AU2002346400A1 - A shadow-creating apparatus - Google Patents

A shadow-creating apparatus

Info

Publication number: AU2002346400A1
Authority: AU; Australia
Prior art keywords: shadow; creating apparatus; creating
Prior art date: 2001-11-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002346400A

Other versions

AU2002346400A8 (en

Inventor

Robert S. Burgoyne

Jeffrey L. Fish

Malcolm V. Hawkes

Jon Stuart Wright

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Electro Scientific Industries Inc

Original Assignee

Electro Scientific Industries Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-11-27

Filing date

2002-11-14

Publication date

2003-06-10

2002-11-14 Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc

2003-06-10 Publication of AU2002346400A8 publication Critical patent/AU2002346400A8/en

2003-06-10 Publication of AU2002346400A1 publication Critical patent/AU2002346400A1/en

Status Abandoned legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

Landscapes

Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Automatic Analysis And Handling Materials Therefor (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)

AU2002346400A 2001-11-27 2002-11-14 A shadow-creating apparatus Abandoned AU2002346400A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US33369001P	2001-11-27	2001-11-27
US60/333,690		2001-11-27
PCT/US2002/036619 WO2003046510A2 (en)	2001-11-27	2002-11-14	A shadow-creating apparatus

Publications (2)

Publication Number	Publication Date
AU2002346400A8 AU2002346400A8 (en)	2003-06-10
AU2002346400A1 true AU2002346400A1 (en)	2003-06-10

Family

ID=23303855

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002346400A Abandoned AU2002346400A1 (en)	2001-11-27	2002-11-14	A shadow-creating apparatus

Country Status (8)

Country	Link
JP (1)	JP2005523424A (en)
KR (1)	KR20040062572A (en)
CN (1)	CN1328775C (en)
AU (1)	AU2002346400A1 (en)
DE (1)	DE10297486T5 (en)
GB (1)	GB2397172B (en)
TW (1)	TW577163B (en)
WO (1)	WO2003046510A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN107532431A (en) *	2015-05-26	2018-01-02	住友化学株式会社	Polarization plates manufacture Clean room
CN110379784B (en) *	2019-07-23	2021-05-07	深圳市优一达电子有限公司	Semiconductor packaging structure

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4312117A (en) *	1977-09-01	1982-01-26	Raytheon Company	Integrated test and assembly device
JPH0680602B2 (en) *	1987-11-28	1994-10-12	株式会社村田製作所	Electronic component chip holding jig and electronic component chip handling method
US5123850A (en) *	1990-04-06	1992-06-23	Texas Instruments Incorporated	Non-destructive burn-in test socket for integrated circuit die
US5088190A (en) *	1990-08-30	1992-02-18	Texas Instruments Incorporated	Method of forming an apparatus for burn in testing of integrated circuit chip
US5543725A (en) *	1993-08-25	1996-08-06	Sunright Limited	Reusable carrier for burn-in/testing on non packaged die
US5673799A (en) *	1995-06-05	1997-10-07	Chip Star Inc.	Machine for testing and sorting capacitor chips and method of operating same
KR100766095B1 (en) *	1997-06-12	2007-10-11	가부시키가이샤 니콘	Substrate for device manufacturing, process for manufacturing the substrate, and method of exposure using the substrate
GB2349205B (en) *	1999-04-19	2003-12-31	Applied Materials Inc	Method and apparatus for detecting that two moveable members are correctly positioned relatively to one another
DE60034820T2 (en) *	2000-05-23	2008-01-17	Electro Scientific Industries, Inc., Portland	INSPECTION MACHINE FOR PASSIVE SURFACE MOUNTED COMPONENT

2002
- 2002-11-12 TW TW091133095A patent/TW577163B/en not_active IP Right Cessation
- 2002-11-14 JP JP2003547902A patent/JP2005523424A/en active Pending
- 2002-11-14 WO PCT/US2002/036619 patent/WO2003046510A2/en active Application Filing
- 2002-11-14 AU AU2002346400A patent/AU2002346400A1/en not_active Abandoned
- 2002-11-14 CN CNB028209966A patent/CN1328775C/en not_active Expired - Fee Related
- 2002-11-14 DE DE10297486T patent/DE10297486T5/en not_active Withdrawn
- 2002-11-14 KR KR10-2004-7005779A patent/KR20040062572A/en not_active Application Discontinuation
- 2002-11-14 GB GB0407477A patent/GB2397172B/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
GB0407477D0 (en)	2004-05-05
TW577163B (en)	2004-02-21
GB2397172B (en)	2005-05-11
TW200301008A (en)	2003-06-16
WO2003046510A9 (en)	2004-03-25
WO2003046510A3 (en)	2003-11-27
KR20040062572A (en)	2004-07-07
WO2003046510A2 (en)	2003-06-05
WO2003046510B1 (en)	2004-04-29
AU2002346400A8 (en)	2003-06-10
JP2005523424A (en)	2005-08-04
CN1575513A (en)	2005-02-02
DE10297486T5 (en)	2004-12-02
GB2397172A (en)	2004-07-14
CN1328775C (en)	2007-07-25

Legal Events

Date	Code	Title	Description
2004-08-12	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase

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