AU2003243332A1 - Fabrication of ductile intermetallic sputtering targets - Google Patents
Fabrication of ductile intermetallic sputtering targetsInfo
- Publication number
- AU2003243332A1 AU2003243332A1 AU2003243332A AU2003243332A AU2003243332A1 AU 2003243332 A1 AU2003243332 A1 AU 2003243332A1 AU 2003243332 A AU2003243332 A AU 2003243332A AU 2003243332 A AU2003243332 A AU 2003243332A AU 2003243332 A1 AU2003243332 A1 AU 2003243332A1
- Authority
- AU
- Australia
- Prior art keywords
- fabrication
- sputtering targets
- ductile intermetallic
- ductile
- intermetallic sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/16—Both compacting and sintering in successive or repeated steps
- B22F3/162—Machining, working after consolidation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/16—Both compacting and sintering in successive or repeated steps
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/047—Making non-ferrous alloys by powder metallurgy comprising intermetallic compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US38643302P | 2002-06-07 | 2002-06-07 | |
US60/386,433 | 2002-06-07 | ||
PCT/US2003/016827 WO2003104522A1 (en) | 2002-06-07 | 2003-05-29 | Fabrication of ductile intermetallic sputtering targets |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003243332A1 true AU2003243332A1 (en) | 2003-12-22 |
Family
ID=29736164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003243332A Abandoned AU2003243332A1 (en) | 2002-06-07 | 2003-05-29 | Fabrication of ductile intermetallic sputtering targets |
Country Status (7)
Country | Link |
---|---|
US (1) | US20040062675A1 (en) |
EP (1) | EP1511879A1 (en) |
JP (1) | JP2005529239A (en) |
CN (1) | CN1685078A (en) |
AU (1) | AU2003243332A1 (en) |
TW (1) | TWI278524B (en) |
WO (1) | WO2003104522A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070189916A1 (en) * | 2002-07-23 | 2007-08-16 | Heraeus Incorporated | Sputtering targets and methods for fabricating sputtering targets having multiple materials |
CN1777690B (en) * | 2003-03-28 | 2010-11-03 | Ppg工业俄亥俄公司 | Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal |
DE102005049328B4 (en) * | 2005-10-12 | 2007-07-26 | W.C. Heraeus Gmbh | Material mixture, sputtering target, process for its preparation and use of the material mixture |
WO2007062089A1 (en) * | 2005-11-22 | 2007-05-31 | Bodycote Imt, Inc. | Fabrication of ruthenium and ruthenium alloy sputtering targets with low oxygen content |
US20080170959A1 (en) * | 2007-01-11 | 2008-07-17 | Heraeus Incorporated | Full density Co-W magnetic sputter targets |
JP2010095770A (en) * | 2008-10-17 | 2010-04-30 | Hitachi Metals Ltd | Ti-Al-BASED ALLOY TARGET AND METHOD FOR PRODUCING THE SAME |
CN102343437B (en) * | 2011-11-11 | 2014-03-26 | 宁波江丰电子材料有限公司 | Method for manufacturing tungsten target material |
CN103014633B (en) * | 2012-12-12 | 2015-08-05 | 何霞文 | A kind of preparation technology of the metal works with composite ceramic film |
KR101414352B1 (en) | 2013-05-27 | 2014-07-02 | 한국생산기술연구원 | Metal coating for replacing brazing paste and method of joining metal thereby |
CN104419846B (en) * | 2013-09-11 | 2017-09-12 | 安泰科技股份有限公司 | Mallory sharton alloy target and preparation method thereof |
WO2016052371A1 (en) * | 2014-09-30 | 2016-04-07 | Jx金属株式会社 | Master alloy for sputtering target and method for manufacturing sputtering target |
CN111136265B (en) * | 2020-03-07 | 2022-02-18 | 北京安泰六九新材料科技有限公司 | Titanium-silicon alloy target and manufacturing method thereof |
CN111299613A (en) * | 2020-03-27 | 2020-06-19 | 宁波江丰电子材料股份有限公司 | Machining method of titanium-aluminum alloy target material, product and application thereof |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4135286A (en) * | 1977-12-22 | 1979-01-23 | United Technologies Corporation | Sputtering target fabrication method |
US4460541A (en) * | 1980-01-16 | 1984-07-17 | Reynolds Metals Company | Aluminum powder metallurgy |
US4500364A (en) * | 1982-04-23 | 1985-02-19 | Exxon Research & Engineering Co. | Method of forming a protective aluminum-silicon coating composition for metal substrates |
DE3573137D1 (en) * | 1984-10-03 | 1989-10-26 | Sumitomo Electric Industries | Material for a semiconductor device and process for its manufacture |
AT388752B (en) * | 1986-04-30 | 1989-08-25 | Plansee Metallwerk | METHOD FOR PRODUCING A TARGET FOR CATHODE SPRAYING |
JPS63274763A (en) * | 1987-04-30 | 1988-11-11 | Sumitomo Metal Mining Co Ltd | Alloy target for magneto-optical recording |
US5094288A (en) * | 1990-11-21 | 1992-03-10 | Silicon Casting, Inc. | Method of making an essentially void-free, cast silicon and aluminum product |
JPH0539566A (en) * | 1991-02-19 | 1993-02-19 | Mitsubishi Materials Corp | Sputtering target and its production |
JPH0625782A (en) * | 1991-04-12 | 1994-02-01 | Hitachi Ltd | High ductility aluminum sintered alloy and its manufacture as well as its application |
US5417827A (en) * | 1991-11-29 | 1995-05-23 | Ppg Industries, Inc. | Cathode targets of silicon and transition metal |
JPH05214523A (en) * | 1992-02-05 | 1993-08-24 | Toshiba Corp | Sputtering target and its manufacture |
US5342571A (en) * | 1992-02-19 | 1994-08-30 | Tosoh Smd, Inc. | Method for producing sputtering target for deposition of titanium, aluminum and nitrogen coatings, sputtering target made thereby, and method of sputtering with said targets |
US5427736A (en) * | 1994-04-05 | 1995-06-27 | General Electric Company | Method of making metal alloy foils |
US5836506A (en) * | 1995-04-21 | 1998-11-17 | Sony Corporation | Sputter target/backing plate assembly and method of making same |
US5863398A (en) * | 1996-10-11 | 1999-01-26 | Johnson Matthey Electonics, Inc. | Hot pressed and sintered sputtering target assemblies and method for making same |
US5766380A (en) * | 1996-11-05 | 1998-06-16 | Sony Corporation | Method for fabricating randomly oriented aluminum alloy sputtering targets with fine grains and fine precipitates |
US5963778A (en) * | 1997-02-13 | 1999-10-05 | Tosoh Smd, Inc. | Method for producing near net shape planar sputtering targets and an intermediate therefor |
EP1028824B1 (en) * | 1997-07-15 | 2002-10-09 | Tosoh Smd, Inc. | Refractory metal silicide alloy sputter targets, use and manufacture thereof |
JP2989169B2 (en) * | 1997-08-08 | 1999-12-13 | 日立金属株式会社 | Ni-Al intermetallic compound target, method for producing the same, and magnetic recording medium |
US6010583A (en) * | 1997-09-09 | 2000-01-04 | Sony Corporation | Method of making unreacted metal/aluminum sputter target |
US6581669B2 (en) * | 1998-03-10 | 2003-06-24 | W.C. Heraeus Gmbh & Co., Kg | Sputtering target for depositing silicon layers in their nitride or oxide form and a process for its preparation |
CA2265098A1 (en) * | 1998-03-12 | 1999-09-12 | Abdelouahab Ziani | Method for producing aluminum alloy powder compacts |
US6332906B1 (en) * | 1998-03-24 | 2001-12-25 | California Consolidated Technology, Inc. | Aluminum-silicon alloy formed from a metal powder |
US20020014406A1 (en) * | 1998-05-21 | 2002-02-07 | Hiroshi Takashima | Aluminum target material for sputtering and method for producing same |
US6183686B1 (en) * | 1998-08-04 | 2001-02-06 | Tosoh Smd, Inc. | Sputter target assembly having a metal-matrix-composite backing plate and methods of making same |
US6153313A (en) * | 1998-10-06 | 2000-11-28 | General Electric Company | Nickel aluminide coating and coating systems formed therewith |
ATE430636T1 (en) * | 1998-12-28 | 2009-05-15 | Ultraclad Corp | METHOD FOR PRODUCING A SILICON/ALUMINUM SPUTTER TARGET |
US6165413A (en) * | 1999-07-08 | 2000-12-26 | Praxair S.T. Technology, Inc. | Method of making high density sputtering targets |
US6042777A (en) * | 1999-08-03 | 2000-03-28 | Sony Corporation | Manufacturing of high density intermetallic sputter targets |
US6475263B1 (en) * | 2001-04-11 | 2002-11-05 | Crucible Materials Corp. | Silicon aluminum alloy of prealloyed powder and method of manufacture |
US6797137B2 (en) * | 2001-04-11 | 2004-09-28 | Heraeus, Inc. | Mechanically alloyed precious metal magnetic sputtering targets fabricated using rapidly solidfied alloy powders and elemental Pt metal |
DE10140589A1 (en) * | 2001-08-18 | 2003-02-27 | Heraeus Gmbh W C | Sputtering target made of a silicon alloy and method for producing a sputtering target |
JP2003089864A (en) * | 2001-09-18 | 2003-03-28 | Mitsui Mining & Smelting Co Ltd | Aluminum alloy thin film, wiring circuit having the same thin film, and target material depositing the thin film |
-
2003
- 2003-05-29 EP EP03757295A patent/EP1511879A1/en not_active Withdrawn
- 2003-05-29 AU AU2003243332A patent/AU2003243332A1/en not_active Abandoned
- 2003-05-29 CN CNA038132117A patent/CN1685078A/en active Pending
- 2003-05-29 JP JP2004511577A patent/JP2005529239A/en active Pending
- 2003-05-29 WO PCT/US2003/016827 patent/WO2003104522A1/en active Application Filing
- 2003-06-02 US US10/449,686 patent/US20040062675A1/en not_active Abandoned
- 2003-06-06 TW TW092115426A patent/TWI278524B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20040062675A1 (en) | 2004-04-01 |
TW200404908A (en) | 2004-04-01 |
CN1685078A (en) | 2005-10-19 |
EP1511879A1 (en) | 2005-03-09 |
TWI278524B (en) | 2007-04-11 |
JP2005529239A (en) | 2005-09-29 |
WO2003104522A1 (en) | 2003-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |