AU2002355210A1 - Positive type radiosensitive composition and method for forming pattern - Google Patents

Positive type radiosensitive composition and method for forming pattern

Info

Publication number
AU2002355210A1
AU2002355210A1 AU2002355210A AU2002355210A AU2002355210A1 AU 2002355210 A1 AU2002355210 A1 AU 2002355210A1 AU 2002355210 A AU2002355210 A AU 2002355210A AU 2002355210 A AU2002355210 A AU 2002355210A AU 2002355210 A1 AU2002355210 A1 AU 2002355210A1
Authority
AU
Australia
Prior art keywords
positive type
forming pattern
radiosensitive composition
type radiosensitive
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002355210A
Inventor
Akira Nishikawa
Kentarou Tamaki
Tomohiro Utaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JSR Corp filed Critical JSR Corp
Publication of AU2002355210A1 publication Critical patent/AU2002355210A1/en
Abandoned legal-status Critical Current

Links

AU2002355210A 2001-07-24 2002-07-19 Positive type radiosensitive composition and method for forming pattern Abandoned AU2002355210A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-222706 2001-07-24
JP2001-352419 2001-11-16

Publications (1)

Publication Number Publication Date
AU2002355210A1 true AU2002355210A1 (en) 2003-02-17

Family

ID=

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