AU2002367635A1 - Semiconductor run-to-run control system with state and model parameter estimation - Google Patents

Semiconductor run-to-run control system with state and model parameter estimation

Info

Publication number
AU2002367635A1
AU2002367635A1 AU2002367635A AU2002367635A AU2002367635A1 AU 2002367635 A1 AU2002367635 A1 AU 2002367635A1 AU 2002367635 A AU2002367635 A AU 2002367635A AU 2002367635 A AU2002367635 A AU 2002367635A AU 2002367635 A1 AU2002367635 A1 AU 2002367635A1
Authority
AU
Australia
Prior art keywords
run
state
control system
model parameter
parameter estimation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002367635A
Inventor
Keith A. Edwards
James A. Mullins
Jianping Zou.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Brooks PRI Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/046,359 external-priority patent/US6725098B2/en
Application filed by Brooks Automation Inc, Brooks PRI Automation Inc filed Critical Brooks Automation Inc
Publication of AU2002367635A1 publication Critical patent/AU2002367635A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/048—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators using a predictor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Artificial Intelligence (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Factory Administration (AREA)
  • Testing And Monitoring For Control Systems (AREA)
AU2002367635A 2001-10-23 2002-10-23 Semiconductor run-to-run control system with state and model parameter estimation Abandoned AU2002367635A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/046,359 2001-10-23
US10/046,359 US6725098B2 (en) 2001-10-23 2001-10-23 Semiconductor run-to-run control system with missing and out-of-order measurement handling
US10/171,758 US6748280B1 (en) 2001-10-23 2002-06-14 Semiconductor run-to-run control system with state and model parameter estimation
US10/171,758 2002-06-14
PCT/US2002/033853 WO2003096130A1 (en) 2001-10-23 2002-10-23 Semiconductor run-to-run control system with state and model parameter estimation

Publications (1)

Publication Number Publication Date
AU2002367635A1 true AU2002367635A1 (en) 2003-11-11

Family

ID=29422652

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002367635A Abandoned AU2002367635A1 (en) 2001-10-23 2002-10-23 Semiconductor run-to-run control system with state and model parameter estimation

Country Status (4)

Country Link
EP (1) EP1444556A4 (en)
CN (1) CN100354776C (en)
AU (1) AU2002367635A1 (en)
WO (1) WO2003096130A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7689296B2 (en) 2006-04-28 2010-03-30 Honeywell Asca Inc. Apparatus and method for controlling a paper machine or other machine using measurement predictions based on asynchronous sensor information
NL2003919A (en) * 2008-12-24 2010-06-28 Asml Netherlands Bv An optimization method and a lithographic cell.
US8355810B2 (en) * 2009-01-29 2013-01-15 Applied Materials, Inc. Method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility
JP5969919B2 (en) * 2012-12-28 2016-08-17 アズビル株式会社 Optimization device and method, and control device and method
US9405286B2 (en) * 2013-03-01 2016-08-02 Fisher-Rosemount Systems, Inc. Use of predictors in process control systems with wireless or intermittent process measurements
US9264162B2 (en) 2013-05-23 2016-02-16 Honeywell Limited Wireless position-time synchronization for scanning sensor devices
CN104933052B (en) * 2014-03-17 2019-02-01 华为技术有限公司 The estimation method and data true value estimation device of data true value
US10761522B2 (en) * 2016-09-16 2020-09-01 Honeywell Limited Closed-loop model parameter identification techniques for industrial model-based process controllers
CN107884708A (en) * 2017-10-18 2018-04-06 广东电网有限责任公司佛山供电局 A kind of switch performance diagnostic method based on switch service data
CN108875207B (en) * 2018-06-15 2022-11-11 岭东核电有限公司 Nuclear reactor optimization design method and system
EP3938853A4 (en) * 2019-03-15 2022-12-28 3M Innovative Properties Company Polishing semiconductor wafers using causal models
CN109932908B (en) * 2019-03-20 2022-03-01 杭州电子科技大学 Multi-directional principal component analysis process monitoring method based on alarm reliability fusion
CN111611536B (en) * 2020-05-19 2023-04-07 浙江中控技术股份有限公司 Data processing method, data processing device, storage medium and electronic equipment
CN113536983B (en) * 2021-06-29 2023-12-12 辽宁工业大学 Petroleum pipeline stealing positioning method based on P-RLS adaptive filtering time delay estimation
CN113742472B (en) * 2021-09-15 2022-05-27 达而观科技(北京)有限公司 Data mining method and device based on customer service marketing scene

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6002839A (en) * 1992-11-24 1999-12-14 Pavilion Technologies Predictive network with graphically determined preprocess transforms
US5448684A (en) * 1993-11-12 1995-09-05 Motorola, Inc. Neural network, neuron, and method for recognizing a missing input valve
US5710700A (en) * 1995-12-18 1998-01-20 International Business Machines Corporation Optimizing functional operation in manufacturing control
US5859964A (en) * 1996-10-25 1999-01-12 Advanced Micro Devices, Inc. System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes
US5926690A (en) * 1997-05-28 1999-07-20 Advanced Micro Devices, Inc. Run-to-run control process for controlling critical dimensions
DE69813040T2 (en) * 1998-08-17 2003-10-16 Aspen Technology, Inc. METHOD AND DEVICE FOR SENSOR CONFIRMATION
US6542782B1 (en) * 1998-12-31 2003-04-01 Z. Joseph Lu Systems for generating and using a lookup table with process facility control systems and models of the same, and methods of operating such systems
WO2000079355A1 (en) * 1999-06-22 2000-12-28 Brooks Automation, Inc. Run-to-run controller for use in microelectronic fabrication

Also Published As

Publication number Publication date
CN100354776C (en) 2007-12-12
CN1592873A (en) 2005-03-09
EP1444556A4 (en) 2006-06-07
WO2003096130A1 (en) 2003-11-20
EP1444556A1 (en) 2004-08-11

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
TH Corrigenda

Free format text: IN VOL 18, NO 2, PAGE(S) 490 UNDER THE HEADING APPLICATIONS OPI NAME INDEX UNDER THE NAME BROOKS-PRI AUTOMATION, INC., APPLICATION NO. 2002367635, UNDER INID (43) CORRECT THE PUBLICATION DATE TO READ 24.11.2003