Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002313450A
Inventor
Martin Brunotte
Olaf Dittmann
Damian Fiolka
Toralf Gruner
Jurgen Hartmaier
Vladimir Kamenov
Birgit Mecking
Markus Zenzinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbHfiledCriticalCarl Zeiss SMT GmbH
Publication of AU2002313450A1publicationCriticalpatent/AU2002313450A1/en