AU2003287493A1 - Method and apparatus for measuring characteristics of materials with improved accuracy - Google Patents

Method and apparatus for measuring characteristics of materials with improved accuracy

Info

Publication number: AU2003287493A1
Authority: AU; Australia
Prior art keywords: materials; improved accuracy; measuring characteristics; measuring; accuracy
Prior art date: 2003-02-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003287493A

Inventor

Boris Kesil

Leonid Velikov

Yuri Vorobyev

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Multimetrixs LLC

Original Assignee

Multimetrixs LLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-02-07

Filing date

2003-11-03

Publication date

2004-09-06

2003-02-07 Priority claimed from US10/359,378 external-priority patent/US6815958B2/en

2003-03-13 Priority claimed from US10/386,648 external-priority patent/US6989675B2/en

2003-11-03 Application filed by Multimetrixs LLC filed Critical Multimetrixs LLC

2004-09-06 Publication of AU2003287493A1 publication Critical patent/AU2003287493A1/en

Status Abandoned legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

AU2003287493A 2003-02-07 2003-11-03 Method and apparatus for measuring characteristics of materials with improved accuracy Abandoned AU2003287493A1 (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US10/359,378		2003-02-07
US10/359,378 US6815958B2 (en)	2003-02-07	2003-02-07	Method and apparatus for measuring thickness of thin films with improved accuracy
US10/386,648		2003-03-13
US10/386,648 US6989675B2 (en)	2003-03-13	2003-03-13	Method and apparatus for precision measurement of film thickness
PCT/US2003/035019 WO2004072664A1 (en)	2003-02-07	2003-11-03	Method and apparatus for measuring characteristics of materials with improved accuracy

Publications (1)

Publication Number	Publication Date
AU2003287493A1 true AU2003287493A1 (en)	2004-09-06

Family

ID=32871601

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003287493A Abandoned AU2003287493A1 (en)	2003-02-07	2003-11-03	Method and apparatus for measuring characteristics of materials with improved accuracy

Country Status (2)

Country	Link
AU (1)	AU2003287493A1 (en)
WO (1)	WO2004072664A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4182986A (en) *	1976-10-21	1980-01-08	Parker Edward I	Test, control and gauging method using locked oscillators
US4547745A (en) *	1983-02-28	1985-10-15	Westinghouse Electric Corp.	Composite amplifier with divider/combiner
US4648087A (en) *	1984-06-28	1987-03-03	International Business Machines Corporation	Capacitive sensing employing thin film inductors
US5188426A (en) *	1989-08-30	1993-02-23	Stolar, Inc.	Method for controlling the thickness of a layer of material in a seam
US5367376A (en) *	1992-08-20	1994-11-22	The United States Of America As Represented By The Secretary Of The Navy	Planar and linear fiber optic acoustic sensors embedded in an elastomer material
US5793206A (en) *	1995-08-25	1998-08-11	Jentek Sensors, Inc.	Meandering winding test circuit
US6593738B2 (en) *	2001-09-17	2003-07-15	Boris Kesil	Method and apparatus for measuring thickness of conductive films with the use of inductive and capacitive sensors

2003
- 2003-11-03 WO PCT/US2003/035019 patent/WO2004072664A1/en not_active Application Discontinuation
- 2003-11-03 AU AU2003287493A patent/AU2003287493A1/en not_active Abandoned

Also Published As

Publication number	Publication date
WO2004072664A1 (en)	2004-08-26

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Legal Events

Date	Code	Title	Description
2005-10-27	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase