AU2001281175A1 - Ensemble manifold, system and method for monitoring particles in clean environments - Google Patents

Ensemble manifold, system and method for monitoring particles in clean environments

Info

Publication number
AU2001281175A1
AU2001281175A1 AU2001281175A AU8117501A AU2001281175A1 AU 2001281175 A1 AU2001281175 A1 AU 2001281175A1 AU 2001281175 A AU2001281175 A AU 2001281175A AU 8117501 A AU8117501 A AU 8117501A AU 2001281175 A1 AU2001281175 A1 AU 2001281175A1
Authority
AU
Australia
Prior art keywords
clean environments
monitoring particles
ensemble manifold
ensemble
manifold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001281175A
Inventor
Bryan Bast
Glenn W. Brandon
Brian A. Knollenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Particle Measuring Systems Inc
Original Assignee
Particle Measuring Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Particle Measuring Systems Inc filed Critical Particle Measuring Systems Inc
Publication of AU2001281175A1 publication Critical patent/AU2001281175A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/26—Devices for withdrawing samples in the gaseous state with provision for intake from several spaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N2001/222—Other features
    • G01N2001/2223—Other features aerosol sampling devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas
    • G01N2001/225—Sampling from a flowing stream of gas isokinetic, same flow rate for sample and bulk gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2247—Sampling from a flowing stream of gas
    • G01N2001/2264—Sampling from a flowing stream of gas with dilution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Molecular Biology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
AU2001281175A 2000-08-15 2001-08-08 Ensemble manifold, system and method for monitoring particles in clean environments Abandoned AU2001281175A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/638,366 2000-08-15
US09/638,366 US6615679B1 (en) 2000-08-15 2000-08-15 Ensemble manifold, system and method for monitoring particles in clean environments
PCT/US2001/024832 WO2002013943A2 (en) 2000-08-15 2001-08-08 Ensemble manifold, system and method for monitoring particles in clean environments

Publications (1)

Publication Number Publication Date
AU2001281175A1 true AU2001281175A1 (en) 2002-02-25

Family

ID=24559746

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001281175A Abandoned AU2001281175A1 (en) 2000-08-15 2001-08-08 Ensemble manifold, system and method for monitoring particles in clean environments

Country Status (6)

Country Link
US (1) US6615679B1 (en)
JP (2) JP2004506222A (en)
AU (1) AU2001281175A1 (en)
DE (1) DE10196505T5 (en)
GB (1) GB2382139B (en)
WO (1) WO2002013943A2 (en)

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US6796164B2 (en) * 2001-11-06 2004-09-28 The Johns Hopkins University Integrated fluidics system for simplified analysis of aerosolized biological particles and particle detection ticket thereof
US7208123B2 (en) * 2002-06-24 2007-04-24 Particle Measuring Systems, Inc. Molecular contamination monitoring system and method
JP3714926B2 (en) * 2002-08-22 2005-11-09 ホーチキ株式会社 Sampling tube smoke detector
US6976397B2 (en) * 2003-10-28 2005-12-20 General Electric Company Multi-point sampling method for obtaining isokinetic fluid composition flows in a non-uniform velocity flow field
US20070137283A1 (en) * 2004-07-11 2007-06-21 Adam Giandomenico Lateral manifold for a multiple sample location sensor and method for collection
JP2010522333A (en) * 2007-03-23 2010-07-01 パーティクル・メージャーリング・システムズ・インコーポレーテッド Optical particle sensor with discharge cooling light source
CN102625909B (en) 2009-08-24 2015-06-17 粒子监测***有限公司 Flow monitored particle sensor
US12044611B2 (en) 2013-03-15 2024-07-23 Particles Plus, Inc. Particle counter with integrated bootloader
US9677990B2 (en) 2014-04-30 2017-06-13 Particles Plus, Inc. Particle counter with advanced features
US10983040B2 (en) 2013-03-15 2021-04-20 Particles Plus, Inc. Particle counter with integrated bootloader
US10352844B2 (en) 2013-03-15 2019-07-16 Particles Plus, Inc. Multiple particle sensors in a particle counter
US11579072B2 (en) 2013-03-15 2023-02-14 Particles Plus, Inc. Personal air quality monitoring system
ITRM20130128U1 (en) 2013-07-23 2015-01-24 Particle Measuring Systems S R L DEVICE FOR MICROBIAL AIR SAMPLING
KR20150047097A (en) * 2013-10-23 2015-05-04 주식회사 위드텍 Multi sampling port monitoring apparatus for air pollution measuring and monitoring method for using the same
WO2015138695A2 (en) 2014-03-14 2015-09-17 Particle Measuring Systems, Inc. Filter and blower geometry for particle sampler
US9810558B2 (en) 2014-03-14 2017-11-07 Particle Measuring Systems, Inc. Pressure-based airflow sensing in particle impactor systems
US9719891B2 (en) 2015-05-13 2017-08-01 The Southern Company Simultaneous multi-point testing systems and methods
US10948470B2 (en) * 2016-04-29 2021-03-16 TricornTech Taiwan System and method for in-line monitoring of airborne contamination and process health
KR20230156814A (en) 2017-10-26 2023-11-14 파티클 머슈어링 시스템즈, 인크. System and method for particles measurement
JP6875318B2 (en) * 2018-04-24 2021-05-19 株式会社日立産機システム Safety cabinet
KR20210050517A (en) 2018-08-31 2021-05-07 파티클 머슈어링 시스템즈, 인크. Fluid refractive index to optimize particle counter
CN112639444A (en) 2018-09-04 2021-04-09 粒子监测***有限公司 Detecting nanoparticles on production equipment and surfaces
WO2020102038A1 (en) 2018-11-12 2020-05-22 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US11385161B2 (en) 2018-11-12 2022-07-12 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
WO2020102032A1 (en) 2018-11-16 2020-05-22 Particle Measuring Systems, Inc. Particle sampling systems and methods for robotic controlled manufacturing barrier systems
KR20210089164A (en) 2018-11-16 2021-07-15 파티클 머슈어링 시스템즈, 인크. Slurry Monitor Coupling Bulk Size Distribution and Single Particle Detection
WO2020219841A1 (en) 2019-04-25 2020-10-29 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
JP7182523B2 (en) * 2019-07-10 2022-12-02 株式会社日立産機システム safety cabinet
EP4022278A4 (en) 2019-08-26 2023-11-01 Particle Measuring Systems, Inc. Triggered sampling systems and methods
US11339733B2 (en) * 2019-09-06 2022-05-24 Tokyo Electron Limited Systems and methods to monitor particulate accumulation for bake chamber cleaning
KR20220072829A (en) 2019-10-07 2022-06-02 파티클 머슈어링 시스템즈, 인크. Particle Detector with Remote Alarm Monitoring and Control
JP2022550418A (en) 2019-10-07 2022-12-01 パーティクル・メージャーリング・システムズ・インコーポレーテッド antimicrobial particle detector
IT201900020248A1 (en) 2019-11-04 2021-05-04 Particle Measuring Systems S R L MOBILE MONITORING DEVICE FOR CONTROLLED CONTAMINATION AREAS
JP2023501769A (en) 2019-11-22 2023-01-19 パーティクル・メージャーリング・システムズ・インコーポレーテッド Advanced systems and methods for interfering particle detection and detection of particles with small size dimensions
TWI801797B (en) 2020-01-21 2023-05-11 美商粒子監測系統有限公司 Impactor and method for sampling biological particles from a fluid flow
CN111381611A (en) * 2020-04-09 2020-07-07 湖北平安电工材料有限公司 Mica slurry online concentration control system and method
US11988591B2 (en) 2020-07-01 2024-05-21 Particles Plus, Inc. Modular optical particle counter sensor and apparatus
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Also Published As

Publication number Publication date
DE10196505T5 (en) 2004-08-12
GB2382139B (en) 2004-08-04
US6615679B1 (en) 2003-09-09
WO2002013943A3 (en) 2002-08-15
GB0303601D0 (en) 2003-03-19
GB2382139A (en) 2003-05-21
JP2007192829A (en) 2007-08-02
WO2002013943A2 (en) 2002-02-21
JP2004506222A (en) 2004-02-26

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