Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002218480A
Inventor
Shigeru Komai
Masahiko Nakamori
Koichi Ono
Tetsuo Shimomura
Masayuki Tsutsumi
Takatoshi Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Original Assignee
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyobo Co LtdfiledCriticalToyobo Co Ltd
Priority claimed from PCT/JP2001/010363external-prioritypatent/WO2002043921A1/en
Publication of AU2002218480A1publicationCriticalpatent/AU2002218480A1/en
AU2002218480A2000-12-012001-11-28Polishing pad, method of manufacturing the polishing pad, and cushion layer for polishing pad
AbandonedAU2002218480A1
(en)