AU2001268742A1 - Capacitive microelectromechanical switches - Google Patents

Capacitive microelectromechanical switches

Info

Publication number
AU2001268742A1
AU2001268742A1 AU2001268742A AU6874201A AU2001268742A1 AU 2001268742 A1 AU2001268742 A1 AU 2001268742A1 AU 2001268742 A AU2001268742 A AU 2001268742A AU 6874201 A AU6874201 A AU 6874201A AU 2001268742 A1 AU2001268742 A1 AU 2001268742A1
Authority
AU
Australia
Prior art keywords
microelectromechanical switches
capacitive microelectromechanical
capacitive
switches
microelectromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001268742A
Inventor
Andrea Borgioli
Amit Nagra
Robert A. York
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Publication of AU2001268742A1 publication Critical patent/AU2001268742A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49105—Switch making
AU2001268742A 2000-06-28 2001-06-28 Capacitive microelectromechanical switches Abandoned AU2001268742A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21536900P 2000-06-28 2000-06-28
US60215369 2000-06-28
PCT/US2001/020564 WO2002001584A1 (en) 2000-06-28 2001-06-28 Capacitive microelectromechanical switches

Publications (1)

Publication Number Publication Date
AU2001268742A1 true AU2001268742A1 (en) 2002-01-08

Family

ID=22802719

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001268742A Abandoned AU2001268742A1 (en) 2000-06-28 2001-06-28 Capacitive microelectromechanical switches

Country Status (3)

Country Link
US (1) US6452124B1 (en)
AU (1) AU2001268742A1 (en)
WO (1) WO2002001584A1 (en)

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Also Published As

Publication number Publication date
WO2002001584A1 (en) 2002-01-03
US6452124B1 (en) 2002-09-17
US20020027064A1 (en) 2002-03-07

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