AU2001282306A1 - Plasma enhanced gas reactor - Google Patents

Plasma enhanced gas reactor

Info

Publication number
AU2001282306A1
AU2001282306A1 AU2001282306A AU8230601A AU2001282306A1 AU 2001282306 A1 AU2001282306 A1 AU 2001282306A1 AU 2001282306 A AU2001282306 A AU 2001282306A AU 8230601 A AU8230601 A AU 8230601A AU 2001282306 A1 AU2001282306 A1 AU 2001282306A1
Authority
AU
Australia
Prior art keywords
plasma enhanced
gas reactor
enhanced gas
reactor
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001282306A
Inventor
Stephen Ivor Hall
Martin Harte
Robert Francis King
John Stedman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Accentus Medical PLC
Original Assignee
Accentus Medical PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Accentus Medical PLC filed Critical Accentus Medical PLC
Publication of AU2001282306A1 publication Critical patent/AU2001282306A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32366—Localised processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32605—Removable or replaceable electrodes or electrode systems
AU2001282306A 2000-09-06 2001-08-22 Plasma enhanced gas reactor Abandoned AU2001282306A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0021815.6A GB0021815D0 (en) 2000-09-06 2000-09-06 Plasma enhanced gas reactor
GB0021815 2000-09-06
PCT/GB2001/003767 WO2002021567A1 (en) 2000-09-06 2001-08-22 Plasma enhanced gas reactor

Publications (1)

Publication Number Publication Date
AU2001282306A1 true AU2001282306A1 (en) 2002-03-22

Family

ID=9898912

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001282306A Abandoned AU2001282306A1 (en) 2000-09-06 2001-08-22 Plasma enhanced gas reactor

Country Status (6)

Country Link
US (1) US6863870B2 (en)
EP (1) EP1316105B1 (en)
JP (1) JP5462992B2 (en)
AU (1) AU2001282306A1 (en)
GB (1) GB0021815D0 (en)
WO (1) WO2002021567A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0126419D0 (en) * 2001-11-03 2002-01-02 Accentus Plc Microwave plasma generator
DE10310623B8 (en) * 2003-03-10 2005-12-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and apparatus for generating a plasma by electrical discharge in a discharge space
FR2880236B1 (en) * 2004-12-23 2007-03-30 Air Liquide MICROWAVE PLASMA EXCITATORS
JP4761442B2 (en) * 2005-08-08 2011-08-31 芝浦メカトロニクス株式会社 Plasma generator and plasma processing apparatus
US20090188894A1 (en) * 2008-01-28 2009-07-30 Honeywell International Inc. Welding guide nozzle including nozzle tip for precision weld wire positioning
US9144858B2 (en) 2011-11-18 2015-09-29 Recarbon Inc. Plasma generating system having movable electrodes
GB2553752A (en) * 2016-07-01 2018-03-21 Arcs Energy Ltd Fluid treatment apparatus and method
WO2018226917A2 (en) * 2017-06-08 2018-12-13 Industrial Heat, Llc Low cost plate reactor for exothermic reactions
WO2019083645A2 (en) * 2017-09-20 2019-05-02 Ih Ip Holdings Limited Modular reactor system for exothermic reactions
BE1030331B1 (en) 2022-03-11 2023-10-09 D Crbn Bv A SOLID PARALLEL PLASMA REACTOR FOR GAS CONVERSION APPLICATIONS

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3132996A (en) 1962-12-10 1964-05-12 William R Baker Contra-rotating plasma system
JPS5256078A (en) * 1975-11-04 1977-05-09 Iwatani & Co Aerial discharge reaction
JPS54107893A (en) * 1978-02-13 1979-08-24 Mitsubishi Electric Corp Ozonizer
US4801435A (en) 1986-09-08 1989-01-31 Plasma Holdings N.V. Hybrid plasma reactor
JPH075628Y2 (en) * 1990-05-30 1995-02-08 株式会社島津製作所 Vacuum film forming equipment
JPH05290751A (en) * 1992-04-14 1993-11-05 Mitsubishi Heavy Ind Ltd High frequency type ion source
EP0577344A1 (en) 1992-06-25 1994-01-05 CARTER & OGILVIE RESEARCH PTY LIMITED Material treatment method and apparatus
GB9224745D0 (en) * 1992-11-26 1993-01-13 Atomic Energy Authority Uk Microwave plasma generator
DE69726830T2 (en) * 1996-11-28 2004-10-07 Accentus Plc Didcot Method and device for the plasma-chemical treatment of gases
JPH1154297A (en) * 1997-08-07 1999-02-26 Nippon Paint Co Ltd Portable compact surface treatment device and discharging member of portable compact surface treatment device
JP3099065B2 (en) * 1999-01-29 2000-10-16 工業技術院長 Vacuum deposition equipment

Also Published As

Publication number Publication date
JP5462992B2 (en) 2014-04-02
EP1316105A1 (en) 2003-06-04
EP1316105B1 (en) 2016-10-05
US20030175181A1 (en) 2003-09-18
GB0021815D0 (en) 2000-10-18
WO2002021567A1 (en) 2002-03-14
US6863870B2 (en) 2005-03-08
JP2004508682A (en) 2004-03-18

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