Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002315896A
Inventor
Hiromu Itoh
Sadao Kobayashi
Yuji Matumura
Naoki Mori
Osamu Suenaga
Minoru Tanaka
Isao Terada
Yoshihide Wakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taisei Corp
Tokyo Electron Ltd
Nichias Corp
Original Assignee
Taisei Corp
Tokyo Electron Ltd
Nichias Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taisei Corp, Tokyo Electron Ltd, Nichias CorpfiledCriticalTaisei Corp
Publication of AU2002315896A1publicationCriticalpatent/AU2002315896A1/en