AU2002368165A1 - Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism - Google Patents

Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

Info

Publication number
AU2002368165A1
AU2002368165A1 AU2002368165A AU2002368165A AU2002368165A1 AU 2002368165 A1 AU2002368165 A1 AU 2002368165A1 AU 2002368165 A AU2002368165 A AU 2002368165A AU 2002368165 A AU2002368165 A AU 2002368165A AU 2002368165 A1 AU2002368165 A1 AU 2002368165A1
Authority
AU
Australia
Prior art keywords
microfabricated
double
latch mechanism
throw relay
electrostatic latch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002368165A
Inventor
Peter D. Bogdanoff
Daniel J. Hyman
Mark K. Hyman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XCOM Wireless Inc
Original Assignee
XCOM Wireless Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XCOM Wireless Inc filed Critical XCOM Wireless Inc
Publication of AU2002368165A1 publication Critical patent/AU2002368165A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Thermally Actuated Switches (AREA)
AU2002368165A 2002-08-08 2002-08-08 Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism Abandoned AU2002368165A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/025109 WO2004015728A1 (en) 2002-08-08 2002-08-08 Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

Publications (1)

Publication Number Publication Date
AU2002368165A1 true AU2002368165A1 (en) 2004-02-25

Family

ID=31713788

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002368165A Abandoned AU2002368165A1 (en) 2002-08-08 2002-08-08 Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

Country Status (4)

Country Link
EP (1) EP1527465A1 (en)
JP (1) JP2005536013A (en)
AU (1) AU2002368165A1 (en)
WO (1) WO2004015728A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006289520A (en) * 2005-04-06 2006-10-26 Toshiba Corp Semiconductor device using mems technology
KR100787997B1 (en) 2006-04-06 2007-12-21 송건화 Method of making piezoelectric bimorph acatuator for clamping lead wire of semiconductor device
US8063456B2 (en) * 2006-09-12 2011-11-22 Alcatel Lucent Mechanical switch with a curved bilayer
US7473859B2 (en) * 2007-01-12 2009-01-06 General Electric Company Gating voltage control system and method for electrostatically actuating a micro-electromechanical device
JP5468242B2 (en) * 2008-11-21 2014-04-09 株式会社東芝 MEMS package and method for manufacturing MEMS package
US8375538B2 (en) * 2009-03-27 2013-02-19 Ngk Insulators, Ltd. Method for manufacturing piezoelectric actuator
US8576029B2 (en) * 2010-06-17 2013-11-05 General Electric Company MEMS switching array having a substrate arranged to conduct switching current
DE102014202763B4 (en) * 2014-02-14 2016-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micro-electro-mechanical system and method of making same
US9437911B1 (en) * 2015-05-21 2016-09-06 Harris Corporation Compliant high speed interconnects
KR102628886B1 (en) 2015-11-16 2024-01-25 코르보 유에스, 인크. Improved contact in RF switches
DE102019211460A1 (en) * 2019-07-31 2021-02-04 Siemens Aktiengesellschaft Arrangement of MEMS switches
US11615924B2 (en) * 2020-10-25 2023-03-28 AAC Technologies Pte. Ltd. MEMS switch
EP4002407A1 (en) * 2020-11-24 2022-05-25 Siemens Aktiengesellschaft Microelectromechanical switching element, device and manufacturing method
FR3144611A1 (en) * 2023-01-02 2024-07-05 Airmems Voltage Shielded MEMS Switch and Voltage Shielded MEMS Switch Array

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5828138A (en) * 1996-12-02 1998-10-27 Trw Inc. Acceleration switch
US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
EP0968530A4 (en) * 1997-02-04 2001-04-25 California Inst Of Techn Micro-electromechanical relays
AUPO821697A0 (en) * 1997-07-25 1997-08-14 Alcatel Alsthom Compagnie Generale D'electricite Miniature connector array
US6483056B2 (en) * 2000-10-27 2002-11-19 Daniel J Hyman Microfabricated relay with multimorph actuator and electrostatic latch mechanism
US6504118B2 (en) * 2000-10-27 2003-01-07 Daniel J Hyman Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

Also Published As

Publication number Publication date
EP1527465A1 (en) 2005-05-04
JP2005536013A (en) 2005-11-24
WO2004015728A1 (en) 2004-02-19

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase