AU2001281175A1 - Ensemble manifold, system and method for monitoring particles in clean environments - Google Patents
Ensemble manifold, system and method for monitoring particles in clean environmentsInfo
- Publication number
- AU2001281175A1 AU2001281175A1 AU2001281175A AU8117501A AU2001281175A1 AU 2001281175 A1 AU2001281175 A1 AU 2001281175A1 AU 2001281175 A AU2001281175 A AU 2001281175A AU 8117501 A AU8117501 A AU 8117501A AU 2001281175 A1 AU2001281175 A1 AU 2001281175A1
- Authority
- AU
- Australia
- Prior art keywords
- clean environments
- monitoring particles
- ensemble manifold
- ensemble
- manifold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title 1
- 238000012544 monitoring process Methods 0.000 title 1
- 239000002245 particle Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/24—Suction devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/26—Devices for withdrawing samples in the gaseous state with provision for intake from several spaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
- G01N2001/222—Other features
- G01N2001/2223—Other features aerosol sampling devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
- G01N2001/225—Sampling from a flowing stream of gas isokinetic, same flow rate for sample and bulk gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
- G01N2001/2264—Sampling from a flowing stream of gas with dilution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0042—Investigating dispersion of solids
- G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Biomedical Technology (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Molecular Biology (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/638,366 | 2000-08-15 | ||
US09/638,366 US6615679B1 (en) | 2000-08-15 | 2000-08-15 | Ensemble manifold, system and method for monitoring particles in clean environments |
PCT/US2001/024832 WO2002013943A2 (en) | 2000-08-15 | 2001-08-08 | Ensemble manifold, system and method for monitoring particles in clean environments |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001281175A1 true AU2001281175A1 (en) | 2002-02-25 |
Family
ID=24559746
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001281175A Abandoned AU2001281175A1 (en) | 2000-08-15 | 2001-08-08 | Ensemble manifold, system and method for monitoring particles in clean environments |
Country Status (6)
Country | Link |
---|---|
US (1) | US6615679B1 (en) |
JP (2) | JP2004506222A (en) |
AU (1) | AU2001281175A1 (en) |
DE (1) | DE10196505T5 (en) |
GB (1) | GB2382139B (en) |
WO (1) | WO2002013943A2 (en) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7024950B2 (en) * | 2000-11-30 | 2006-04-11 | Texas Instruments Incorporated | Method for intelligent sampling of particulates in exhaust lines |
US20030063271A1 (en) * | 2001-08-17 | 2003-04-03 | Nicholes Mary Kristin | Sampling and measurement system with multiple slurry chemical manifold |
US6796164B2 (en) * | 2001-11-06 | 2004-09-28 | The Johns Hopkins University | Integrated fluidics system for simplified analysis of aerosolized biological particles and particle detection ticket thereof |
US7208123B2 (en) * | 2002-06-24 | 2007-04-24 | Particle Measuring Systems, Inc. | Molecular contamination monitoring system and method |
JP3714926B2 (en) * | 2002-08-22 | 2005-11-09 | ホーチキ株式会社 | Sampling tube smoke detector |
US6976397B2 (en) * | 2003-10-28 | 2005-12-20 | General Electric Company | Multi-point sampling method for obtaining isokinetic fluid composition flows in a non-uniform velocity flow field |
US20070137283A1 (en) * | 2004-07-11 | 2007-06-21 | Adam Giandomenico | Lateral manifold for a multiple sample location sensor and method for collection |
JP2010522333A (en) * | 2007-03-23 | 2010-07-01 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | Optical particle sensor with discharge cooling light source |
CN102625909B (en) | 2009-08-24 | 2015-06-17 | 粒子监测***有限公司 | Flow monitored particle sensor |
US12044611B2 (en) | 2013-03-15 | 2024-07-23 | Particles Plus, Inc. | Particle counter with integrated bootloader |
US9677990B2 (en) | 2014-04-30 | 2017-06-13 | Particles Plus, Inc. | Particle counter with advanced features |
US10983040B2 (en) | 2013-03-15 | 2021-04-20 | Particles Plus, Inc. | Particle counter with integrated bootloader |
US10352844B2 (en) | 2013-03-15 | 2019-07-16 | Particles Plus, Inc. | Multiple particle sensors in a particle counter |
US11579072B2 (en) | 2013-03-15 | 2023-02-14 | Particles Plus, Inc. | Personal air quality monitoring system |
ITRM20130128U1 (en) | 2013-07-23 | 2015-01-24 | Particle Measuring Systems S R L | DEVICE FOR MICROBIAL AIR SAMPLING |
KR20150047097A (en) * | 2013-10-23 | 2015-05-04 | 주식회사 위드텍 | Multi sampling port monitoring apparatus for air pollution measuring and monitoring method for using the same |
WO2015138695A2 (en) | 2014-03-14 | 2015-09-17 | Particle Measuring Systems, Inc. | Filter and blower geometry for particle sampler |
US9810558B2 (en) | 2014-03-14 | 2017-11-07 | Particle Measuring Systems, Inc. | Pressure-based airflow sensing in particle impactor systems |
US9719891B2 (en) | 2015-05-13 | 2017-08-01 | The Southern Company | Simultaneous multi-point testing systems and methods |
US10948470B2 (en) * | 2016-04-29 | 2021-03-16 | TricornTech Taiwan | System and method for in-line monitoring of airborne contamination and process health |
KR20230156814A (en) | 2017-10-26 | 2023-11-14 | 파티클 머슈어링 시스템즈, 인크. | System and method for particles measurement |
JP6875318B2 (en) * | 2018-04-24 | 2021-05-19 | 株式会社日立産機システム | Safety cabinet |
KR20210050517A (en) | 2018-08-31 | 2021-05-07 | 파티클 머슈어링 시스템즈, 인크. | Fluid refractive index to optimize particle counter |
CN112639444A (en) | 2018-09-04 | 2021-04-09 | 粒子监测***有限公司 | Detecting nanoparticles on production equipment and surfaces |
WO2020102038A1 (en) | 2018-11-12 | 2020-05-22 | Particle Measuring Systems, Inc. | Calibration verification for optical particle analyzers |
US11385161B2 (en) | 2018-11-12 | 2022-07-12 | Particle Measuring Systems, Inc. | Calibration verification for optical particle analyzers |
WO2020102032A1 (en) | 2018-11-16 | 2020-05-22 | Particle Measuring Systems, Inc. | Particle sampling systems and methods for robotic controlled manufacturing barrier systems |
KR20210089164A (en) | 2018-11-16 | 2021-07-15 | 파티클 머슈어링 시스템즈, 인크. | Slurry Monitor Coupling Bulk Size Distribution and Single Particle Detection |
WO2020219841A1 (en) | 2019-04-25 | 2020-10-29 | Particle Measuring Systems, Inc. | Particle detection systems and methods for on-axis particle detection and/or differential detection |
JP7182523B2 (en) * | 2019-07-10 | 2022-12-02 | 株式会社日立産機システム | safety cabinet |
EP4022278A4 (en) | 2019-08-26 | 2023-11-01 | Particle Measuring Systems, Inc. | Triggered sampling systems and methods |
US11339733B2 (en) * | 2019-09-06 | 2022-05-24 | Tokyo Electron Limited | Systems and methods to monitor particulate accumulation for bake chamber cleaning |
KR20220072829A (en) | 2019-10-07 | 2022-06-02 | 파티클 머슈어링 시스템즈, 인크. | Particle Detector with Remote Alarm Monitoring and Control |
JP2022550418A (en) | 2019-10-07 | 2022-12-01 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | antimicrobial particle detector |
IT201900020248A1 (en) | 2019-11-04 | 2021-05-04 | Particle Measuring Systems S R L | MOBILE MONITORING DEVICE FOR CONTROLLED CONTAMINATION AREAS |
JP2023501769A (en) | 2019-11-22 | 2023-01-19 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | Advanced systems and methods for interfering particle detection and detection of particles with small size dimensions |
TWI801797B (en) | 2020-01-21 | 2023-05-11 | 美商粒子監測系統有限公司 | Impactor and method for sampling biological particles from a fluid flow |
CN111381611A (en) * | 2020-04-09 | 2020-07-07 | 湖北平安电工材料有限公司 | Mica slurry online concentration control system and method |
US11988591B2 (en) | 2020-07-01 | 2024-05-21 | Particles Plus, Inc. | Modular optical particle counter sensor and apparatus |
EP4356105A1 (en) * | 2021-06-15 | 2024-04-24 | Particle Measuring Systems, Inc. | Modular particle counter with docking station |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE53334C (en) * | H. ALBRECHT in Philadelphia, Nr. 1728 North Seventh Street, V. St. A | Meat cutting machine | ||
CA646702A (en) * | 1962-08-14 | Bailey Meter Company | Gas sample scanning apparatus | |
US3357257A (en) * | 1966-01-28 | 1967-12-12 | Ree Du | Gas sampling and detecting system |
CH442807A (en) * | 1967-01-27 | 1967-08-31 | Walter Eugster & Cie | Method for conveying air samples in room air control systems and device for carrying out the method |
BE758311A (en) | 1969-10-31 | 1971-04-30 | Technicon Instr | FLUID DISTRIBUTOR MANIFOLD |
DE2013682B2 (en) * | 1970-03-21 | 1974-08-15 | Draegerwerk Ag, 2400 Luebeck | Measuring point switch for a suction device |
US3765247A (en) * | 1971-10-22 | 1973-10-16 | Nat Southwire Aluminum | Air sampling device |
US4113434A (en) | 1975-07-30 | 1978-09-12 | Yanagimoto Seisakusho Co., Ltd. | Method and apparatus for collectively sampling a plurality of gaseous phases in desired proportions for gas analysis or other purposes |
JPS60200145A (en) * | 1984-03-26 | 1985-10-09 | Hitachi Ltd | Remote measuring apparatus of cleanliness for clean room |
US4601211A (en) * | 1984-12-12 | 1986-07-22 | The Perkin-Elmer Corporation | Multi-port valve in a gas collection system and method of using same |
US4860598A (en) * | 1985-03-26 | 1989-08-29 | W. L. Gore & Associates, Inc. | Air-stream sampling device |
US4993271A (en) * | 1988-12-12 | 1991-02-19 | Micron Technology, Inc. | Liquid in situ multiport monitoring system |
US5005430A (en) * | 1989-05-16 | 1991-04-09 | Electric Power Research Institute, Inc. | Automated membrane filter sampler |
US5090257A (en) * | 1990-05-09 | 1992-02-25 | The United States Of America As Represented By The Secretary Of The Army | Automatic isokinetic aerosol sampling system |
WO1994029716A1 (en) * | 1993-06-10 | 1994-12-22 | Rupprecht & Patashnick Company, Inc. | Airborne particulate sampling monitor |
JP3470370B2 (en) | 1994-01-24 | 2003-11-25 | 富士通株式会社 | Apparatus and method for specifying dust particle generation position and clean room |
US5601234A (en) | 1994-08-01 | 1997-02-11 | Abbott Laboratories | Fluid nozzle and method of introducing a fluid |
KR100210599B1 (en) | 1996-10-10 | 1999-07-15 | 윤종용 | Particle counter |
US6125710A (en) * | 1997-04-15 | 2000-10-03 | Phoenix Controls Corporation | Networked air measurement system |
KR100252215B1 (en) * | 1997-05-02 | 2000-04-15 | 윤종용 | Monitoring system of the state of clean room measuring apparatus |
KR100236717B1 (en) * | 1997-12-24 | 2000-01-15 | 윤종용 | Particle formation analyzer of smock for clean room and method for it |
-
2000
- 2000-08-15 US US09/638,366 patent/US6615679B1/en not_active Expired - Lifetime
-
2001
- 2001-08-08 GB GB0303601A patent/GB2382139B/en not_active Expired - Fee Related
- 2001-08-08 DE DE10196505T patent/DE10196505T5/en not_active Withdrawn
- 2001-08-08 JP JP2002519077A patent/JP2004506222A/en active Pending
- 2001-08-08 AU AU2001281175A patent/AU2001281175A1/en not_active Abandoned
- 2001-08-08 WO PCT/US2001/024832 patent/WO2002013943A2/en active Application Filing
-
2007
- 2007-02-14 JP JP2007033920A patent/JP2007192829A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
DE10196505T5 (en) | 2004-08-12 |
GB2382139B (en) | 2004-08-04 |
US6615679B1 (en) | 2003-09-09 |
WO2002013943A3 (en) | 2002-08-15 |
GB0303601D0 (en) | 2003-03-19 |
GB2382139A (en) | 2003-05-21 |
JP2007192829A (en) | 2007-08-02 |
WO2002013943A2 (en) | 2002-02-21 |
JP2004506222A (en) | 2004-02-26 |
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