AU2003208624A1 - Scanning mirror with 2 degrees of freedom and manufacturing method thereof - Google Patents

Scanning mirror with 2 degrees of freedom and manufacturing method thereof

Info

Publication number
AU2003208624A1
AU2003208624A1 AU2003208624A AU2003208624A AU2003208624A1 AU 2003208624 A1 AU2003208624 A1 AU 2003208624A1 AU 2003208624 A AU2003208624 A AU 2003208624A AU 2003208624 A AU2003208624 A AU 2003208624A AU 2003208624 A1 AU2003208624 A1 AU 2003208624A1
Authority
AU
Australia
Prior art keywords
freedom
degrees
manufacturing
scanning mirror
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003208624A
Inventor
Si-Hong Ahn
Yong-Kweon Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intellimicrons Co Ltd
Original Assignee
Intellimicrons Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intellimicrons Co Ltd filed Critical Intellimicrons Co Ltd
Publication of AU2003208624A1 publication Critical patent/AU2003208624A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2003208624A 2003-02-19 2003-02-19 Scanning mirror with 2 degrees of freedom and manufacturing method thereof Abandoned AU2003208624A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2003/000341 WO2004074903A1 (en) 2003-02-19 2003-02-19 Scanning mirror with 2 degrees of freedom and manufacturing method thereof

Publications (1)

Publication Number Publication Date
AU2003208624A1 true AU2003208624A1 (en) 2004-09-09

Family

ID=32906461

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003208624A Abandoned AU2003208624A1 (en) 2003-02-19 2003-02-19 Scanning mirror with 2 degrees of freedom and manufacturing method thereof

Country Status (2)

Country Link
AU (1) AU2003208624A1 (en)
WO (1) WO2004074903A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005018955B4 (en) * 2005-04-23 2007-02-01 Forschungszentrum Karlsruhe Gmbh micropositioning
GB201312817D0 (en) * 2012-11-29 2013-08-28 Dann Engineering Ltd Scanning apparatus
JP6699032B2 (en) * 2015-09-14 2020-05-27 富士電機株式会社 Optical scanning device and endoscope
CN108519673B (en) * 2018-04-28 2020-05-19 重庆大学 Scanning micro-mirror of integrated differential angle sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100400223B1 (en) * 2001-05-12 2003-10-01 삼성전자주식회사 A micromirror actuator
JP3722021B2 (en) * 2001-07-18 2005-11-30 株式会社デンソー Light switch
KR100400231B1 (en) * 2001-11-26 2003-10-01 삼성전자주식회사 Two-axes drive actuator

Also Published As

Publication number Publication date
WO2004074903A1 (en) 2004-09-02

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase