AU2003248599A1 - Method for forming a released microstructure suitable for a microelectromechanical device - Google Patents

Method for forming a released microstructure suitable for a microelectromechanical device

Info

Publication number: AU2003248599A1
Authority: AU; Australia
Prior art keywords: forming; microelectromechanical device; microstructure suitable; released microstructure; released
Prior art date: 2002-06-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003248599A

Inventor

Bee Lee Chua

Zhihong Li

C. Tien Norman

Xiaosong Tang

Eng Hock Francis Tay

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Agency for Science Technology and Research Singapore

Original Assignee

Institute of Materials Research and Engineering

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-06-10

Filing date

2003-06-10

Publication date

2003-12-22

2003-06-10 Application filed by Institute of Materials Research and Engineering filed Critical Institute of Materials Research and Engineering

2003-12-22 Publication of AU2003248599A1 publication Critical patent/AU2003248599A1/en

Status Abandoned legal-status Critical Current

Links

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
- B81C1/0092—For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
- B81C1/00936—Releasing the movable structure without liquid etchant
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0135—Controlling etch progression
- B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Microelectronics & Electronic Packaging (AREA)
Micromachines (AREA)
Pressure Sensors (AREA)

AU2003248599A 2002-06-10 2003-06-10 Method for forming a released microstructure suitable for a microelectromechanical device Abandoned AU2003248599A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
SG200203408-0		2002-06-10
SG200203408A SG108298A1 (en)	2002-06-10	2002-06-10	Method for forming a released microstructure suitable for a microelectromechanical device
PCT/SG2003/000141 WO2003104141A1 (en)	2002-06-10	2003-06-10	Method for forming a released microstructure suitable for a microelectromechanical device

Publications (1)

Publication Number	Publication Date
AU2003248599A1 true AU2003248599A1 (en)	2003-12-22

Family

ID=29729282

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003248599A Abandoned AU2003248599A1 (en)	2002-06-10	2003-06-10	Method for forming a released microstructure suitable for a microelectromechanical device

Country Status (3)

Country	Link
AU (1)	AU2003248599A1 (en)
SG (1)	SG108298A1 (en)
WO (1)	WO2003104141A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20050280879A1 (en) *	2004-02-09	2005-12-22	Gibson Gregory T	Method and apparatus for scanning a beam of light
JP4556454B2 (en) *	2004-03-15	2010-10-06	パナソニック電工株式会社	Manufacturing method of semiconductor device
CN113666331A (en) *	2021-08-23	2021-11-19	苏州司南传感科技有限公司	Thin silicon release process compatible with MEMS deep silicon etching process

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2002033649A1 (en) *	2000-10-06	2002-04-25	Ultratouch Corporation	A dynamic color imaging method and system
US6074890A (en) *	1998-01-08	2000-06-13	Rockwell Science Center, Llc	Method of fabricating suspended single crystal silicon micro electro mechanical system (MEMS) devices
US6544898B2 (en) *	2001-06-25	2003-04-08	Adc Telecommunications, Inc.	Method for improved die release of a semiconductor device from a wafer

2002
- 2002-06-10 SG SG200203408A patent/SG108298A1/en unknown
2003
- 2003-06-10 AU AU2003248599A patent/AU2003248599A1/en not_active Abandoned
- 2003-06-10 WO PCT/SG2003/000141 patent/WO2003104141A1/en not_active Application Discontinuation

Also Published As

Publication number	Publication date
WO2003104141A1 (en)	2003-12-18
SG108298A1 (en)	2005-01-28
WO2003104141A8 (en)	2004-04-29

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Legal Events

Date	Code	Title	Description
2005-04-07	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase