AU2003297337A1 - Methods for fabrication of localized membranes on single crystal substrate surfaces - Google Patents

Methods for fabrication of localized membranes on single crystal substrate surfaces

Info

Publication number
AU2003297337A1
AU2003297337A1 AU2003297337A AU2003297337A AU2003297337A1 AU 2003297337 A1 AU2003297337 A1 AU 2003297337A1 AU 2003297337 A AU2003297337 A AU 2003297337A AU 2003297337 A AU2003297337 A AU 2003297337A AU 2003297337 A1 AU2003297337 A1 AU 2003297337A1
Authority
AU
Australia
Prior art keywords
localized
membranes
fabrication
methods
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003297337A
Other versions
AU2003297337A8 (en
Inventor
Tomoyuki Izuhara
Richard M. Osgood Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Columbia University in the City of New York
Original Assignee
Columbia University in the City of New York
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Columbia University in the City of New York filed Critical Columbia University in the City of New York
Publication of AU2003297337A8 publication Critical patent/AU2003297337A8/en
Publication of AU2003297337A1 publication Critical patent/AU2003297337A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/00468—Releasing structures
    • B81C1/00476—Releasing structures removing a sacrificial layer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0161—Controlling physical properties of the material
    • B81C2201/0163—Controlling internal stress of deposited layers
    • B81C2201/0166—Controlling internal stress of deposited layers by ion implantation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/1204—Lithium niobate (LiNbO3)

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Integrated Circuits (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
AU2003297337A 2003-12-17 2003-12-17 Methods for fabrication of localized membranes on single crystal substrate surfaces Abandoned AU2003297337A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2003/040392 WO2005067412A2 (en) 2003-12-17 2003-12-17 Methods for fabrication of localized membranes on single crystal substrate surfaces

Publications (2)

Publication Number Publication Date
AU2003297337A8 AU2003297337A8 (en) 2005-08-03
AU2003297337A1 true AU2003297337A1 (en) 2005-08-03

Family

ID=34793578

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003297337A Abandoned AU2003297337A1 (en) 2003-12-17 2003-12-17 Methods for fabrication of localized membranes on single crystal substrate surfaces

Country Status (2)

Country Link
AU (1) AU2003297337A1 (en)
WO (1) WO2005067412A2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6540827B1 (en) * 1998-02-17 2003-04-01 Trustees Of Columbia University In The City Of New York Slicing of single-crystal films using ion implantation
FR2818755B1 (en) * 2000-12-26 2004-06-11 Ion Beam Services OPTICALLY ACTIVE DEVICE HAVING A CHANNEL ON AN OPTICAL SUBSTRATE
US6544431B2 (en) * 2001-01-16 2003-04-08 Triquint Technology Holding Co. Thin film lithium niobate structure and method of making the same

Also Published As

Publication number Publication date
WO2005067412A3 (en) 2006-09-14
WO2005067412A2 (en) 2005-07-28
AU2003297337A8 (en) 2005-08-03

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase