AU2002368165A1 - Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism - Google Patents
Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanismInfo
- Publication number
- AU2002368165A1 AU2002368165A1 AU2002368165A AU2002368165A AU2002368165A1 AU 2002368165 A1 AU2002368165 A1 AU 2002368165A1 AU 2002368165 A AU2002368165 A AU 2002368165A AU 2002368165 A AU2002368165 A AU 2002368165A AU 2002368165 A1 AU2002368165 A1 AU 2002368165A1
- Authority
- AU
- Australia
- Prior art keywords
- microfabricated
- double
- latch mechanism
- throw relay
- electrostatic latch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
- H01H2057/006—Micromechanical piezoelectric relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Thermally Actuated Switches (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2002/025109 WO2004015728A1 (en) | 2002-08-08 | 2002-08-08 | Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002368165A1 true AU2002368165A1 (en) | 2004-02-25 |
Family
ID=31713788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002368165A Abandoned AU2002368165A1 (en) | 2002-08-08 | 2002-08-08 | Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1527465A1 (en) |
JP (1) | JP2005536013A (en) |
AU (1) | AU2002368165A1 (en) |
WO (1) | WO2004015728A1 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006289520A (en) * | 2005-04-06 | 2006-10-26 | Toshiba Corp | Semiconductor device using mems technology |
KR100787997B1 (en) | 2006-04-06 | 2007-12-21 | 송건화 | Method of making piezoelectric bimorph acatuator for clamping lead wire of semiconductor device |
US8063456B2 (en) * | 2006-09-12 | 2011-11-22 | Alcatel Lucent | Mechanical switch with a curved bilayer |
US7473859B2 (en) * | 2007-01-12 | 2009-01-06 | General Electric Company | Gating voltage control system and method for electrostatically actuating a micro-electromechanical device |
JP5468242B2 (en) * | 2008-11-21 | 2014-04-09 | 株式会社東芝 | MEMS package and method for manufacturing MEMS package |
US8375538B2 (en) * | 2009-03-27 | 2013-02-19 | Ngk Insulators, Ltd. | Method for manufacturing piezoelectric actuator |
US8576029B2 (en) * | 2010-06-17 | 2013-11-05 | General Electric Company | MEMS switching array having a substrate arranged to conduct switching current |
DE102014202763B4 (en) * | 2014-02-14 | 2016-11-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Micro-electro-mechanical system and method of making same |
US9437911B1 (en) * | 2015-05-21 | 2016-09-06 | Harris Corporation | Compliant high speed interconnects |
KR102628886B1 (en) | 2015-11-16 | 2024-01-25 | 코르보 유에스, 인크. | Improved contact in RF switches |
DE102019211460A1 (en) * | 2019-07-31 | 2021-02-04 | Siemens Aktiengesellschaft | Arrangement of MEMS switches |
US11615924B2 (en) * | 2020-10-25 | 2023-03-28 | AAC Technologies Pte. Ltd. | MEMS switch |
EP4002407A1 (en) * | 2020-11-24 | 2022-05-25 | Siemens Aktiengesellschaft | Microelectromechanical switching element, device and manufacturing method |
FR3144611A1 (en) * | 2023-01-02 | 2024-07-05 | Airmems | Voltage Shielded MEMS Switch and Voltage Shielded MEMS Switch Array |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5828138A (en) * | 1996-12-02 | 1998-10-27 | Trw Inc. | Acceleration switch |
US5796152A (en) * | 1997-01-24 | 1998-08-18 | Roxburgh Ltd. | Cantilevered microstructure |
EP0968530A4 (en) * | 1997-02-04 | 2001-04-25 | California Inst Of Techn | Micro-electromechanical relays |
AUPO821697A0 (en) * | 1997-07-25 | 1997-08-14 | Alcatel Alsthom Compagnie Generale D'electricite | Miniature connector array |
US6483056B2 (en) * | 2000-10-27 | 2002-11-19 | Daniel J Hyman | Microfabricated relay with multimorph actuator and electrostatic latch mechanism |
US6504118B2 (en) * | 2000-10-27 | 2003-01-07 | Daniel J Hyman | Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism |
-
2002
- 2002-08-08 EP EP02752736A patent/EP1527465A1/en not_active Withdrawn
- 2002-08-08 AU AU2002368165A patent/AU2002368165A1/en not_active Abandoned
- 2002-08-08 WO PCT/US2002/025109 patent/WO2004015728A1/en active Application Filing
- 2002-08-08 JP JP2004527503A patent/JP2005536013A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1527465A1 (en) | 2005-05-04 |
JP2005536013A (en) | 2005-11-24 |
WO2004015728A1 (en) | 2004-02-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |