AU2003275748A1 - Interferometer (variants) - Google Patents

Interferometer (variants)

Info

Publication number
AU2003275748A1
AU2003275748A1 AU2003275748A AU2003275748A AU2003275748A1 AU 2003275748 A1 AU2003275748 A1 AU 2003275748A1 AU 2003275748 A AU2003275748 A AU 2003275748A AU 2003275748 A AU2003275748 A AU 2003275748A AU 2003275748 A1 AU2003275748 A1 AU 2003275748A1
Authority
AU
Australia
Prior art keywords
interferometer
variants
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003275748A
Inventor
Aleksey Vitalevich Atnashev
Pavel Vitalevich Atnashev
Vitaliy Borisovich Atnashev
Alexey Sergeevich Boyarchenkov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2003275748A1 publication Critical patent/AU2003275748A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AU2003275748A 2002-10-08 2003-10-06 Interferometer (variants) Abandoned AU2003275748A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
RU2002126962/28A RU2209406C1 (en) 2002-10-08 2002-10-08 Interferometer ( variants )
RU2002126962 2002-10-08
PCT/RU2003/000432 WO2004033988A1 (en) 2002-10-08 2003-10-06 Interferometer (variants)

Publications (1)

Publication Number Publication Date
AU2003275748A1 true AU2003275748A1 (en) 2004-05-04

Family

ID=29212301

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003275748A Abandoned AU2003275748A1 (en) 2002-10-08 2003-10-06 Interferometer (variants)

Country Status (3)

Country Link
AU (1) AU2003275748A1 (en)
RU (1) RU2209406C1 (en)
WO (1) WO2004033988A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7623218B2 (en) 2004-11-24 2009-11-24 Carl Zeiss Smt Ag Method of manufacturing a miniaturized device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1122931A1 (en) * 1983-01-13 1984-11-07 Ленинградский Ордена Октябрьской Революции И Ордена Трудового Красного Знамени Технологический Институт Им.Ленсовета Tray for spectral investigation of solids in medium under checking
SU1124204A1 (en) * 1983-04-28 1984-11-15 Ворошиловградский Филиал Государственного Проектно-Конструкторского И Научно-Исследовательского Института По Автоматизации Угольной Промышленности Through-flow type tray for photometric measurements
US5394244A (en) * 1992-10-06 1995-02-28 Excel Precision Inc. Ambient air refracture index measuring device
RU2190187C1 (en) * 2001-05-21 2002-09-27 Тверской государственный технический университет Device for checking parameters of hole key way

Also Published As

Publication number Publication date
RU2209406C1 (en) 2003-07-27
WO2004033988A1 (en) 2004-04-22

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase