AU2002245561A1 - Multiple torch - multiple target method and apparatus for plasma outside chemical vapor deposition - Google Patents

Multiple torch - multiple target method and apparatus for plasma outside chemical vapor deposition

Info

Publication number
AU2002245561A1
AU2002245561A1 AU2002245561A AU2002245561A AU2002245561A1 AU 2002245561 A1 AU2002245561 A1 AU 2002245561A1 AU 2002245561 A AU2002245561 A AU 2002245561A AU 2002245561 A AU2002245561 A AU 2002245561A AU 2002245561 A1 AU2002245561 A1 AU 2002245561A1
Authority
AU
Australia
Prior art keywords
vapor deposition
chemical vapor
target method
torch
plasma outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002245561A
Inventor
Mohd A. Aslami
Evguenie B. Danilov
Mikhail I. Gouskov
Dau Wu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fibrecore Inc
Original Assignee
Fibrecore Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fibrecore Inc filed Critical Fibrecore Inc
Publication of AU2002245561A1 publication Critical patent/AU2002245561A1/en
Abandoned legal-status Critical Current

Links

AU2002245561A 2001-03-13 2002-03-06 Multiple torch - multiple target method and apparatus for plasma outside chemical vapor deposition Abandoned AU2002245561A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/804,465 2001-03-13

Publications (1)

Publication Number Publication Date
AU2002245561A1 true AU2002245561A1 (en) 2002-09-24

Family

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