees, While a description of the exemplary embodiment which focuses on a substrate 400 for an ophthalmic device may be useful in describing the mask and method of making the mask in accordance with the present invention, it should be readily apparent to one of ordinary skill in the art that essentially any three-dimensional substrate is consistent with the shadow masks and methods for forming shadow masks as described herein. Of particular note; however, is the extremely detailed nature of a substrate for an ophthalmic device and thus the need for a mask and process for making a mask with such extreme tolerances. [0037] Any shadow mask fabricated in accordance with the present invention for this substrate 400 preferably conforms to the precise shape of the substrate 400. In other words, a shadow mask prepared in accordance with the present invention should preferably precisely conform to the shape of the substrate and be positioned as close, surface to surface, to the substrate as possible. Referring to Figure 5, there is illustrated an exemplary shadow mask 500 positioned on the substrate 400. The shadow mask 500 conforms to ite shape of the particular substrate 400 and comprises cutouts 502 wherever the deposition of material onto the substrate 400 is required. The shadow mask 500 may be utilized in conjunction with any number of deposition techniques as set forth herein. If, as described above, the substrate 400 is a component of an ophthalmic device, then the shadow mask 500 may be utilized to form conductive traces/interconnects on the substrate 400. The 14 cutouts 502 in the shadow mask 500 should preferably correspond to the desired pattern for the conductive traces/interconnects. [0038] Once the shadow mask 500 with its associated cutouts 502 is positioned and aligned upon its matching three-dimensional substrate 400, the shadow masking process is complete and any suitable techniques for thin film fonnation may be utilized, including sputter deposition of a gold filn. Although a gold film is set forth in this exemplary description, it should be noted that numerous films which are consistent with masked deposition may be utilized, including metallic films, dielectric films, high-k dielectric films, conductive and non-conductive films. [0039] After the deposition process has been performed to deposit an appropriate thickness of gold filn onto the substrate 400 in regions corresponding to the cutouts 502 as well as on the shadow mask 500 itself, a resulting substrate 400 with directly formed conductive tracesinterconnections 600 is forned, as illustrated in Figure 6. The shadow mask 500 has directly shadowed the three-dimensional substrate 400 in regions where conductive traces/interconnections are not required. In the regions corresponding to the cutouts 502, however, conductive traces/interconnect features 600 are forced upon the surface of the substrate 400. [0040] After the conductive traces/interconnect features 600 have been defined in the manner described, in some exemplary embodiments laser ablation processing may again be used. If the conductive traces/interconnect features 600 defined by a shadow mask 500 are not of a precision that may be obtained with laser ablation, the defined conductive traces/interconnect features 600 may be "trimmed" or further defined through the use of laser ablation. In some exemplary embodiments, such trimming may result in improvements in throughput, since features very close to the desired finished product may be frned by shadow masking and then changed in sinalI manners by laser ablation, [0041] While the masks and methods for making masks in accordance with the present invention may be utilized on any substrate, exemplary embodiments have been described with reference to a substrate which may be a component of an ophthalmic device or system, One such ophthalmic device or system is a powered or electronic contact lens.
15 Accordingly, for completeness, a brief description of an exemplary powered or electronic contact lens is set forth herein, [0042] An exemplary powered or electronic contact lens comprises the necessary elements to correct and/or enhance the vision of patients with one or more vision defects or otherwise perform a useful ophthahnic function, In addition, they may be utilized simply to enhance normal vision or provide a wide variety of functionality. The electronic contact lens may comprise a variable focus optic les, an assembled fIont optic embedded into a contact lens or just simply embedding electronics without a lens for any suitable functionality. The exemplary electronic lens may be incorporated into any number of contact lenses; however, for ease of explanation, the disclosure will fbcus on an electronic contact lens to correct vision defects intended for single-use daily disposability. [0043] Referring now to Figure 7, there is illustrated a contact lens 700 that comprises both optical and electronic components such that electrical and mechanical interconnects are required. The contact lens 700 comprises an optic zone 702 which may or may not be functional to provide vision correction and/or enhancement, or alternately, it may simply serve as a substrate for the embedded electronics for any suitable functionality. In the illustrated exemplary embodiment, the polymer/plastic forming the optic zone 702 is extended such that it forms a substrate 704 upon which the electronics are attached. Electronic components such as semiconductor die 706 and batteries 708 connect both mechanically and electrically to the substrate 704, Conductive traces 712 electrically interconnect the electronic components 706 and 708 on the substrate 704, In the exemplary embodiment illustrated, conductive trace 71 2a connects semiconductor die 706 to the front optic electrode 714, and conductive trace 712b connects semiconductor die 706 to the back optical electrode 716. An adhesive layer 718 may be utilized to connect the front and back optics; however, any other suitable means for joining the two layers may be utilized or the design may only utilize a single layer. [0044] The conductive traces 712 described above are preferably fabricated utilizing the mask and masking techniques described herein The conductive traces 712 correspond to the openings in the shadow mask, In order to have precision conductive traces 7 1 2, the mask must have precision cutouts as well as conespond to the three- 16 dimensional surface or substrate. in other words, the mask preferably mirrors the substrate or surface and the cutouts precisely match the features such that additional processing steps are not required. In other words, with a mask fabricated in accordance with the present invention, no further processing should be required to "clean-up" the deposited feature pattern, For example, if a prior art mas. were utilized, a laser ablation process may be required to clean up the lines of the deposited feature patten (conductive interconnect traces), whereas with the present invention, the precise nature of the mask allows cleaner and more precise lines. [0045] Although shown and described is what is believed to be the most practical and preferred embodiments, it is apparent that departures from specific designs and methods described and shown will suggest themselves to those skilled in the art and may be used without departing from the spirit and scope of the invention. The present invention is not restricted to the particular constructions described and illustrated, but should be constructed to cohere with all modifications that may fall within the scope of the appended claims. [0046] Throughout this specification and the claims which follow, unless the context requires otherwise, the word "comprise", and variations such as "comprises" and "comprising", will be understood to imply the inclusion of a stated integer or step or group of integers or steps but not the exclusion of any other integer or step or group of integers or steps, [0047] The reference to any prior art in this specification is not and should not be taken as an acknowledgement or any form of suggestion that the prior art forms part of the common general knowledge in Australia. [0048] This Application is a divisional of the present Applicant's Australian Patent Application No. 2013204341, and the whole contents thereof are included herein by reference.

