AU2003304247A1 - Pulsed ion beam control of solid state features - Google Patents

Pulsed ion beam control of solid state features

Info

Publication number
AU2003304247A1
AU2003304247A1 AU2003304247A AU2003304247A AU2003304247A1 AU 2003304247 A1 AU2003304247 A1 AU 2003304247A1 AU 2003304247 A AU2003304247 A AU 2003304247A AU 2003304247 A AU2003304247 A AU 2003304247A AU 2003304247 A1 AU2003304247 A1 AU 2003304247A1
Authority
AU
Australia
Prior art keywords
solid state
ion beam
beam control
pulsed ion
state features
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003304247A
Inventor
Jene A. Golovchenko
Jiali Li
Derek M. Stein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harvard College
Original Assignee
Harvard College
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harvard College filed Critical Harvard College
Publication of AU2003304247A1 publication Critical patent/AU2003304247A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/487Physical analysis of biological material of liquid biological material
    • G01N33/48707Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721Investigating individual macromolecules, e.g. by translocation through nanopores
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00626Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00Subject matter not provided for in other groups of this subclass
    • B81C99/0035Testing
    • B81C99/004Testing during manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • Chemical & Material Sciences (AREA)
  • Geometry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Hematology (AREA)
  • Medicinal Chemistry (AREA)
  • Biophysics (AREA)
  • Nanotechnology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Physical Vapour Deposition (AREA)
  • Micromachines (AREA)
AU2003304247A 2002-10-29 2003-10-28 Pulsed ion beam control of solid state features Abandoned AU2003304247A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US42190802P 2002-10-29 2002-10-29
US60/421,908 2002-10-29
PCT/US2003/034192 WO2005000732A1 (en) 2002-10-29 2003-10-28 Pulsed ion beam control of solid state features

Publications (1)

Publication Number Publication Date
AU2003304247A1 true AU2003304247A1 (en) 2005-01-13

Family

ID=33551199

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003304247A Abandoned AU2003304247A1 (en) 2002-10-29 2003-10-28 Pulsed ion beam control of solid state features

Country Status (4)

Country Link
EP (1) EP1560786A1 (en)
JP (1) JP2006509645A (en)
AU (1) AU2003304247A1 (en)
WO (1) WO2005000732A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LT5698B (en) 2008-12-30 2010-11-25 Kauno technologijos universitetas A control system of human functionality
US9127313B2 (en) 2009-12-01 2015-09-08 Oxford Nanopore Technologies Limited Biochemical analysis instrument
WO2012042226A2 (en) 2010-10-01 2012-04-05 Oxford Nanopore Technologies Limited Biochemical analysis apparatus and rotary valve

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1192453B1 (en) * 1999-06-22 2012-02-15 President and Fellows of Harvard College Molecular and atomic scale evaluation of biopolymers

Also Published As

Publication number Publication date
JP2006509645A (en) 2006-03-23
WO2005000732A1 (en) 2005-01-06
EP1560786A1 (en) 2005-08-10

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase