AU2002313269A1 - Method for producing semiconductor substrate and semiconductor substrate - Google Patents

Method for producing semiconductor substrate and semiconductor substrate

Info

Publication number
AU2002313269A1
AU2002313269A1 AU2002313269A AU2002313269A AU2002313269A1 AU 2002313269 A1 AU2002313269 A1 AU 2002313269A1 AU 2002313269 A AU2002313269 A AU 2002313269A AU 2002313269 A AU2002313269 A AU 2002313269A AU 2002313269 A1 AU2002313269 A1 AU 2002313269A1
Authority
AU
Australia
Prior art keywords
semiconductor substrate
producing
producing semiconductor
substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002313269A
Inventor
Mitsuhiro Yuasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002313269A1 publication Critical patent/AU2002313269A1/en
Abandoned legal-status Critical Current

Links

AU2002313269A 2001-07-09 2002-06-26 Method for producing semiconductor substrate and semiconductor substrate Abandoned AU2002313269A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-207870 2001-07-09

Publications (1)

Publication Number Publication Date
AU2002313269A1 true AU2002313269A1 (en) 2003-01-29

Family

ID=

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