Claims (3)

1. A shadow mask blank forming mandrel for forming shadow mask blanks, the mandrel including: a substantially cylindrical structure comprising a first face and a second face, the first and second faces being substantially parallel; one or more attachment mechanisms cooperatively associated with the first face of the substantially cylindrical structure, the one or more attachment mechanisms being configured to secure the mandrel to a machining tool; and one or more forms machined into the second face of the substantially cylindrical structure, the one or more forms having a non-planar pattern for matching a non-planar substrate to be masked.
2. A mandrel for forming shadow mask blanks according to Claim 1, wherein the mandrel comprises a metallic material.
3. A mandrel for forming shadow mask blanks according to Claim 2, wherein the metallic material comprises aluminum.
AU2014208316A 2012-04-25 2014-08-05 High-density mask for three-dimensional substrates and methods for making the same Ceased AU2014208316B2 (en)

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US13/455,209 2012-04-25
AU2013204341A AU2013204341B2 (en) 2012-04-25 2013-04-12 High-density mask for three-dimensional substrates and methods for making the same
AU2014208316A AU2014208316B2 (en) 2012-04-25 2014-08-05 High-density mask for three-dimensional substrates and methods for making the same

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EP2319672A1 (en) * 2009-11-05 2011-05-11 FUJIFILM Corporation Lens array press mold and lens array molded by the same

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Publication number Priority date Publication date Assignee Title
EP2319672A1 (en) * 2009-11-05 2011-05-11 FUJIFILM Corporation Lens array press mold and lens array molded by the same

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