AU2002367635A1 - Semiconductor run-to-run control system with state and model parameter estimation - Google Patents
Semiconductor run-to-run control system with state and model parameter estimationInfo
- Publication number
- AU2002367635A1 AU2002367635A1 AU2002367635A AU2002367635A AU2002367635A1 AU 2002367635 A1 AU2002367635 A1 AU 2002367635A1 AU 2002367635 A AU2002367635 A AU 2002367635A AU 2002367635 A AU2002367635 A AU 2002367635A AU 2002367635 A1 AU2002367635 A1 AU 2002367635A1
- Authority
- AU
- Australia
- Prior art keywords
- run
- state
- control system
- model parameter
- parameter estimation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
- G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
- G05B13/048—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators using a predictor
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B17/00—Systems involving the use of models or simulators of said systems
- G05B17/02—Systems involving the use of models or simulators of said systems electric
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- General Physics & Mathematics (AREA)
- Evolutionary Computation (AREA)
- Medical Informatics (AREA)
- Software Systems (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Artificial Intelligence (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Factory Administration (AREA)
- Testing And Monitoring For Control Systems (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/046,359 | 2001-10-23 | ||
US10/046,359 US6725098B2 (en) | 2001-10-23 | 2001-10-23 | Semiconductor run-to-run control system with missing and out-of-order measurement handling |
US10/171,758 US6748280B1 (en) | 2001-10-23 | 2002-06-14 | Semiconductor run-to-run control system with state and model parameter estimation |
US10/171,758 | 2002-06-14 | ||
PCT/US2002/033853 WO2003096130A1 (en) | 2001-10-23 | 2002-10-23 | Semiconductor run-to-run control system with state and model parameter estimation |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002367635A1 true AU2002367635A1 (en) | 2003-11-11 |
Family
ID=29422652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002367635A Abandoned AU2002367635A1 (en) | 2001-10-23 | 2002-10-23 | Semiconductor run-to-run control system with state and model parameter estimation |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1444556A4 (en) |
CN (1) | CN100354776C (en) |
AU (1) | AU2002367635A1 (en) |
WO (1) | WO2003096130A1 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7689296B2 (en) | 2006-04-28 | 2010-03-30 | Honeywell Asca Inc. | Apparatus and method for controlling a paper machine or other machine using measurement predictions based on asynchronous sensor information |
NL2003919A (en) * | 2008-12-24 | 2010-06-28 | Asml Netherlands Bv | An optimization method and a lithographic cell. |
US8355810B2 (en) * | 2009-01-29 | 2013-01-15 | Applied Materials, Inc. | Method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility |
JP5969919B2 (en) * | 2012-12-28 | 2016-08-17 | アズビル株式会社 | Optimization device and method, and control device and method |
US9405286B2 (en) * | 2013-03-01 | 2016-08-02 | Fisher-Rosemount Systems, Inc. | Use of predictors in process control systems with wireless or intermittent process measurements |
US9264162B2 (en) | 2013-05-23 | 2016-02-16 | Honeywell Limited | Wireless position-time synchronization for scanning sensor devices |
CN104933052B (en) * | 2014-03-17 | 2019-02-01 | 华为技术有限公司 | The estimation method and data true value estimation device of data true value |
US10761522B2 (en) * | 2016-09-16 | 2020-09-01 | Honeywell Limited | Closed-loop model parameter identification techniques for industrial model-based process controllers |
CN107884708A (en) * | 2017-10-18 | 2018-04-06 | 广东电网有限责任公司佛山供电局 | A kind of switch performance diagnostic method based on switch service data |
CN108875207B (en) * | 2018-06-15 | 2022-11-11 | 岭东核电有限公司 | Nuclear reactor optimization design method and system |
EP3938853A4 (en) * | 2019-03-15 | 2022-12-28 | 3M Innovative Properties Company | Polishing semiconductor wafers using causal models |
CN109932908B (en) * | 2019-03-20 | 2022-03-01 | 杭州电子科技大学 | Multi-directional principal component analysis process monitoring method based on alarm reliability fusion |
CN111611536B (en) * | 2020-05-19 | 2023-04-07 | 浙江中控技术股份有限公司 | Data processing method, data processing device, storage medium and electronic equipment |
CN113536983B (en) * | 2021-06-29 | 2023-12-12 | 辽宁工业大学 | Petroleum pipeline stealing positioning method based on P-RLS adaptive filtering time delay estimation |
CN113742472B (en) * | 2021-09-15 | 2022-05-27 | 达而观科技(北京)有限公司 | Data mining method and device based on customer service marketing scene |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6002839A (en) * | 1992-11-24 | 1999-12-14 | Pavilion Technologies | Predictive network with graphically determined preprocess transforms |
US5448684A (en) * | 1993-11-12 | 1995-09-05 | Motorola, Inc. | Neural network, neuron, and method for recognizing a missing input valve |
US5710700A (en) * | 1995-12-18 | 1998-01-20 | International Business Machines Corporation | Optimizing functional operation in manufacturing control |
US5859964A (en) * | 1996-10-25 | 1999-01-12 | Advanced Micro Devices, Inc. | System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes |
US5926690A (en) * | 1997-05-28 | 1999-07-20 | Advanced Micro Devices, Inc. | Run-to-run control process for controlling critical dimensions |
DE69813040T2 (en) * | 1998-08-17 | 2003-10-16 | Aspen Technology, Inc. | METHOD AND DEVICE FOR SENSOR CONFIRMATION |
US6542782B1 (en) * | 1998-12-31 | 2003-04-01 | Z. Joseph Lu | Systems for generating and using a lookup table with process facility control systems and models of the same, and methods of operating such systems |
WO2000079355A1 (en) * | 1999-06-22 | 2000-12-28 | Brooks Automation, Inc. | Run-to-run controller for use in microelectronic fabrication |
-
2002
- 2002-10-23 AU AU2002367635A patent/AU2002367635A1/en not_active Abandoned
- 2002-10-23 WO PCT/US2002/033853 patent/WO2003096130A1/en not_active Application Discontinuation
- 2002-10-23 EP EP02806777A patent/EP1444556A4/en not_active Withdrawn
- 2002-10-23 CN CNB02823393XA patent/CN100354776C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN100354776C (en) | 2007-12-12 |
CN1592873A (en) | 2005-03-09 |
EP1444556A4 (en) | 2006-06-07 |
WO2003096130A1 (en) | 2003-11-20 |
EP1444556A1 (en) | 2004-08-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase | ||
TH | Corrigenda |
Free format text: IN VOL 18, NO 2, PAGE(S) 490 UNDER THE HEADING APPLICATIONS OPI NAME INDEX UNDER THE NAME BROOKS-PRI AUTOMATION, INC., APPLICATION NO. 2002367635, UNDER INID (43) CORRECT THE PUBLICATION DATE TO READ 24.11.2003 |