AU2002315896A1 - Method and device for cleaning air - Google Patents

Method and device for cleaning air

Info

Publication number
AU2002315896A1
AU2002315896A1 AU2002315896A AU2002315896A AU2002315896A1 AU 2002315896 A1 AU2002315896 A1 AU 2002315896A1 AU 2002315896 A AU2002315896 A AU 2002315896A AU 2002315896 A AU2002315896 A AU 2002315896A AU 2002315896 A1 AU2002315896 A1 AU 2002315896A1
Authority
AU
Australia
Prior art keywords
cleaning air
cleaning
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002315896A
Inventor
Hiromu Itoh
Sadao Kobayashi
Yuji Matumura
Naoki Mori
Osamu Suenaga
Minoru Tanaka
Isao Terada
Yoshihide Wakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taisei Corp
Tokyo Electron Ltd
Nichias Corp
Original Assignee
Taisei Corp
Tokyo Electron Ltd
Nichias Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taisei Corp, Tokyo Electron Ltd, Nichias Corp filed Critical Taisei Corp
Publication of AU2002315896A1 publication Critical patent/AU2002315896A1/en
Abandoned legal-status Critical Current

Links

AU2002315896A 2001-06-26 2002-06-26 Method and device for cleaning air Abandoned AU2002315896A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-192518 2001-06-26
JP2001-192517 2001-06-26

Publications (1)

Publication Number Publication Date
AU2002315896A1 true AU2002315896A1 (en) 2003-01-08

Family

ID=

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