AU2003288487A1 - A sample enclosure for a scanning electron microscope and methods of use thereof - Google Patents

A sample enclosure for a scanning electron microscope and methods of use thereof

Info

Publication number: AU2003288487A1
Authority: AU; Australia
Prior art keywords: methods; electron microscope; scanning electron; sample enclosure; enclosure
Prior art date: 2003-02-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003288487A

Inventor

Opher Gileadi

Amotz Nechushtan

David Sprinzak

Ory Zik

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Quantomix Ltd

Original Assignee

Quantomix Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-02-20

Filing date

2003-12-10

Publication date

2004-09-09

2003-06-01 Priority claimed from PCT/IL2003/000454 external-priority patent/WO2003104846A2/en

2003-12-10 Application filed by Quantomix Ltd filed Critical Quantomix Ltd

2004-09-09 Publication of AU2003288487A1 publication Critical patent/AU2003288487A1/en

Status Abandoned legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Sampling And Sample Adjustment (AREA)

AU2003288487A 2003-02-20 2003-12-10 A sample enclosure for a scanning electron microscope and methods of use thereof Abandoned AU2003288487A1 (en)

Applications Claiming Priority (7)

Application Number	Priority Date	Filing Date	Title
US44880803P	2003-02-20	2003-02-20
US60/448,808		2003-02-20
PCT/IL2003/000454 WO2003104846A2 (en)	2002-06-05	2003-06-01	A sample enclosure for a scanning electron microscope and methods of use thereof
AU2003228092		2003-06-01
PCT/IL2003/000457 WO2003104848A2 (en)	2002-06-05	2003-06-01	Methods for sem inspection of fluid containing samples
AU2003231893		2003-06-01
PCT/IL2003/001054 WO2004075209A1 (en)	2003-02-20	2003-12-10	A sample enclosure for a scanning electron microscope and methods of use thereof

Publications (1)

Publication Number	Publication Date
AU2003288487A1 true AU2003288487A1 (en)	2004-09-09

Family

ID=32912689

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003288487A Abandoned AU2003288487A1 (en)	2003-02-20	2003-12-10	A sample enclosure for a scanning electron microscope and methods of use thereof

Country Status (3)

Country	Link
EP (1)	EP1595265A1 (en)
AU (1)	AU2003288487A1 (en)
WO (1)	WO2004075209A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
AU2003228092A1 (en)	2002-06-05	2003-12-22	Quantomix Ltd.	Methods for sem inspection of fluid containing samples
IL150056A0 (en)	2002-06-05	2002-12-01	Yeda Res & Dev	Low-pressure chamber for scanning electron microscopy in a wet environment
EP2565900B1 (en)	2007-11-13	2016-02-03	Carl Zeiss Microscopy Limited	Beam device and system comprising a particle beam device and an optical microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3858049A (en) *	1973-09-17	1974-12-31	Etec Corp	Method and apparatus for sem specimen coating and transfer
US4705949A (en) *	1985-11-25	1987-11-10	The United States Of America As Represented By The Secretary Of Commerce	Method and apparatus relating to specimen cells for scanning electron microscopes

2003
- 2003-12-10 AU AU2003288487A patent/AU2003288487A1/en not_active Abandoned
- 2003-12-10 WO PCT/IL2003/001054 patent/WO2004075209A1/en not_active Application Discontinuation
- 2003-12-10 EP EP03780562A patent/EP1595265A1/en not_active Withdrawn

Also Published As

Publication number	Publication date
WO2004075209A1 (en)	2004-09-02
EP1595265A1 (en)	2005-11-16

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Legal Events

Date	Code	Title	Description
2005-11-03	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase