AU2002220602A1 - Adaptive mirror with cooling channels - Google Patents

Adaptive mirror with cooling channels

Info

Publication number
AU2002220602A1
AU2002220602A1 AU2002220602A AU2060202A AU2002220602A1 AU 2002220602 A1 AU2002220602 A1 AU 2002220602A1 AU 2002220602 A AU2002220602 A AU 2002220602A AU 2060202 A AU2060202 A AU 2060202A AU 2002220602 A1 AU2002220602 A1 AU 2002220602A1
Authority
AU
Australia
Prior art keywords
cooling channels
adaptive mirror
adaptive
mirror
channels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002220602A
Inventor
Dietmar Bischof
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LT ULTRA-PRECISION-TECHNOLOGY GmbH
Original Assignee
LT ULTRA PREC TECHNOLOGY GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LT ULTRA PREC TECHNOLOGY GmbH filed Critical LT ULTRA PREC TECHNOLOGY GmbH
Publication of AU2002220602A1 publication Critical patent/AU2002220602A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)
AU2002220602A 2000-10-21 2001-10-08 Adaptive mirror with cooling channels Abandoned AU2002220602A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10052249 2000-10-21
DE2000152249 DE10052249A1 (en) 2000-10-21 2000-10-21 Adaptive deformable mirror for use as a laser beam guidance component includes a casing assigned with a mirror element able to be reshaped and cooled by a substance.
PCT/EP2001/011597 WO2002035274A1 (en) 2000-10-21 2001-10-08 Adaptive mirror with cooling channels

Publications (1)

Publication Number Publication Date
AU2002220602A1 true AU2002220602A1 (en) 2002-05-06

Family

ID=7660579

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002220602A Abandoned AU2002220602A1 (en) 2000-10-21 2001-10-08 Adaptive mirror with cooling channels

Country Status (3)

Country Link
AU (1) AU2002220602A1 (en)
DE (1) DE10052249A1 (en)
WO (1) WO2002035274A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE50209599D1 (en) 2002-11-29 2007-04-12 Trumpf Werkzeugmaschinen Gmbh Mirror of a laser processing machine
AU2003288566A1 (en) * 2002-12-23 2004-07-14 Bae Systems Plc Deformable-mirror cooling
US7656572B2 (en) 2003-02-26 2010-02-02 Universitat Bern Method, array, and influencing unit for said array in order to modify a wavefront of an optical beam
DE102008014619C5 (en) 2008-03-17 2015-06-25 Friedrich-Schiller-Universität Jena Adaptive mirror and method for its production
DE102010034476B4 (en) * 2010-08-11 2020-08-27 Carl Zeiss Smt Gmbh Reflective optical element
DE102012213671A1 (en) * 2012-08-02 2014-02-06 Carl Zeiss Smt Gmbh Mirror arrangement for an EUV lithography system and method for producing the same
DE102013102736A1 (en) 2013-03-18 2014-09-18 Karsten Schuhmann Vapor pressure controlled adaptive mirror
US9360600B2 (en) * 2013-11-20 2016-06-07 Asml Netherlands B.V. System and method for correcting the focus of a laser beam
DE102015100918A1 (en) 2015-01-22 2016-07-28 Carl Zeiss Smt Gmbh Method for producing a reflective optical element, reflective optical element and use of a reflective optical element
US11828930B2 (en) * 2019-08-27 2023-11-28 Ii-Vi Delaware, Inc. Variable radius mirror
WO2022145470A1 (en) * 2020-12-28 2022-07-07 京セラ株式会社 Structure, and exposure device and mirror for position measurement using same
CN115166931B (en) * 2022-07-04 2024-01-30 上海科技大学 Reflector cooling system

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL47716A (en) * 1974-09-20 1977-12-30 Hughes Aircraft Co Liquid cooled mirror
US4264146A (en) * 1980-01-14 1981-04-28 Avco Everett Research Laboratory, Inc. Folding laser mirror
US4314742A (en) * 1980-06-02 1982-02-09 United Technologies Corporation High performance cooled laser mirror
US4386986A (en) * 1981-04-06 1983-06-07 United Technologies Corporation High power laser mirror repair
US4492431A (en) * 1982-05-04 1985-01-08 United Technologies Corporation Pressure actuated deformable mirror
US4674848A (en) * 1986-03-17 1987-06-23 Itek Corporation Laser mirror having a cooled, deformable surface
US4770521A (en) * 1986-10-03 1988-09-13 United Technologies Corporation Cooled mirror substrate isolator
US4934803A (en) * 1989-10-12 1990-06-19 Litton Systems, Inc. Differential pressure deformable mirror
US5204784A (en) * 1990-12-06 1993-04-20 The United States Of America As Represented By The Secretary Of The Air Force Deformable mirror with pneumatic actuator pre-load
DE4308315B4 (en) * 1991-11-23 2005-01-20 Diehl Stiftung & Co.Kg Deformable mirror
DE4304059A1 (en) * 1993-02-11 1994-08-18 Diehl Gmbh & Co Mirror device with a deformable mirror element
DE4415008C2 (en) * 1994-04-29 1996-02-22 Fraunhofer Ges Forschung Mirrors, in particular mirrors for the imaging optics and internal resonator optics of a high-power laser
DE59402170D1 (en) * 1994-08-24 1997-04-24 Schablonentechnik Kufstein Ag Device for producing a printing stencil

Also Published As

Publication number Publication date
DE10052249A1 (en) 2002-04-25
WO2002035274A1 (en) 2002-05-02

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